JPH0579940B2 - - Google Patents
Info
- Publication number
- JPH0579940B2 JPH0579940B2 JP31146191A JP31146191A JPH0579940B2 JP H0579940 B2 JPH0579940 B2 JP H0579940B2 JP 31146191 A JP31146191 A JP 31146191A JP 31146191 A JP31146191 A JP 31146191A JP H0579940 B2 JPH0579940 B2 JP H0579940B2
- Authority
- JP
- Japan
- Prior art keywords
- tin oxide
- sensing element
- gas sensing
- gas
- particle size
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002245 particle Substances 0.000 claims description 23
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 23
- 229910001887 tin oxide Inorganic materials 0.000 claims description 23
- 239000011230 binding agent Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- 238000005245 sintering Methods 0.000 description 9
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 8
- 239000010419 fine particle Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 6
- 238000001514 detection method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 229910006404 SnO 2 Inorganic materials 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 239000011882 ultra-fine particle Substances 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009766 low-temperature sintering Methods 0.000 description 2
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 229910001252 Pd alloy Inorganic materials 0.000 description 1
- -1 SnO 2 and ZnO Chemical class 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000003301 hydrolyzing effect Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 150000003961 organosilicon compounds Chemical class 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000011164 primary particle Substances 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31146191A JPH055713A (ja) | 1991-10-31 | 1991-10-31 | ガス検知素子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31146191A JPH055713A (ja) | 1991-10-31 | 1991-10-31 | ガス検知素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH055713A JPH055713A (ja) | 1993-01-14 |
| JPH0579940B2 true JPH0579940B2 (enrdf_load_stackoverflow) | 1993-11-05 |
Family
ID=18017504
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31146191A Granted JPH055713A (ja) | 1991-10-31 | 1991-10-31 | ガス検知素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH055713A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4659295B2 (ja) * | 2001-08-27 | 2011-03-30 | ウチヤ・サーモスタット株式会社 | 金属酸化物半導体ガスセンサ |
| JP4115482B2 (ja) | 2005-02-22 | 2008-07-09 | 日本特殊陶業株式会社 | ガスセンサ |
| DE102008000140A1 (de) | 2008-01-23 | 2009-07-30 | Wacker Chemie Ag | Verfahren zur Herstellung Isocyanat-terminierter Siloxane |
| DE102017209269A1 (de) | 2017-06-01 | 2018-12-06 | Robert Bosch Gmbh | MEMS-Mediensensor |
-
1991
- 1991-10-31 JP JP31146191A patent/JPH055713A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH055713A (ja) | 1993-01-14 |
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