JPH0565082B2 - - Google Patents
Info
- Publication number
- JPH0565082B2 JPH0565082B2 JP7813887A JP7813887A JPH0565082B2 JP H0565082 B2 JPH0565082 B2 JP H0565082B2 JP 7813887 A JP7813887 A JP 7813887A JP 7813887 A JP7813887 A JP 7813887A JP H0565082 B2 JPH0565082 B2 JP H0565082B2
- Authority
- JP
- Japan
- Prior art keywords
- flatness
- measured
- glossiness
- image
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006243 chemical reaction Methods 0.000 claims description 19
- 238000005259 measurement Methods 0.000 claims description 19
- 230000003287 optical effect Effects 0.000 claims description 9
- 238000010586 diagram Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000005337 ground glass Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7813887A JPS63243711A (ja) | 1987-03-31 | 1987-03-31 | 表面性状測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7813887A JPS63243711A (ja) | 1987-03-31 | 1987-03-31 | 表面性状測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63243711A JPS63243711A (ja) | 1988-10-11 |
| JPH0565082B2 true JPH0565082B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-09-17 |
Family
ID=13653518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7813887A Granted JPS63243711A (ja) | 1987-03-31 | 1987-03-31 | 表面性状測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63243711A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1987
- 1987-03-31 JP JP7813887A patent/JPS63243711A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63243711A (ja) | 1988-10-11 |