JPH0575973B2 - - Google Patents

Info

Publication number
JPH0575973B2
JPH0575973B2 JP63238231A JP23823188A JPH0575973B2 JP H0575973 B2 JPH0575973 B2 JP H0575973B2 JP 63238231 A JP63238231 A JP 63238231A JP 23823188 A JP23823188 A JP 23823188A JP H0575973 B2 JPH0575973 B2 JP H0575973B2
Authority
JP
Japan
Prior art keywords
static pressure
pressure bearing
support shaft
table support
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP63238231A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0287038A (ja
Inventor
Shinji Fukuda
Takehiro Fukushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IMV KK
Original Assignee
IMV KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IMV KK filed Critical IMV KK
Priority to JP63238231A priority Critical patent/JPH0287038A/ja
Publication of JPH0287038A publication Critical patent/JPH0287038A/ja
Publication of JPH0575973B2 publication Critical patent/JPH0575973B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
JP63238231A 1988-09-22 1988-09-22 振動発生機 Granted JPH0287038A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63238231A JPH0287038A (ja) 1988-09-22 1988-09-22 振動発生機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63238231A JPH0287038A (ja) 1988-09-22 1988-09-22 振動発生機

Publications (2)

Publication Number Publication Date
JPH0287038A JPH0287038A (ja) 1990-03-27
JPH0575973B2 true JPH0575973B2 (enrdf_load_html_response) 1993-10-21

Family

ID=17027098

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63238231A Granted JPH0287038A (ja) 1988-09-22 1988-09-22 振動発生機

Country Status (1)

Country Link
JP (1) JPH0287038A (enrdf_load_html_response)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS497171A (enrdf_load_html_response) * 1972-05-12 1974-01-22
JPS5444461A (en) * 1977-09-14 1979-04-07 Nec Corp Generation circuit of multi-pulse
JPS5855836A (ja) * 1981-09-30 1983-04-02 Shinken:Kk 多次元振動試験機およびその連結器

Also Published As

Publication number Publication date
JPH0287038A (ja) 1990-03-27

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