JPH0557239B2 - - Google Patents
Info
- Publication number
- JPH0557239B2 JPH0557239B2 JP60041881A JP4188185A JPH0557239B2 JP H0557239 B2 JPH0557239 B2 JP H0557239B2 JP 60041881 A JP60041881 A JP 60041881A JP 4188185 A JP4188185 A JP 4188185A JP H0557239 B2 JPH0557239 B2 JP H0557239B2
- Authority
- JP
- Japan
- Prior art keywords
- concentration
- gaas
- resistance
- crystal
- impurity levels
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60041881A JPS61201700A (ja) | 1985-03-05 | 1985-03-05 | 高抵抗GaAs結晶およびその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60041881A JPS61201700A (ja) | 1985-03-05 | 1985-03-05 | 高抵抗GaAs結晶およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61201700A JPS61201700A (ja) | 1986-09-06 |
| JPH0557239B2 true JPH0557239B2 (enExample) | 1993-08-23 |
Family
ID=12620613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60041881A Granted JPS61201700A (ja) | 1985-03-05 | 1985-03-05 | 高抵抗GaAs結晶およびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61201700A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110373710A (zh) * | 2019-07-09 | 2019-10-25 | 有研光电新材料有限责任公司 | 水平法砷化镓单晶尾部位错密度的降低方法 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61222999A (ja) * | 1985-03-27 | 1986-10-03 | Dowa Mining Co Ltd | 3−v族化合物半導体単結晶の電気的特性改良方法 |
| JPS63195199A (ja) * | 1987-02-05 | 1988-08-12 | Dowa Mining Co Ltd | ガリウム砒素結晶の製造方法 |
| JPH0714077U (ja) * | 1993-03-31 | 1995-03-10 | 利夫 原田 | 開き戸 |
| EP3795725B1 (en) * | 2014-07-17 | 2021-08-18 | Sumitomo Electric Industries, Ltd. | N-type gaas single crystal |
| CN113847183B (zh) * | 2021-09-23 | 2022-09-30 | 上海鑫歆源电子有限公司 | 一种热量控制模块、驱动电路及点火线圈驱动器 |
-
1985
- 1985-03-05 JP JP60041881A patent/JPS61201700A/ja active Granted
Non-Patent Citations (2)
| Title |
|---|
| APPL.PHYS.LETT.=1982 * |
| SEMI-INSULATING 3-5 MATERIALS * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110373710A (zh) * | 2019-07-09 | 2019-10-25 | 有研光电新材料有限责任公司 | 水平法砷化镓单晶尾部位错密度的降低方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61201700A (ja) | 1986-09-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Sunder et al. | Czochralski growth and characterization of GaSb | |
| US5441011A (en) | Sublimation growth of single crystal SiC | |
| KR20010090002A (ko) | 실리콘으로 제조된 반도체웨이퍼 및 반도체웨이퍼의제조방법 | |
| JPH07172998A (ja) | 炭化ケイ素単結晶の製造方法 | |
| US4619811A (en) | Apparatus for growing GaAs single crystal by using floating zone | |
| EP0903427A1 (en) | Apparatus and method for producing crystals by the czochralski method and crystals produced by this method | |
| JP3848446B2 (ja) | 低抵抗SiC単結晶の育成方法 | |
| JPS61201700A (ja) | 高抵抗GaAs結晶およびその製造方法 | |
| JP2005008472A (ja) | 高品質4h型炭化珪素単結晶、および単結晶ウェハ | |
| US5240685A (en) | Apparatus for growing a GaAs single crystal by pulling from GaAs melt | |
| JPH0557240B2 (enExample) | ||
| JPH11268998A (ja) | GaAs単結晶インゴットおよびその製造方法ならびにそれを用いたGaAs単結晶ウエハ | |
| JPH0246560B2 (enExample) | ||
| JPH0639355B2 (ja) | 化合物半導体単結晶の製造方法 | |
| JP4778150B2 (ja) | ZnTe系化合物半導体単結晶の製造方法およびZnTe系化合物半導体単結晶 | |
| KR100945668B1 (ko) | Vgf법에 의한 갈륨비소 단결정 성장방법 | |
| JPH09142995A (ja) | P型単結晶炭化珪素の製造方法 | |
| JPH0543679B2 (enExample) | ||
| JPH0637358B2 (ja) | リン化インジウム単結晶及びその製造方法 | |
| JPH069025Y2 (ja) | 化合物半導体単結晶製造装置 | |
| JP4599067B2 (ja) | Ga化合物ドープ多結晶シリコンとその製造方法 | |
| JPH0784360B2 (ja) | 半絶縁性GaAs基板の製造方法 | |
| JP3793934B2 (ja) | 半絶縁性InP単結晶の製造方法 | |
| JPH0411518B2 (enExample) | ||
| JPH01215799A (ja) | 半絶縁性GaAs化合物半導体単結晶及びその製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |