JPH0569892B2 - - Google Patents

Info

Publication number
JPH0569892B2
JPH0569892B2 JP61148159A JP14815986A JPH0569892B2 JP H0569892 B2 JPH0569892 B2 JP H0569892B2 JP 61148159 A JP61148159 A JP 61148159A JP 14815986 A JP14815986 A JP 14815986A JP H0569892 B2 JPH0569892 B2 JP H0569892B2
Authority
JP
Japan
Prior art keywords
target
rare earth
substrate
crystal structure
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61148159A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6324030A (ja
Inventor
Hidekuni Sugawara
Taketoshi Nakayama
Takeshi Masumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokin Corp
Shingijutsu Kaihatsu Jigyodan
Original Assignee
Tokin Corp
Shingijutsu Kaihatsu Jigyodan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokin Corp, Shingijutsu Kaihatsu Jigyodan filed Critical Tokin Corp
Priority to JP61148159A priority Critical patent/JPS6324030A/ja
Priority to US07/063,334 priority patent/US4836867A/en
Priority to DE8787109193T priority patent/DE3767786D1/de
Priority to EP87109193A priority patent/EP0251233B1/en
Publication of JPS6324030A publication Critical patent/JPS6324030A/ja
Priority to US07/312,746 priority patent/US4933059A/en
Publication of JPH0569892B2 publication Critical patent/JPH0569892B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/032—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
    • H01F1/04—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys
    • H01F1/047—Alloys characterised by their composition
    • H01F1/053—Alloys characterised by their composition containing rare earth metals
    • H01F1/055—Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/032—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
    • H01F1/04—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys
    • H01F1/047—Alloys characterised by their composition
    • H01F1/053—Alloys characterised by their composition containing rare earth metals
    • H01F1/055—Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5
    • H01F1/057—Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Hard Magnetic Materials (AREA)
JP61148159A 1986-06-26 1986-06-26 異方性希土類磁石材料およびその製造方法 Granted JPS6324030A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP61148159A JPS6324030A (ja) 1986-06-26 1986-06-26 異方性希土類磁石材料およびその製造方法
US07/063,334 US4836867A (en) 1986-06-26 1987-06-17 Anisotropic rare earth magnet material
DE8787109193T DE3767786D1 (de) 1986-06-26 1987-06-26 Anisotroper magnetischer werkstoff aus seltenen erden und verfahren zur herstellung desselben.
EP87109193A EP0251233B1 (en) 1986-06-26 1987-06-26 Anisotropic rare earth magnet material and production process thereof
US07/312,746 US4933059A (en) 1986-06-26 1989-02-17 Process for preparing anisotropic rare earth magnet material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61148159A JPS6324030A (ja) 1986-06-26 1986-06-26 異方性希土類磁石材料およびその製造方法

Publications (2)

Publication Number Publication Date
JPS6324030A JPS6324030A (ja) 1988-02-01
JPH0569892B2 true JPH0569892B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-10-04

Family

ID=15446576

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61148159A Granted JPS6324030A (ja) 1986-06-26 1986-06-26 異方性希土類磁石材料およびその製造方法

Country Status (4)

Country Link
US (2) US4836867A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP0251233B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS6324030A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3767786D1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6483642A (en) * 1987-09-28 1989-03-29 Fuji Electrochemical Co Ltd Permanent magnetic material
US5186766A (en) * 1988-09-14 1993-02-16 Asahi Kasei Kogyo Kabushiki Kaisha Magnetic materials containing rare earth element iron nitrogen and hydrogen
US5114502A (en) * 1989-06-13 1992-05-19 Sps Technologies, Inc. Magnetic materials and process for producing the same
US5122203A (en) * 1989-06-13 1992-06-16 Sps Technologies, Inc. Magnetic materials
US5244510A (en) * 1989-06-13 1993-09-14 Yakov Bogatin Magnetic materials and process for producing the same
US5266128A (en) * 1989-06-13 1993-11-30 Sps Technologies, Inc. Magnetic materials and process for producing the same
DE69007720T2 (de) * 1989-09-13 1994-08-25 Asahi Chemical Ind Magnetmaterial, welches seltenes Erdelement, Eisen, Stickstoff, Wasserstoff und Sauerstoff enthält.
DE69220876T2 (de) * 1991-10-16 1997-12-18 Toshiba Kawasaki Kk Magnetisches Material
US5439500A (en) * 1993-12-02 1995-08-08 Materials Research Corporation Magneto-optical alloy sputter targets
FR2748344B1 (fr) * 1996-05-06 1998-10-16 Ugimag Sa Procede d'obtention de materiau magnetiquement anisotrope a base de terres rares et metaux de transition par solidification d'un alliage liquide sous champ orienteur
US6071357A (en) * 1997-09-26 2000-06-06 Guruswamy; Sivaraman Magnetostrictive composites and process for manufacture by dynamic compaction
JP2001210508A (ja) * 1999-07-05 2001-08-03 Hitachi Metals Ltd アークセグメント磁石、リング磁石及び希土類焼結磁石の製造方法
CN113436819B (zh) * 2021-06-30 2024-12-03 杭州科德磁业有限公司 一种低温度系数钐钴烧结永磁材料的制备方法
CN113481420B (zh) * 2021-07-12 2022-03-08 河南工业大学 一种铁磁金属材料及其制备方法和应用

