JPH057064B2 - - Google Patents

Info

Publication number
JPH057064B2
JPH057064B2 JP58114100A JP11410083A JPH057064B2 JP H057064 B2 JPH057064 B2 JP H057064B2 JP 58114100 A JP58114100 A JP 58114100A JP 11410083 A JP11410083 A JP 11410083A JP H057064 B2 JPH057064 B2 JP H057064B2
Authority
JP
Japan
Prior art keywords
gas
reaction chamber
light source
wavelength
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58114100A
Other languages
English (en)
Japanese (ja)
Other versions
JPS607936A (ja
Inventor
Atsushi Sekiguchi
Takashi Hiraga
Michio Nagasaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP11410083A priority Critical patent/JPS607936A/ja
Publication of JPS607936A publication Critical patent/JPS607936A/ja
Publication of JPH057064B2 publication Critical patent/JPH057064B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Drying Of Semiconductors (AREA)
JP11410083A 1983-06-24 1983-06-24 光化学的表面処理装置 Granted JPS607936A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11410083A JPS607936A (ja) 1983-06-24 1983-06-24 光化学的表面処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11410083A JPS607936A (ja) 1983-06-24 1983-06-24 光化学的表面処理装置

Publications (2)

Publication Number Publication Date
JPS607936A JPS607936A (ja) 1985-01-16
JPH057064B2 true JPH057064B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-01-28

Family

ID=14629111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11410083A Granted JPS607936A (ja) 1983-06-24 1983-06-24 光化学的表面処理装置

Country Status (1)

Country Link
JP (1) JPS607936A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08270994A (ja) * 1994-10-24 1996-10-18 Akira Kono 風の船

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60212226A (ja) * 1984-04-06 1985-10-24 Ushio Inc 紫外線処理方法
JPS61271819A (ja) * 1985-05-27 1986-12-02 Semiconductor Energy Lab Co Ltd 薄膜形成方法
JPH0655846B2 (ja) * 1990-03-09 1994-07-27 工業技術院長 高分子成形品のエッチング加工方法
JPH0431423U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1990-06-30 1992-03-13

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4737008U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-05-11 1972-12-23

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08270994A (ja) * 1994-10-24 1996-10-18 Akira Kono 風の船

Also Published As

Publication number Publication date
JPS607936A (ja) 1985-01-16

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