JPH0573251B2 - - Google Patents

Info

Publication number
JPH0573251B2
JPH0573251B2 JP2112187A JP2112187A JPH0573251B2 JP H0573251 B2 JPH0573251 B2 JP H0573251B2 JP 2112187 A JP2112187 A JP 2112187A JP 2112187 A JP2112187 A JP 2112187A JP H0573251 B2 JPH0573251 B2 JP H0573251B2
Authority
JP
Japan
Prior art keywords
reaction
reaction gas
susceptor
gas
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2112187A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63188934A (ja
Inventor
Katsuhide Manabe
Nobuo Okazaki
Isamu Akasaki
Kazumasa Hiramatsu
Hiroshi Amano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyoda Gosei Co Ltd
Original Assignee
Toyoda Gosei Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyoda Gosei Co Ltd filed Critical Toyoda Gosei Co Ltd
Priority to JP62021121A priority Critical patent/JPS63188934A/ja
Publication of JPS63188934A publication Critical patent/JPS63188934A/ja
Publication of JPH0573251B2 publication Critical patent/JPH0573251B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Led Devices (AREA)
JP62021121A 1987-01-31 1987-01-31 気相成長装置 Granted JPS63188934A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62021121A JPS63188934A (ja) 1987-01-31 1987-01-31 気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62021121A JPS63188934A (ja) 1987-01-31 1987-01-31 気相成長装置

Publications (2)

Publication Number Publication Date
JPS63188934A JPS63188934A (ja) 1988-08-04
JPH0573251B2 true JPH0573251B2 (enExample) 1993-10-14

Family

ID=12046048

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62021121A Granted JPS63188934A (ja) 1987-01-31 1987-01-31 気相成長装置

Country Status (1)

Country Link
JP (1) JPS63188934A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2514359Y2 (ja) * 1990-08-06 1996-10-16 古河電気工業株式会社 サセプタ浄化用真空ベ―キング装置

Also Published As

Publication number Publication date
JPS63188934A (ja) 1988-08-04

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