JPS62204515A - 試料の搬送装置 - Google Patents

試料の搬送装置

Info

Publication number
JPS62204515A
JPS62204515A JP61048064A JP4806486A JPS62204515A JP S62204515 A JPS62204515 A JP S62204515A JP 61048064 A JP61048064 A JP 61048064A JP 4806486 A JP4806486 A JP 4806486A JP S62204515 A JPS62204515 A JP S62204515A
Authority
JP
Japan
Prior art keywords
sample
chamber
cassette
samples
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61048064A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0560659B2 (enExample
Inventor
Seitaro Matsuo
松尾　誠太郎
Tadashi Miyamura
宮村　忠志
Shigeo Sugawara
菅原　繁夫
Satoru Nakayama
中山　了
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp, Sumitomo Metal Industries Ltd filed Critical Nippon Telegraph and Telephone Corp
Priority to JP61048064A priority Critical patent/JPS62204515A/ja
Publication of JPS62204515A publication Critical patent/JPS62204515A/ja
Publication of JPH0560659B2 publication Critical patent/JPH0560659B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T10/00—Road transport of goods or passengers
    • Y02T10/60—Other road transportation technologies with climate change mitigation effect
    • Y02T10/72—Electric energy management in electromobility

Landscapes

  • Drying Of Semiconductors (AREA)
JP61048064A 1986-03-04 1986-03-04 試料の搬送装置 Granted JPS62204515A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61048064A JPS62204515A (ja) 1986-03-04 1986-03-04 試料の搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61048064A JPS62204515A (ja) 1986-03-04 1986-03-04 試料の搬送装置

Publications (2)

Publication Number Publication Date
JPS62204515A true JPS62204515A (ja) 1987-09-09
JPH0560659B2 JPH0560659B2 (enExample) 1993-09-02

Family

ID=12792922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61048064A Granted JPS62204515A (ja) 1986-03-04 1986-03-04 試料の搬送装置

Country Status (1)

Country Link
JP (1) JPS62204515A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6346743A (ja) * 1986-08-15 1988-02-27 Japan Steel Works Ltd:The ウエハ搬送装置
JPH04112202A (ja) * 1990-08-31 1992-04-14 Mitsubishi Electric Corp 電気機器
JPH04199710A (ja) * 1990-11-29 1992-07-20 Hitachi Ltd マイクロ波プラズマ処理装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6346743A (ja) * 1986-08-15 1988-02-27 Japan Steel Works Ltd:The ウエハ搬送装置
JPH04112202A (ja) * 1990-08-31 1992-04-14 Mitsubishi Electric Corp 電気機器
JPH04199710A (ja) * 1990-11-29 1992-07-20 Hitachi Ltd マイクロ波プラズマ処理装置

Also Published As

Publication number Publication date
JPH0560659B2 (enExample) 1993-09-02

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