JPS4998173A - - Google Patents

Info

Publication number
JPS4998173A
JPS4998173A JP48007914A JP791473A JPS4998173A JP S4998173 A JPS4998173 A JP S4998173A JP 48007914 A JP48007914 A JP 48007914A JP 791473 A JP791473 A JP 791473A JP S4998173 A JPS4998173 A JP S4998173A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48007914A
Other languages
Japanese (ja)
Other versions
JPS5531986B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP791473A priority Critical patent/JPS5531986B2/ja
Publication of JPS4998173A publication Critical patent/JPS4998173A/ja
Publication of JPS5531986B2 publication Critical patent/JPS5531986B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP791473A 1973-01-19 1973-01-19 Expired JPS5531986B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP791473A JPS5531986B2 (enrdf_load_stackoverflow) 1973-01-19 1973-01-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP791473A JPS5531986B2 (enrdf_load_stackoverflow) 1973-01-19 1973-01-19

Publications (2)

Publication Number Publication Date
JPS4998173A true JPS4998173A (enrdf_load_stackoverflow) 1974-09-17
JPS5531986B2 JPS5531986B2 (enrdf_load_stackoverflow) 1980-08-22

Family

ID=11678796

Family Applications (1)

Application Number Title Priority Date Filing Date
JP791473A Expired JPS5531986B2 (enrdf_load_stackoverflow) 1973-01-19 1973-01-19

Country Status (1)

Country Link
JP (1) JPS5531986B2 (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6081749A (ja) * 1983-10-12 1985-05-09 Jeol Ltd イオンビ−ム装置
JPS63166130A (ja) * 1986-12-27 1988-07-09 Jeol Ltd 熱電界放射型電子源を有した電子線装置
JPS63276856A (ja) * 1986-12-27 1988-11-15 Jeol Ltd 電界放射電子源を有した電子線装置
JP2008543014A (ja) * 2005-06-03 2008-11-27 シーイービーティー・カンパニー・リミティッド 単純構造の超小型電子カラム

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6340165B2 (ja) 2013-04-25 2018-06-06 株式会社日立ハイテクノロジーズ 電子銃、荷電粒子銃およびそれらを用いた荷電粒子線装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6081749A (ja) * 1983-10-12 1985-05-09 Jeol Ltd イオンビ−ム装置
JPS63166130A (ja) * 1986-12-27 1988-07-09 Jeol Ltd 熱電界放射型電子源を有した電子線装置
JPS63276856A (ja) * 1986-12-27 1988-11-15 Jeol Ltd 電界放射電子源を有した電子線装置
JP2008543014A (ja) * 2005-06-03 2008-11-27 シーイービーティー・カンパニー・リミティッド 単純構造の超小型電子カラム

Also Published As

Publication number Publication date
JPS5531986B2 (enrdf_load_stackoverflow) 1980-08-22

Similar Documents

Publication Publication Date Title
AU476761B2 (enrdf_load_stackoverflow)
AU465372B2 (enrdf_load_stackoverflow)
AU474593B2 (enrdf_load_stackoverflow)
AU474511B2 (enrdf_load_stackoverflow)
AU474838B2 (enrdf_load_stackoverflow)
AU471343B2 (enrdf_load_stackoverflow)
BR7407611D0 (enrdf_load_stackoverflow)
AU465434B2 (enrdf_load_stackoverflow)
AU476714B2 (enrdf_load_stackoverflow)
AR201229Q (enrdf_load_stackoverflow)
AU466283B2 (enrdf_load_stackoverflow)
AU476696B2 (enrdf_load_stackoverflow)
AU472848B2 (enrdf_load_stackoverflow)
JPS4998173A (enrdf_load_stackoverflow)
AU477823B2 (enrdf_load_stackoverflow)
AU477824B2 (enrdf_load_stackoverflow)
AU476873B1 (enrdf_load_stackoverflow)
AR200885A1 (enrdf_load_stackoverflow)
AU471461B2 (enrdf_load_stackoverflow)
BR7303063D0 (enrdf_load_stackoverflow)
BG18959A1 (enrdf_load_stackoverflow)
CH1069974A4 (enrdf_load_stackoverflow)
AU479562A (enrdf_load_stackoverflow)
AU479539A (enrdf_load_stackoverflow)
AU479522A (enrdf_load_stackoverflow)