JPS62191874U - - Google Patents
Info
- Publication number
- JPS62191874U JPS62191874U JP7999986U JP7999986U JPS62191874U JP S62191874 U JPS62191874 U JP S62191874U JP 7999986 U JP7999986 U JP 7999986U JP 7999986 U JP7999986 U JP 7999986U JP S62191874 U JPS62191874 U JP S62191874U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- graphite
- members
- holder
- epitaxial growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910002804 graphite Inorganic materials 0.000 claims description 4
- 239000010439 graphite Substances 0.000 claims description 4
- 239000007791 liquid phase Substances 0.000 claims 1
- 239000000155 melt Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
第１図は本考案の一実施例に係る黒鉛スライド
ボートの構造を示す図、第２図は上記実施例のボ
ートと従来ボートを使用してエピ成長して得られ
た可視エピウエハの発光出力推移を示す図、第３
図は従来ボートの構造を示す図である。
１…メルト、２…メルトホルダー、３…ウエハ
、４…ウエハホルダー、５…ボート、６…操作棒
、７…ボルト。
Fig. 1 is a diagram showing the structure of a graphite slide boat according to an embodiment of the present invention, and Fig. 2 is a graph showing changes in luminous output of visible epiwafers obtained by epitaxial growth using the boat of the above embodiment and a conventional boat. Figure 3 showing
The figure shows the structure of a conventional boat. 1...Melt, 2...Melt holder, 3...Wafer, 4...Wafer holder, 5...Boat, 6...Operation rod, 7...Bolt.
Claims (1)
黒鉛製部材を有する液相エピタキシヤル成長用の
黒鉛スライドボートにおいて、前記各部材のうち
少なくとも１つの部材を３mm以下の厚さの単板の
重ね合わせによつて構成したことを特徴とする黒
鉛スライドボート。 In a graphite slide boat for liquid phase epitaxial growth having graphite members such as a melt holder, wafer holder, boat, etc., at least one of the above members is stacked with veneers with a thickness of 3 mm or less. A graphite slide boat characterized by the following configuration.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7999986U JPH057248Y2 (en) | 1986-05-27 | 1986-05-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7999986U JPH057248Y2 (en) | 1986-05-27 | 1986-05-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62191874U true JPS62191874U (en) | 1987-12-05 |
| JPH057248Y2 JPH057248Y2 (en) | 1993-02-24 |
Family
ID=30930400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7999986U Expired - Lifetime JPH057248Y2 (en) | 1986-05-27 | 1986-05-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH057248Y2 (en) |
-
1986
- 1986-05-27 JP JP7999986U patent/JPH057248Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH057248Y2 (en) | 1993-02-24 |