JPH0567593B2 - - Google Patents

Info

Publication number
JPH0567593B2
JPH0567593B2 JP59041908A JP4190884A JPH0567593B2 JP H0567593 B2 JPH0567593 B2 JP H0567593B2 JP 59041908 A JP59041908 A JP 59041908A JP 4190884 A JP4190884 A JP 4190884A JP H0567593 B2 JPH0567593 B2 JP H0567593B2
Authority
JP
Japan
Prior art keywords
carbon
aluminum nitride
sintered body
thermal conductivity
powder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59041908A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60186479A (ja
Inventor
Kazuo Anzai
Mitsuo Kasori
Takeshi Takano
Kazuo Shinozaki
Akihiko Tsuge
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP59041908A priority Critical patent/JPS60186479A/ja
Publication of JPS60186479A publication Critical patent/JPS60186479A/ja
Publication of JPH0567593B2 publication Critical patent/JPH0567593B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
JP59041908A 1984-03-07 1984-03-07 高熱伝導性窒化アルミニウム焼結体の製造方法 Granted JPS60186479A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59041908A JPS60186479A (ja) 1984-03-07 1984-03-07 高熱伝導性窒化アルミニウム焼結体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59041908A JPS60186479A (ja) 1984-03-07 1984-03-07 高熱伝導性窒化アルミニウム焼結体の製造方法

Publications (2)

Publication Number Publication Date
JPS60186479A JPS60186479A (ja) 1985-09-21
JPH0567593B2 true JPH0567593B2 (ko) 1993-09-27

Family

ID=12621376

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59041908A Granted JPS60186479A (ja) 1984-03-07 1984-03-07 高熱伝導性窒化アルミニウム焼結体の製造方法

Country Status (1)

Country Link
JP (1) JPS60186479A (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01242468A (ja) * 1988-03-23 1989-09-27 Japan Steel Works Ltd:The 窒化アルミニウム焼結体の製造方法
JP2567491B2 (ja) * 1990-04-17 1996-12-25 住友電気工業株式会社 高熱伝導性着色窒化アルミニウム焼結体およびその製造方法
CN1550477A (zh) 1999-09-06 2004-12-01 Ibiden股份有限公司 含碳的氮化铝烧结体,用于半导体制造/检测设备的基材
KR20020092929A (ko) * 1999-12-28 2002-12-12 이비덴 가부시키가이샤 카본함유 질화알루미늄 소결체, 및 반도체제조ㆍ검사장치용 세라믹기판
DE10000621A1 (de) 2000-01-10 2001-07-12 Basf Ag Niedrigviskose, formaldehydreduzierte Dispersionen von Mikrokapseln aus Melamin-Formaldehyd-Harzen

Also Published As

Publication number Publication date
JPS60186479A (ja) 1985-09-21

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