JPH0560659B2 - - Google Patents

Info

Publication number
JPH0560659B2
JPH0560659B2 JP61048064A JP4806486A JPH0560659B2 JP H0560659 B2 JPH0560659 B2 JP H0560659B2 JP 61048064 A JP61048064 A JP 61048064A JP 4806486 A JP4806486 A JP 4806486A JP H0560659 B2 JPH0560659 B2 JP H0560659B2
Authority
JP
Japan
Prior art keywords
sample
chamber
load lock
plasma
lock chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61048064A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62204515A (ja
Inventor
Seitaro Matsuo
Tadashi Myamura
Shigeo Sugawara
Satoru Nakayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp, Sumitomo Metal Industries Ltd filed Critical Nippon Telegraph and Telephone Corp
Priority to JP61048064A priority Critical patent/JPS62204515A/ja
Publication of JPS62204515A publication Critical patent/JPS62204515A/ja
Publication of JPH0560659B2 publication Critical patent/JPH0560659B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T10/00—Road transport of goods or passengers
    • Y02T10/60—Other road transportation technologies with climate change mitigation effect
    • Y02T10/72—Electric energy management in electromobility

Landscapes

  • Drying Of Semiconductors (AREA)
JP61048064A 1986-03-04 1986-03-04 試料の搬送装置 Granted JPS62204515A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61048064A JPS62204515A (ja) 1986-03-04 1986-03-04 試料の搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61048064A JPS62204515A (ja) 1986-03-04 1986-03-04 試料の搬送装置

Publications (2)

Publication Number Publication Date
JPS62204515A JPS62204515A (ja) 1987-09-09
JPH0560659B2 true JPH0560659B2 (enExample) 1993-09-02

Family

ID=12792922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61048064A Granted JPS62204515A (ja) 1986-03-04 1986-03-04 試料の搬送装置

Country Status (1)

Country Link
JP (1) JPS62204515A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6346743A (ja) * 1986-08-15 1988-02-27 Japan Steel Works Ltd:The ウエハ搬送装置
JP2697269B2 (ja) * 1990-08-31 1998-01-14 三菱電機株式会社 電気機器
JP2648233B2 (ja) * 1990-11-29 1997-08-27 株式会社日立製作所 マイクロ波プラズマ処理装置

Also Published As

Publication number Publication date
JPS62204515A (ja) 1987-09-09

Similar Documents

Publication Publication Date Title
EP0161927B1 (en) Load lock pumping mechanism
US5624536A (en) Processing apparatus with collimator exchange device
KR101518103B1 (ko) 덮개 개폐 장치
JPS63244619A (ja) プラズマ装置
JP2001250856A (ja) ウエハ処理装置及びこれにアクセスする方法
JP4187323B2 (ja) 真空成膜処理装置および方法
CN204570033U (zh) 基板载具
US6558100B1 (en) Vacuum processing apparatus and a vacuum processing system
WO2021138986A1 (zh) 具有开合法拉第组件的等离子体处理系统及其开合法拉第组件
JPH0560659B2 (enExample)
TW200929352A (en) Vacuum processing apparatus
JP2004200219A (ja) 処理装置及び処理方法
JPH0215632B2 (enExample)
KR102047894B1 (ko) 버퍼 유닛 및 이를 가지는 기판 처리 장치
JPS6233745B2 (enExample)
JP2004047652A (ja) 真空処理装置
JP3483591B2 (ja) 排気装置
JP4649774B2 (ja) イオン源及びフィラメントの交換方法
JPS62152139A (ja) 試料の搬送装置
JP2022143380A (ja) 開閉装置及び搬送室
JPH01120811A (ja) 半導体ウエハ処理装置
JPS62152140A (ja) 試料の搬送装置
JPS63192222A (ja) ドライプロセス半導体製造装置のチヤンバ開口部の開閉構造
JPH01102842A (ja) イオン注入装置用エンドステーション
JP3321283B2 (ja) エッチング装置