JPH0560268B2 - - Google Patents

Info

Publication number
JPH0560268B2
JPH0560268B2 JP59009796A JP979684A JPH0560268B2 JP H0560268 B2 JPH0560268 B2 JP H0560268B2 JP 59009796 A JP59009796 A JP 59009796A JP 979684 A JP979684 A JP 979684A JP H0560268 B2 JPH0560268 B2 JP H0560268B2
Authority
JP
Japan
Prior art keywords
pressure receiving
support
receiving structure
pressure
resistance element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59009796A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60154574A (ja
Inventor
Kimii Sumino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Corporate Research and Development Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Corporate Research and Development Ltd filed Critical Fuji Electric Corporate Research and Development Ltd
Priority to JP59009796A priority Critical patent/JPS60154574A/ja
Publication of JPS60154574A publication Critical patent/JPS60154574A/ja
Publication of JPH0560268B2 publication Critical patent/JPH0560268B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Pressure Sensors (AREA)
JP59009796A 1984-01-23 1984-01-23 圧覚センサ Granted JPS60154574A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59009796A JPS60154574A (ja) 1984-01-23 1984-01-23 圧覚センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59009796A JPS60154574A (ja) 1984-01-23 1984-01-23 圧覚センサ

Publications (2)

Publication Number Publication Date
JPS60154574A JPS60154574A (ja) 1985-08-14
JPH0560268B2 true JPH0560268B2 (enrdf_load_stackoverflow) 1993-09-01

Family

ID=11730160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59009796A Granted JPS60154574A (ja) 1984-01-23 1984-01-23 圧覚センサ

Country Status (1)

Country Link
JP (1) JPS60154574A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63155677A (ja) * 1986-12-19 1988-06-28 Agency Of Ind Science & Technol 触覚センサと基板の接続方法
EP3450947B1 (en) * 2017-09-05 2024-01-17 IMEC vzw Stress sensor for semiconductor components

Also Published As

Publication number Publication date
JPS60154574A (ja) 1985-08-14

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