JPS63276856A - 電界放射電子源を有した電子線装置 - Google Patents

電界放射電子源を有した電子線装置

Info

Publication number
JPS63276856A
JPS63276856A JP61311802A JP31180286A JPS63276856A JP S63276856 A JPS63276856 A JP S63276856A JP 61311802 A JP61311802 A JP 61311802A JP 31180286 A JP31180286 A JP 31180286A JP S63276856 A JPS63276856 A JP S63276856A
Authority
JP
Japan
Prior art keywords
electron beam
lens
current
converging
converging lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61311802A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0576129B2 (enrdf_load_stackoverflow
Inventor
Eitaro Enokido
榎戸　栄太郎
Hiroshi Sawaragi
宏 澤良木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP61311802A priority Critical patent/JPS63276856A/ja
Publication of JPS63276856A publication Critical patent/JPS63276856A/ja
Publication of JPH0576129B2 publication Critical patent/JPH0576129B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP61311802A 1986-12-27 1986-12-27 電界放射電子源を有した電子線装置 Granted JPS63276856A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61311802A JPS63276856A (ja) 1986-12-27 1986-12-27 電界放射電子源を有した電子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61311802A JPS63276856A (ja) 1986-12-27 1986-12-27 電界放射電子源を有した電子線装置

Publications (2)

Publication Number Publication Date
JPS63276856A true JPS63276856A (ja) 1988-11-15
JPH0576129B2 JPH0576129B2 (enrdf_load_stackoverflow) 1993-10-22

Family

ID=18021608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61311802A Granted JPS63276856A (ja) 1986-12-27 1986-12-27 電界放射電子源を有した電子線装置

Country Status (1)

Country Link
JP (1) JPS63276856A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08138600A (ja) * 1994-11-04 1996-05-31 Shimadzu Corp 荷電粒子光学系
WO2006009295A1 (en) * 2004-07-22 2006-01-26 Ricoh Company, Ltd. Electron beam applying apparatus and drawing apparatus
JP2016004733A (ja) * 2014-06-19 2016-01-12 株式会社島津製作所 電子ビーム装置並びに電子ビーム装置の制御装置及び制御方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4998173A (enrdf_load_stackoverflow) * 1973-01-19 1974-09-17
JPS58146344U (ja) * 1982-03-26 1983-10-01 日本電子株式会社 荷電粒子源

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4998173A (enrdf_load_stackoverflow) * 1973-01-19 1974-09-17
JPS58146344U (ja) * 1982-03-26 1983-10-01 日本電子株式会社 荷電粒子源

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08138600A (ja) * 1994-11-04 1996-05-31 Shimadzu Corp 荷電粒子光学系
WO2006009295A1 (en) * 2004-07-22 2006-01-26 Ricoh Company, Ltd. Electron beam applying apparatus and drawing apparatus
US7522510B2 (en) 2004-07-22 2009-04-21 Ricoh Company, Ltd. Electron beam applying apparatus and drawing apparatus
EP1769521A4 (en) * 2004-07-22 2010-12-29 Ricoh Co Ltd ELECTRON BEAM APPLICATION DEVICE AND SIGNATURE DEVICE
US7929396B2 (en) 2004-07-22 2011-04-19 Ricoh Company, Ltd. Electron beam applying apparatus and drawing apparatus
JP2016004733A (ja) * 2014-06-19 2016-01-12 株式会社島津製作所 電子ビーム装置並びに電子ビーム装置の制御装置及び制御方法

Also Published As

Publication number Publication date
JPH0576129B2 (enrdf_load_stackoverflow) 1993-10-22

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