JPH0565968B2 - - Google Patents

Info

Publication number
JPH0565968B2
JPH0565968B2 JP61220847A JP22084786A JPH0565968B2 JP H0565968 B2 JPH0565968 B2 JP H0565968B2 JP 61220847 A JP61220847 A JP 61220847A JP 22084786 A JP22084786 A JP 22084786A JP H0565968 B2 JPH0565968 B2 JP H0565968B2
Authority
JP
Japan
Prior art keywords
grid
analysis
objective lens
electron beam
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61220847A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6378444A (ja
Inventor
Akio Ito
Kazuyuki Ozaki
Kazuo Ookubo
Toshihiro Ishizuka
Yoshiaki Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP61220847A priority Critical patent/JPS6378444A/ja
Publication of JPS6378444A publication Critical patent/JPS6378444A/ja
Publication of JPH0565968B2 publication Critical patent/JPH0565968B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP61220847A 1986-09-20 1986-09-20 電子ビ−ム装置 Granted JPS6378444A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61220847A JPS6378444A (ja) 1986-09-20 1986-09-20 電子ビ−ム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61220847A JPS6378444A (ja) 1986-09-20 1986-09-20 電子ビ−ム装置

Publications (2)

Publication Number Publication Date
JPS6378444A JPS6378444A (ja) 1988-04-08
JPH0565968B2 true JPH0565968B2 (OSRAM) 1993-09-20

Family

ID=16757473

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61220847A Granted JPS6378444A (ja) 1986-09-20 1986-09-20 電子ビ−ム装置

Country Status (1)

Country Link
JP (1) JPS6378444A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07161329A (ja) * 1993-12-07 1995-06-23 Fujitsu Ltd 電子ビーム装置

Also Published As

Publication number Publication date
JPS6378444A (ja) 1988-04-08

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