JPH0571130B2 - - Google Patents
Info
- Publication number
- JPH0571130B2 JPH0571130B2 JP61023036A JP2303686A JPH0571130B2 JP H0571130 B2 JPH0571130 B2 JP H0571130B2 JP 61023036 A JP61023036 A JP 61023036A JP 2303686 A JP2303686 A JP 2303686A JP H0571130 B2 JPH0571130 B2 JP H0571130B2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- chemical
- supply tank
- liquid
- chemical solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000126 substance Substances 0.000 claims description 64
- 238000000034 method Methods 0.000 claims description 47
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 238000012545 processing Methods 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 11
- 238000012993 chemical processing Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 description 44
- 239000000243 solution Substances 0.000 description 16
- 239000003507 refrigerant Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- IRPGOXJVTQTAAN-UHFFFAOYSA-N 2,2,3,3,3-pentafluoropropanal Chemical compound FC(F)(F)C(F)(F)C=O IRPGOXJVTQTAAN-UHFFFAOYSA-N 0.000 description 1
- KLZUFWVZNOTSEM-UHFFFAOYSA-K Aluminum fluoride Inorganic materials F[Al](F)F KLZUFWVZNOTSEM-UHFFFAOYSA-K 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Weting (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2303686A JPS62183123A (ja) | 1986-02-06 | 1986-02-06 | 半導体製造用薬液の供給方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2303686A JPS62183123A (ja) | 1986-02-06 | 1986-02-06 | 半導体製造用薬液の供給方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62183123A JPS62183123A (ja) | 1987-08-11 |
| JPH0571130B2 true JPH0571130B2 (ko) | 1993-10-06 |
Family
ID=12099240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2303686A Granted JPS62183123A (ja) | 1986-02-06 | 1986-02-06 | 半導体製造用薬液の供給方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62183123A (ko) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01228533A (ja) * | 1988-03-09 | 1989-09-12 | Mitsubishi Electric Corp | リキッドソースコントローラ装置 |
| KR100505060B1 (ko) * | 1998-02-11 | 2005-10-19 | 삼성전자주식회사 | 약품 공급 시스템 |
| CN101940895A (zh) * | 2010-09-03 | 2011-01-12 | 江苏华伦化工有限公司 | 环氧丙烷的连续进料系统 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS582425A (ja) * | 1981-06-29 | 1983-01-08 | Toyota Motor Corp | ヘリカル型吸気ポ−トの流路制御装置 |
| JPS6015926A (ja) * | 1983-07-08 | 1985-01-26 | Hitachi Tokyo Electronics Co Ltd | 半導体製造装置 |
| JPS6016427A (ja) * | 1983-07-08 | 1985-01-28 | Toshiba Corp | 酸化膜エツチング装置 |
| JPS6084137A (ja) * | 1983-10-17 | 1985-05-13 | Nippon Zeon Co Ltd | 密閉型通い缶からの薬液供給看視装置 |
-
1986
- 1986-02-06 JP JP2303686A patent/JPS62183123A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS582425A (ja) * | 1981-06-29 | 1983-01-08 | Toyota Motor Corp | ヘリカル型吸気ポ−トの流路制御装置 |
| JPS6015926A (ja) * | 1983-07-08 | 1985-01-26 | Hitachi Tokyo Electronics Co Ltd | 半導体製造装置 |
| JPS6016427A (ja) * | 1983-07-08 | 1985-01-28 | Toshiba Corp | 酸化膜エツチング装置 |
| JPS6084137A (ja) * | 1983-10-17 | 1985-05-13 | Nippon Zeon Co Ltd | 密閉型通い缶からの薬液供給看視装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62183123A (ja) | 1987-08-11 |
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