JPS62191874U - - Google Patents

Info

Publication number
JPS62191874U
JPS62191874U JP7999986U JP7999986U JPS62191874U JP S62191874 U JPS62191874 U JP S62191874U JP 7999986 U JP7999986 U JP 7999986U JP 7999986 U JP7999986 U JP 7999986U JP S62191874 U JPS62191874 U JP S62191874U
Authority
JP
Japan
Prior art keywords
boat
graphite
members
holder
epitaxial growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7999986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH057248Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7999986U priority Critical patent/JPH057248Y2/ja
Publication of JPS62191874U publication Critical patent/JPS62191874U/ja
Application granted granted Critical
Publication of JPH057248Y2 publication Critical patent/JPH057248Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP7999986U 1986-05-27 1986-05-27 Expired - Lifetime JPH057248Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7999986U JPH057248Y2 (enrdf_load_stackoverflow) 1986-05-27 1986-05-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7999986U JPH057248Y2 (enrdf_load_stackoverflow) 1986-05-27 1986-05-27

Publications (2)

Publication Number Publication Date
JPS62191874U true JPS62191874U (enrdf_load_stackoverflow) 1987-12-05
JPH057248Y2 JPH057248Y2 (enrdf_load_stackoverflow) 1993-02-24

Family

ID=30930400

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7999986U Expired - Lifetime JPH057248Y2 (enrdf_load_stackoverflow) 1986-05-27 1986-05-27

Country Status (1)

Country Link
JP (1) JPH057248Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH057248Y2 (enrdf_load_stackoverflow) 1993-02-24

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