JPH05647B2 - - Google Patents
Info
- Publication number
- JPH05647B2 JPH05647B2 JP27153087A JP27153087A JPH05647B2 JP H05647 B2 JPH05647 B2 JP H05647B2 JP 27153087 A JP27153087 A JP 27153087A JP 27153087 A JP27153087 A JP 27153087A JP H05647 B2 JPH05647 B2 JP H05647B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- scale
- position detection
- spot position
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 43
- 230000003287 optical effect Effects 0.000 claims description 40
- 230000001427 coherent effect Effects 0.000 claims description 11
- 238000006243 chemical reaction Methods 0.000 claims description 10
- 230000000903 blocking effect Effects 0.000 claims description 8
- 230000010355 oscillation Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 12
- 230000005540 biological transmission Effects 0.000 description 9
- 238000005259 measurement Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 3
- NCGICGYLBXGBGN-UHFFFAOYSA-N 3-morpholin-4-yl-1-oxa-3-azonia-2-azanidacyclopent-3-en-5-imine;hydrochloride Chemical compound Cl.[N-]1OC(=N)C=[N+]1N1CCOCC1 NCGICGYLBXGBGN-UHFFFAOYSA-N 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003801 milling Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 101700004678 SLIT3 Proteins 0.000 description 1
- 102100027339 Slit homolog 3 protein Human genes 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
Landscapes
- Optical Transform (AREA)
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP27153087A JPH01280215A (ja) | 1987-10-27 | 1987-10-27 | 光学式エンコーダ |
DE3833115A DE3833115A1 (de) | 1987-09-30 | 1988-09-29 | Optischer codierer |
DE3844705A DE3844705C2 (enrdf_load_stackoverflow) | 1987-09-30 | 1988-09-29 | |
GB8823120A GB2210525B (en) | 1987-09-30 | 1988-09-29 | Optical encoder |
DE3844704A DE3844704C2 (enrdf_load_stackoverflow) | 1987-09-30 | 1988-09-29 | |
US07/251,089 US4950891A (en) | 1987-09-30 | 1988-09-29 | High resolution optical encoder having a long detection stroke |
US07/374,922 US4956553A (en) | 1987-09-30 | 1989-07-03 | Optical encoder with varying grating pitch |
US07/374,918 US4948968A (en) | 1987-09-30 | 1989-07-03 | High resolution optical encoder having a long detection stroke |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP27153087A JPH01280215A (ja) | 1987-10-27 | 1987-10-27 | 光学式エンコーダ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01280215A JPH01280215A (ja) | 1989-11-10 |
JPH05647B2 true JPH05647B2 (enrdf_load_stackoverflow) | 1993-01-06 |
Family
ID=17501348
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP27153087A Granted JPH01280215A (ja) | 1987-09-30 | 1987-10-27 | 光学式エンコーダ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01280215A (enrdf_load_stackoverflow) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5073710A (en) * | 1989-09-21 | 1991-12-17 | Copal Company Limited | Optical displacement detector including a displacement member's surface having a diffractive pattern and a holographic lens pattern |
DE102005058808B4 (de) | 2005-12-09 | 2019-02-21 | Dr. Johannes Heidenhain Gmbh | Positionsmessgerät mit holographischem Maßstab |
EP1862774B1 (fr) | 2006-05-31 | 2015-07-29 | Delphi Technologies, Inc. | Optical multiturn rotational encoder |
EP1862775A1 (fr) * | 2006-05-31 | 2007-12-05 | Delphi Technologies, Inc. | Codeur de position à haute résolution |
CN110440688B (zh) * | 2019-07-19 | 2021-10-22 | 清华大学深圳研究生院 | 一种绝对式光栅尺参考位置测量方法及系统 |
-
1987
- 1987-10-27 JP JP27153087A patent/JPH01280215A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPH01280215A (ja) | 1989-11-10 |
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