JPH0556281B2 - - Google Patents

Info

Publication number
JPH0556281B2
JPH0556281B2 JP62223673A JP22367387A JPH0556281B2 JP H0556281 B2 JPH0556281 B2 JP H0556281B2 JP 62223673 A JP62223673 A JP 62223673A JP 22367387 A JP22367387 A JP 22367387A JP H0556281 B2 JPH0556281 B2 JP H0556281B2
Authority
JP
Japan
Prior art keywords
magnetic field
oxide superconducting
film
substrate
oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62223673A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6467823A (en
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP62223673A priority Critical patent/JPS6467823A/ja
Publication of JPS6467823A publication Critical patent/JPS6467823A/ja
Publication of JPH0556281B2 publication Critical patent/JPH0556281B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP62223673A 1987-09-07 1987-09-07 Formation of oxide superconducting film Granted JPS6467823A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62223673A JPS6467823A (en) 1987-09-07 1987-09-07 Formation of oxide superconducting film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62223673A JPS6467823A (en) 1987-09-07 1987-09-07 Formation of oxide superconducting film

Publications (2)

Publication Number Publication Date
JPS6467823A JPS6467823A (en) 1989-03-14
JPH0556281B2 true JPH0556281B2 (enExample) 1993-08-19

Family

ID=16801853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62223673A Granted JPS6467823A (en) 1987-09-07 1987-09-07 Formation of oxide superconducting film

Country Status (1)

Country Link
JP (1) JPS6467823A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0288408A (ja) * 1988-05-31 1990-03-28 Mitsubishi Metal Corp 超電導セラミックス膜の製造法
JPH0322221U (enExample) * 1989-07-14 1991-03-07

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56109824A (en) * 1980-02-05 1981-08-31 Nippon Telegr & Teleph Corp <Ntt> Manufacture of oxide superconductive thin film
JPS5963732A (ja) * 1982-10-04 1984-04-11 Hitachi Ltd 薄膜形成装置
JPS59219461A (ja) * 1983-05-24 1984-12-10 Toshiba Corp アモルフアスシリコン成膜装置
JPS60117711A (ja) * 1983-11-30 1985-06-25 Toshiba Corp 薄膜形成装置
JPS61109036A (ja) * 1984-11-01 1986-05-27 Canon Inc テレビレンズの表示装置
JPS61125133A (ja) * 1984-11-22 1986-06-12 Hitachi Ltd 低温プラズマ電磁界制御機構
JPS61267324A (ja) * 1985-05-21 1986-11-26 Fuji Electric Co Ltd 乾式薄膜加工装置
JPS62150726A (ja) * 1985-12-24 1987-07-04 Fuji Electric Co Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6467823A (en) 1989-03-14

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