JPH0574212B2 - - Google Patents
Info
- Publication number
- JPH0574212B2 JPH0574212B2 JP59152948A JP15294884A JPH0574212B2 JP H0574212 B2 JPH0574212 B2 JP H0574212B2 JP 59152948 A JP59152948 A JP 59152948A JP 15294884 A JP15294884 A JP 15294884A JP H0574212 B2 JPH0574212 B2 JP H0574212B2
- Authority
- JP
- Japan
- Prior art keywords
- output
- dead zone
- light
- receiving element
- elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010586 diagram Methods 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 5
- 230000004907 flux Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000000470 constituent Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15294884A JPS6132518A (ja) | 1984-07-25 | 1984-07-25 | 位置決め制御装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15294884A JPS6132518A (ja) | 1984-07-25 | 1984-07-25 | 位置決め制御装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6132518A JPS6132518A (ja) | 1986-02-15 |
| JPH0574212B2 true JPH0574212B2 (enrdf_load_stackoverflow) | 1993-10-18 |
Family
ID=15551656
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15294884A Granted JPS6132518A (ja) | 1984-07-25 | 1984-07-25 | 位置決め制御装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6132518A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02115991U (enrdf_load_stackoverflow) * | 1989-03-07 | 1990-09-17 | ||
| CN100462875C (zh) * | 2006-04-14 | 2009-02-18 | 中国科学院长春光学精密机械与物理研究所 | 具有间隙特性传动机构的控制系统 |
-
1984
- 1984-07-25 JP JP15294884A patent/JPS6132518A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6132518A (ja) | 1986-02-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |