JPH055713A - ガス検知素子の製造方法 - Google Patents

ガス検知素子の製造方法

Info

Publication number
JPH055713A
JPH055713A JP31146191A JP31146191A JPH055713A JP H055713 A JPH055713 A JP H055713A JP 31146191 A JP31146191 A JP 31146191A JP 31146191 A JP31146191 A JP 31146191A JP H055713 A JPH055713 A JP H055713A
Authority
JP
Japan
Prior art keywords
tin oxide
gas detection
detection element
particle size
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP31146191A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0579940B2 (enrdf_load_stackoverflow
Inventor
Toshi Sakai
才 酒井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
New Cosmos Electric Co Ltd
Original Assignee
New Cosmos Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by New Cosmos Electric Co Ltd filed Critical New Cosmos Electric Co Ltd
Priority to JP31146191A priority Critical patent/JPH055713A/ja
Publication of JPH055713A publication Critical patent/JPH055713A/ja
Publication of JPH0579940B2 publication Critical patent/JPH0579940B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP31146191A 1991-10-31 1991-10-31 ガス検知素子の製造方法 Granted JPH055713A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31146191A JPH055713A (ja) 1991-10-31 1991-10-31 ガス検知素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31146191A JPH055713A (ja) 1991-10-31 1991-10-31 ガス検知素子の製造方法

Publications (2)

Publication Number Publication Date
JPH055713A true JPH055713A (ja) 1993-01-14
JPH0579940B2 JPH0579940B2 (enrdf_load_stackoverflow) 1993-11-05

Family

ID=18017504

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31146191A Granted JPH055713A (ja) 1991-10-31 1991-10-31 ガス検知素子の製造方法

Country Status (1)

Country Link
JP (1) JPH055713A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003019168A1 (fr) * 2001-08-27 2003-03-06 Uchiya Thermostat Co., Ltd. Capteur de gaz mos
US7276745B2 (en) 2005-02-22 2007-10-02 Ngk Spark Plug Co., Ltd. Gas sensor
DE102008000140A1 (de) 2008-01-23 2009-07-30 Wacker Chemie Ag Verfahren zur Herstellung Isocyanat-terminierter Siloxane
JP2020521982A (ja) * 2017-06-01 2020-07-27 ロベルト・ボッシュ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツングＲｏｂｅｒｔ Ｂｏｓｃｈ Ｇｍｂｈ Ｍｅｍｓガスセンサ

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003019168A1 (fr) * 2001-08-27 2003-03-06 Uchiya Thermostat Co., Ltd. Capteur de gaz mos
US7276745B2 (en) 2005-02-22 2007-10-02 Ngk Spark Plug Co., Ltd. Gas sensor
DE102008000140A1 (de) 2008-01-23 2009-07-30 Wacker Chemie Ag Verfahren zur Herstellung Isocyanat-terminierter Siloxane
WO2009092665A1 (de) 2008-01-23 2009-07-30 Wacker Chemie Ag Verfahren zur herstellung isocyanat-terminierter siloxane
US8304569B2 (en) 2008-01-23 2012-11-06 Wacker Chemie Ag Method for producing isocyanate-terminated siloxanes
JP2020521982A (ja) * 2017-06-01 2020-07-27 ロベルト・ボッシュ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツングＲｏｂｅｒｔ Ｂｏｓｃｈ Ｇｍｂｈ Ｍｅｍｓガスセンサ
US11415537B2 (en) 2017-06-01 2022-08-16 Robert Bosch Gmbh MEMS gas sensor having a media-sensitive material

Also Published As

Publication number Publication date
JPH0579940B2 (enrdf_load_stackoverflow) 1993-11-05

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