JPH01168558U - - Google Patents
Info
- Publication number
- JPH01168558U JPH01168558U JP6668688U JP6668688U JPH01168558U JP H01168558 U JPH01168558 U JP H01168558U JP 6668688 U JP6668688 U JP 6668688U JP 6668688 U JP6668688 U JP 6668688U JP H01168558 U JPH01168558 U JP H01168558U
- Authority
- JP
- Japan
- Prior art keywords
- pan
- counterbore
- wafer
- holding
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案のパンタイプサセプターの一例
の上面説明図、第２図は第１図中のＡ―Ａ′線に
沿う断面説明図である。又、第３図は従来のパン
タイプサセプターの一例の上面説明図、第４図は
第３図中のＢ―Ｂ′線に沿う断面説明図である。
１……座ぐり部。
FIG. 1 is an explanatory top view of an example of the bread-type susceptor of the present invention, and FIG. 2 is an explanatory cross-sectional view taken along line AA' in FIG. 1. 3 is an explanatory top view of an example of a conventional pan-type susceptor, and FIG. 4 is an explanatory cross-sectional view taken along line BB' in FIG. 3. 1...Spot facing part.
Claims (1)
部を有することを特徴とするパンタイプサセプタ
ー。 A pan-type susceptor characterized by having a counterbore for holding a wafer on both the front and back sides.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6668688U JPH01168558U (en) | 1988-05-20 | 1988-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6668688U JPH01168558U (en) | 1988-05-20 | 1988-05-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01168558U true JPH01168558U (en) | 1989-11-28 |
Family
ID=31292083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6668688U Pending JPH01168558U (en) | 1988-05-20 | 1988-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01168558U (en) |
-
1988
- 1988-05-20 JP JP6668688U patent/JPH01168558U/ja active Pending