JPH0575825B2 - - Google Patents
Info
- Publication number
- JPH0575825B2 JPH0575825B2 JP61283721A JP28372186A JPH0575825B2 JP H0575825 B2 JPH0575825 B2 JP H0575825B2 JP 61283721 A JP61283721 A JP 61283721A JP 28372186 A JP28372186 A JP 28372186A JP H0575825 B2 JPH0575825 B2 JP H0575825B2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- laser beam
- ceramic material
- irradiated
- multilayer film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28372186A JPS63137162A (ja) | 1986-11-28 | 1986-11-28 | レ−ザ蒸着式多層膜形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28372186A JPS63137162A (ja) | 1986-11-28 | 1986-11-28 | レ−ザ蒸着式多層膜形成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63137162A JPS63137162A (ja) | 1988-06-09 |
| JPH0575825B2 true JPH0575825B2 (enrdf_load_stackoverflow) | 1993-10-21 |
Family
ID=17669228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28372186A Granted JPS63137162A (ja) | 1986-11-28 | 1986-11-28 | レ−ザ蒸着式多層膜形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63137162A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0830357A (ja) * | 1994-07-20 | 1996-02-02 | Nec Gumma Ltd | 冷却用ファン制御システム |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5931865A (ja) * | 1982-08-13 | 1984-02-21 | Ulvac Corp | カプセル型蒸発源 |
| JPS59116373A (ja) * | 1982-12-22 | 1984-07-05 | Agency Of Ind Science & Technol | レ−ザ蒸着装置 |
-
1986
- 1986-11-28 JP JP28372186A patent/JPS63137162A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0830357A (ja) * | 1994-07-20 | 1996-02-02 | Nec Gumma Ltd | 冷却用ファン制御システム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63137162A (ja) | 1988-06-09 |
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