JPH0571148B2 - - Google Patents
Info
- Publication number
- JPH0571148B2 JPH0571148B2 JP3201086A JP3201086A JPH0571148B2 JP H0571148 B2 JPH0571148 B2 JP H0571148B2 JP 3201086 A JP3201086 A JP 3201086A JP 3201086 A JP3201086 A JP 3201086A JP H0571148 B2 JPH0571148 B2 JP H0571148B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- stopper
- acceleration sensor
- semiconductor substrate
- acceleration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 44
- 230000001133 acceleration Effects 0.000 claims description 29
- 239000004065 semiconductor Substances 0.000 claims description 13
- 238000006073 displacement reaction Methods 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 25
- 229910052710 silicon Inorganic materials 0.000 description 25
- 239000010703 silicon Substances 0.000 description 25
- 239000000853 adhesive Substances 0.000 description 10
- 230000001070 adhesive effect Effects 0.000 description 10
- 230000008646 thermal stress Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000035882 stress Effects 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 244000309464 bull Species 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3201086A JPS62190774A (ja) | 1986-02-18 | 1986-02-18 | 加速度センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3201086A JPS62190774A (ja) | 1986-02-18 | 1986-02-18 | 加速度センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62190774A JPS62190774A (ja) | 1987-08-20 |
| JPH0571148B2 true JPH0571148B2 (enrdf_load_stackoverflow) | 1993-10-06 |
Family
ID=12346901
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3201086A Granted JPS62190774A (ja) | 1986-02-18 | 1986-02-18 | 加速度センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62190774A (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01233372A (ja) * | 1988-03-14 | 1989-09-19 | Murata Mfg Co Ltd | 圧電型加速度センサ |
| DE3814952A1 (de) * | 1988-05-03 | 1989-11-23 | Bosch Gmbh Robert | Sensor |
| BR8907573A (pt) * | 1989-05-24 | 1991-06-18 | Tselevoi N Tekhn Kooperativ St | Maquina de deslocamento giratoria |
| JPH0413975A (ja) * | 1990-05-07 | 1992-01-17 | Nec Corp | 半導体加速度センサ |
| JPH057006A (ja) * | 1991-06-28 | 1993-01-14 | Mitsubishi Electric Corp | 半導体加速度検出装置 |
-
1986
- 1986-02-18 JP JP3201086A patent/JPS62190774A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62190774A (ja) | 1987-08-20 |
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