JPS5531986B2 - - Google Patents

Info

Publication number
JPS5531986B2
JPS5531986B2 JP791473A JP791473A JPS5531986B2 JP S5531986 B2 JPS5531986 B2 JP S5531986B2 JP 791473 A JP791473 A JP 791473A JP 791473 A JP791473 A JP 791473A JP S5531986 B2 JPS5531986 B2 JP S5531986B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP791473A
Other languages
Japanese (ja)
Other versions
JPS4998173A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP791473A priority Critical patent/JPS5531986B2/ja
Publication of JPS4998173A publication Critical patent/JPS4998173A/ja
Publication of JPS5531986B2 publication Critical patent/JPS5531986B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP791473A 1973-01-19 1973-01-19 Expired JPS5531986B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP791473A JPS5531986B2 (enrdf_load_stackoverflow) 1973-01-19 1973-01-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP791473A JPS5531986B2 (enrdf_load_stackoverflow) 1973-01-19 1973-01-19

Publications (2)

Publication Number Publication Date
JPS4998173A JPS4998173A (enrdf_load_stackoverflow) 1974-09-17
JPS5531986B2 true JPS5531986B2 (enrdf_load_stackoverflow) 1980-08-22

Family

ID=11678796

Family Applications (1)

Application Number Title Priority Date Filing Date
JP791473A Expired JPS5531986B2 (enrdf_load_stackoverflow) 1973-01-19 1973-01-19

Country Status (1)

Country Link
JP (1) JPS5531986B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014175087A1 (ja) * 2013-04-25 2014-10-30 株式会社日立ハイテクノロジーズ 電子銃、荷電粒子銃およびそれらを用いた荷電粒子線装置

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6081749A (ja) * 1983-10-12 1985-05-09 Jeol Ltd イオンビ−ム装置
JPH0619960B2 (ja) * 1986-12-27 1994-03-16 日本電子株式会社 熱電界放射型電子源を有した電子線装置
JPS63276856A (ja) * 1986-12-27 1988-11-15 Jeol Ltd 電界放射電子源を有した電子線装置
KR100973337B1 (ko) * 2005-06-03 2010-07-30 전자빔기술센터 주식회사 단순 구조의 초소형 전자칼럼

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014175087A1 (ja) * 2013-04-25 2014-10-30 株式会社日立ハイテクノロジーズ 電子銃、荷電粒子銃およびそれらを用いた荷電粒子線装置
JP2014216182A (ja) * 2013-04-25 2014-11-17 株式会社日立ハイテクノロジーズ 電子銃、荷電粒子銃およびそれらを用いた荷電粒子線装置
US9570268B2 (en) 2013-04-25 2017-02-14 Hitachi High-Technologies Corporation Electron gun, charged particle gun, and charged particle beam apparatus using electron gun and charged particle gun

Also Published As

Publication number Publication date
JPS4998173A (enrdf_load_stackoverflow) 1974-09-17

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