JPH0575554B2 - - Google Patents
Info
- Publication number
- JPH0575554B2 JPH0575554B2 JP17389487A JP17389487A JPH0575554B2 JP H0575554 B2 JPH0575554 B2 JP H0575554B2 JP 17389487 A JP17389487 A JP 17389487A JP 17389487 A JP17389487 A JP 17389487A JP H0575554 B2 JPH0575554 B2 JP H0575554B2
- Authority
- JP
- Japan
- Prior art keywords
- suction
- flow path
- valve
- valve body
- suction flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001179 sorption measurement Methods 0.000 claims description 8
- 238000009423 ventilation Methods 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 4
- 101000793686 Homo sapiens Azurocidin Proteins 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000003463 adsorbent Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17389487A JPS6420976A (en) | 1987-07-14 | 1987-07-14 | Vacuum forceps |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17389487A JPS6420976A (en) | 1987-07-14 | 1987-07-14 | Vacuum forceps |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6420976A JPS6420976A (en) | 1989-01-24 |
JPH0575554B2 true JPH0575554B2 (enrdf_load_stackoverflow) | 1993-10-20 |
Family
ID=15969066
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17389487A Granted JPS6420976A (en) | 1987-07-14 | 1987-07-14 | Vacuum forceps |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6420976A (enrdf_load_stackoverflow) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4878860B2 (ja) * | 2006-02-14 | 2012-02-15 | Hoya株式会社 | 吸着支持具 |
JP5226891B1 (ja) * | 2012-09-13 | 2013-07-03 | 株式会社積進 | 吐き出し機能を有する吸引ピンセット |
-
1987
- 1987-07-14 JP JP17389487A patent/JPS6420976A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6420976A (en) | 1989-01-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20071020 Year of fee payment: 14 |