JPH01136179U - - Google Patents
Info
- Publication number
- JPH01136179U JPH01136179U JP2996188U JP2996188U JPH01136179U JP H01136179 U JPH01136179 U JP H01136179U JP 2996188 U JP2996188 U JP 2996188U JP 2996188 U JP2996188 U JP 2996188U JP H01136179 U JPH01136179 U JP H01136179U
- Authority
- JP
- Japan
- Prior art keywords
- graphite crucible
- groove
- pulling
- housed
- single crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 10
- 229910002804 graphite Inorganic materials 0.000 claims description 10
- 239000010439 graphite Substances 0.000 claims description 10
- 125000006850 spacer group Chemical group 0.000 claims description 5
- 239000013078 crystal Substances 0.000 claims 5
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
第１〜１１図はいずれも本考案の黒鉛ルツボの
１実施例を示す。
１……黒鉛ルツボ、２……削溝、３……スペー
サー、４……底部。
1 to 11 all show one embodiment of the graphite crucible of the present invention. 1...graphite crucible, 2...groove, 3...spacer, 4...bottom.
Claims (1)
て、その分割面の少なくとも１部に削溝を有する
と共に、この削溝内に収納すべきスペーサーとを
具備することを特徴とする単結晶引き上げ用黒鉛
ルツボの構造。 (2) 上記削溝を黒鉛ルツボの内側に設け、これ
にスペーサーを収納したことを特徴とする請求項
１に記載の単結晶引き上げ用黒鉛ルツボの構造。 (3) 上記削溝を黒鉛ルツボの側壁中に設け、こ
れにスペーサーを収納したことを特徴とする請求
項１に記載の単結晶引き上げ用黒鉛ルツボの構造
。 (4) 上記削溝を黒鉛ルツボの内側とその側壁中
の夫々に設け、これ等夫々にスペーサーを収納し
たことを特徴とする請求項１に記載の単結晶引き
上げ用黒鉛ルツボの構造。[Claims for Utility Model Registration] (1) A split graphite crucible for pulling a single crystal, which has a groove on at least a part of its split surface, and a spacer to be housed in the groove. The structure of a graphite crucible for pulling single crystals is characterized by: (2) The structure of a graphite crucible for pulling a single crystal according to claim 1, wherein the groove is provided inside the graphite crucible, and a spacer is housed in the groove. (3) The structure of a graphite crucible for pulling a single crystal according to claim 1, wherein the groove is provided in a side wall of the graphite crucible, and a spacer is housed in the groove. (4) The structure of a graphite crucible for pulling a single crystal according to claim 1, wherein the grooves are provided on the inside of the graphite crucible and on the side wall thereof, and spacers are housed in each of these grooves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2996188U JPH01136179U (en) | 1988-03-07 | 1988-03-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2996188U JPH01136179U (en) | 1988-03-07 | 1988-03-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01136179U true JPH01136179U (en) | 1989-09-18 |
Family
ID=31254595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2996188U Pending JPH01136179U (en) | 1988-03-07 | 1988-03-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01136179U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0569172U (en) * | 1992-02-26 | 1993-09-17 | コマツ電子金属株式会社 | Graphite crucible for single crystal production equipment |
-
1988
- 1988-03-07 JP JP2996188U patent/JPH01136179U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0569172U (en) * | 1992-02-26 | 1993-09-17 | コマツ電子金属株式会社 | Graphite crucible for single crystal production equipment |
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