JPH0573641B2 - - Google Patents
Info
- Publication number
- JPH0573641B2 JPH0573641B2 JP24828685A JP24828685A JPH0573641B2 JP H0573641 B2 JPH0573641 B2 JP H0573641B2 JP 24828685 A JP24828685 A JP 24828685A JP 24828685 A JP24828685 A JP 24828685A JP H0573641 B2 JPH0573641 B2 JP H0573641B2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- wafer
- cartridge
- wafers
- basket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 238000013459 approach Methods 0.000 claims description 2
- 238000000605 extraction Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 100
- 239000004065 semiconductor Substances 0.000 description 16
- 238000012546 transfer Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 7
- 238000012545 processing Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 230000003319 supportive effect Effects 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24828685A JPS62111837A (ja) | 1985-11-06 | 1985-11-06 | 板状体取出し装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24828685A JPS62111837A (ja) | 1985-11-06 | 1985-11-06 | 板状体取出し装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62111837A JPS62111837A (ja) | 1987-05-22 |
| JPH0573641B2 true JPH0573641B2 (enrdf_load_stackoverflow) | 1993-10-14 |
Family
ID=17175833
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24828685A Granted JPS62111837A (ja) | 1985-11-06 | 1985-11-06 | 板状体取出し装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62111837A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR960007333B1 (ko) * | 1991-05-10 | 1996-05-31 | 마쓰다 가부시끼가이샤 | 자동차의 제조방법 |
-
1985
- 1985-11-06 JP JP24828685A patent/JPS62111837A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62111837A (ja) | 1987-05-22 |