JPH0575178B2 - - Google Patents

Info

Publication number
JPH0575178B2
JPH0575178B2 JP13460087A JP13460087A JPH0575178B2 JP H0575178 B2 JPH0575178 B2 JP H0575178B2 JP 13460087 A JP13460087 A JP 13460087A JP 13460087 A JP13460087 A JP 13460087A JP H0575178 B2 JPH0575178 B2 JP H0575178B2
Authority
JP
Japan
Prior art keywords
probe card
inner ring
adapter
ring
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP13460087A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63299243A (ja
Inventor
Wataru Karasawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP13460087A priority Critical patent/JPS63299243A/ja
Publication of JPS63299243A publication Critical patent/JPS63299243A/ja
Publication of JPH0575178B2 publication Critical patent/JPH0575178B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)
JP13460087A 1987-05-29 1987-05-29 プロ−ブカ−ドアダプタ Granted JPS63299243A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13460087A JPS63299243A (ja) 1987-05-29 1987-05-29 プロ−ブカ−ドアダプタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13460087A JPS63299243A (ja) 1987-05-29 1987-05-29 プロ−ブカ−ドアダプタ

Publications (2)

Publication Number Publication Date
JPS63299243A JPS63299243A (ja) 1988-12-06
JPH0575178B2 true JPH0575178B2 (enEXAMPLES) 1993-10-20

Family

ID=15132190

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13460087A Granted JPS63299243A (ja) 1987-05-29 1987-05-29 プロ−ブカ−ドアダプタ

Country Status (1)

Country Link
JP (1) JPS63299243A (enEXAMPLES)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0730887U (ja) * 1993-11-30 1995-06-13 金一 新妻 トイレットペーパーホルダー

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04276018A (ja) * 1991-03-01 1992-10-01 Kobe Steel Ltd 圧壊特性に優れたドアガードバーの製造方法
JPH0513046U (ja) * 1991-07-29 1993-02-19 山形日本電気株式会社 半導体プローブボードの検査装置
KR100632032B1 (ko) * 1999-07-14 2006-10-04 동부일렉트로닉스 주식회사 프로브 카드 분리 가이드를 구비한 ｄｃ 검사장비
JP2005265658A (ja) 2004-03-19 2005-09-29 Tokyo Electron Ltd 複数種のテスタに対応可能なプローブ装置
JP6054150B2 (ja) 2012-11-22 2016-12-27 日本電子材料株式会社 プローブカードケース及びプローブカードの搬送方法
DE102015113046A1 (de) * 2015-08-07 2017-02-09 Xcerra Corp. Positioniereinrichtung für einen Paralleltester zum Testen von Leiterplatten und Paralleltester zum Testen von Leiterplatten

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0730887U (ja) * 1993-11-30 1995-06-13 金一 新妻 トイレットペーパーホルダー

Also Published As

Publication number Publication date
JPS63299243A (ja) 1988-12-06

Similar Documents

Publication Publication Date Title
US10082524B2 (en) Prober in which probe head of probe card is replaced automatically
JP3215475B2 (ja) プローブ装置
JPH0575178B2 (enEXAMPLES)
US5124931A (en) Method of inspecting electric characteristics of wafers and apparatus therefor
US4966520A (en) Method of positioning objects to be measured
JPH0370900B2 (enEXAMPLES)
EP1411363A2 (en) Prober
JP3169900B2 (ja) プローバ
JPH0669296A (ja) 試験装置
JPH0719817B2 (ja) プロ−ブカ−ド自動交換方法
JPH0221268A (ja) 接触形電気的検査用プローバ
JPH0528767Y2 (enEXAMPLES)
JP3246237B2 (ja) 半導体測定プローブカード用プロテクターおよび保管方法
JPH0744205B2 (ja) プローブカード取付方法
JP2002156410A (ja) 搬送装置、ｉｃ検査装置、搬送方法及びｉｃ検査方法
JPH01161173A (ja) プローブ装置のプローブカード自動交換方法
JPS63110744A (ja) プロ−ブ装置
JPS63244640A (ja) プロ−ブカ−ドユニツト部品
JPH04355943A (ja) ウエハプローバ
KR100285606B1 (ko) 웨이퍼 프로버의 카드체인저
JP2606442B2 (ja) 半導体装置のテスト治工具
JPH01145587A (ja) プローブ装置
JPH01145577A (ja) プローブカードの製造方法
JPH034031Y2 (enEXAMPLES)
JPH02137347A (ja) 位置合わせ方法