JPH0573068B2 - - Google Patents

Info

Publication number
JPH0573068B2
JPH0573068B2 JP61029310A JP2931086A JPH0573068B2 JP H0573068 B2 JPH0573068 B2 JP H0573068B2 JP 61029310 A JP61029310 A JP 61029310A JP 2931086 A JP2931086 A JP 2931086A JP H0573068 B2 JPH0573068 B2 JP H0573068B2
Authority
JP
Japan
Prior art keywords
region
conductivity type
insulating film
high concentration
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61029310A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62188273A (ja
Inventor
Nobuaki Ootsuka
Sumio Tanaka
Shigeru Atsumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP2931086A priority Critical patent/JPS62188273A/ja
Publication of JPS62188273A publication Critical patent/JPS62188273A/ja
Publication of JPH0573068B2 publication Critical patent/JPH0573068B2/ja
Granted legal-status Critical Current

Links

JP2931086A 1986-02-13 1986-02-13 半導体装置およびその製造方法 Granted JPS62188273A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2931086A JPS62188273A (ja) 1986-02-13 1986-02-13 半導体装置およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2931086A JPS62188273A (ja) 1986-02-13 1986-02-13 半導体装置およびその製造方法

Publications (2)

Publication Number Publication Date
JPS62188273A JPS62188273A (ja) 1987-08-17
JPH0573068B2 true JPH0573068B2 (enrdf_load_stackoverflow) 1993-10-13

Family

ID=12272646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2931086A Granted JPS62188273A (ja) 1986-02-13 1986-02-13 半導体装置およびその製造方法

Country Status (1)

Country Link
JP (1) JPS62188273A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05121737A (ja) * 1991-07-15 1993-05-18 Nec Corp 半導体装置の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53118376A (en) * 1977-03-25 1978-10-16 Nec Corp Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS62188273A (ja) 1987-08-17

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees