JPH057248Y2 - - Google Patents
Info
- Publication number
- JPH057248Y2 JPH057248Y2 JP7999986U JP7999986U JPH057248Y2 JP H057248 Y2 JPH057248 Y2 JP H057248Y2 JP 7999986 U JP7999986 U JP 7999986U JP 7999986 U JP7999986 U JP 7999986U JP H057248 Y2 JPH057248 Y2 JP H057248Y2
- Authority
- JP
- Japan
- Prior art keywords
- graphite
- boat
- holder
- wafer
- melt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 31
- 229910002804 graphite Inorganic materials 0.000 claims description 29
- 239000010439 graphite Substances 0.000 claims description 29
- 239000000155 melt Substances 0.000 claims description 10
- 239000007791 liquid phase Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 22
- 239000007789 gas Substances 0.000 description 10
- 238000000746 purification Methods 0.000 description 7
- 238000011282 treatment Methods 0.000 description 5
- 239000007770 graphite material Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 238000007872 degassing Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000009489 vacuum treatment Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7999986U JPH057248Y2 (enrdf_load_stackoverflow) | 1986-05-27 | 1986-05-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7999986U JPH057248Y2 (enrdf_load_stackoverflow) | 1986-05-27 | 1986-05-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62191874U JPS62191874U (enrdf_load_stackoverflow) | 1987-12-05 |
| JPH057248Y2 true JPH057248Y2 (enrdf_load_stackoverflow) | 1993-02-24 |
Family
ID=30930400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7999986U Expired - Lifetime JPH057248Y2 (enrdf_load_stackoverflow) | 1986-05-27 | 1986-05-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH057248Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-05-27 JP JP7999986U patent/JPH057248Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62191874U (enrdf_load_stackoverflow) | 1987-12-05 |
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