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7012667A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1970-08-27 1972-02-29
DE2142110B2 (de) * 1970-08-27 1976-06-24 N.V. Philips' Gloeilampenfabrieken, Eindhoven (Niederlande) Verfahren zur herstellung eines koerpers mit anisotropen dauermagnetischen eigenschaften aus einer co tief 5 r- verbindung
JPS5910562B2 (ja) * 1978-11-14 1984-03-09 セイコーエプソン株式会社 金属間化合物磁石
US4367257A (en) * 1980-04-16 1983-01-04 Fuji Photo Film Co., Ltd. Thin magnetic recording medium
JPS5766605A (en) * 1980-10-13 1982-04-22 Toshiba Corp Rare-earth cobalt permanent magnet
JPS57134533A (en) * 1981-02-12 1982-08-19 Namiki Precision Jewel Co Ltd Permanent magnet alloy
JPS58193336A (ja) * 1982-05-01 1983-11-11 Sumitomo Special Metals Co Ltd 永久磁石材料
JPS59219404A (ja) * 1983-05-27 1984-12-10 Sumitomo Special Metals Co Ltd 希土類・鉄・ボロン系永久磁石用合金粉末の製造方法
US4484995A (en) * 1983-06-06 1984-11-27 Grumman Aerospace Corporation Thermally controlled sputtering of high anisotropy magnetic material
JPS6057601A (ja) * 1983-09-08 1985-04-03 Sumitomo Special Metals Co Ltd 永久磁石材料の製造方法
US4608142A (en) * 1983-11-17 1986-08-26 Nippon Sheet Glass Co., Ltd. Method of manufacturing magneto-optic recording film
DE3342533A1 (de) * 1983-11-24 1985-06-05 Siemens AG, 1000 Berlin und 8000 München Aufstaeubung von permalloy-schichten
US4640755A (en) * 1983-12-12 1987-02-03 Sony Corporation Method for producing magnetic medium
JPH0627323B2 (ja) * 1983-12-26 1994-04-13 株式会社日立製作所 スパツタリング方法及びその装置
JPS60174839A (ja) * 1984-02-17 1985-09-09 Taiyo Yuden Co Ltd 希土類コバルト磁石の製造法
JPS60204862A (ja) * 1984-03-28 1985-10-16 Toshiba Corp 希土類鉄系永久磁石合金
JPS6115941A (ja) * 1984-06-30 1986-01-24 Res Dev Corp Of Japan 酸素を含む強磁性非晶質合金およびその製造法
EP0175214B2 (en) * 1984-09-14 1993-12-29 Kabushiki Kaisha Toshiba Permanent magnetic alloy and method of manufacturing the same
US4588439A (en) * 1985-05-20 1986-05-13 Crucible Materials Corporation Oxygen containing permanent magnet alloy
US4764436A (en) * 1985-05-20 1988-08-16 Research Development Corporation Of Japan Iron-oxygen based perpendicular magnetized anisotropic thin film
WO1986007651A1 (en) * 1985-06-21 1986-12-31 Sumitomo Metal Mining Co., Ltd. Magnetic recording medium

Also Published As

Publication number Publication date
EP0251233B1 (en) 1991-01-30
US4836867A (en) 1989-06-06
US4933059A (en) 1990-06-12
EP0251233A1 (en) 1988-01-07
DE3767786D1 (de) 1991-03-07
JPS6324030A (ja) 1988-02-01

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees