JPH0551969B2 - - Google Patents
Info
- Publication number
- JPH0551969B2 JPH0551969B2 JP13344882A JP13344882A JPH0551969B2 JP H0551969 B2 JPH0551969 B2 JP H0551969B2 JP 13344882 A JP13344882 A JP 13344882A JP 13344882 A JP13344882 A JP 13344882A JP H0551969 B2 JPH0551969 B2 JP H0551969B2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- evaporation
- incident angle
- angle
- vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001704 evaporation Methods 0.000 claims description 27
- 238000010894 electron beam technology Methods 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 9
- 230000005291 magnetic effect Effects 0.000 claims description 7
- 229920000642 polymer Polymers 0.000 claims description 7
- 230000008021 deposition Effects 0.000 claims description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 229910052760 oxygen Inorganic materials 0.000 claims description 3
- 239000001301 oxygen Substances 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims 2
- 229910045601 alloy Inorganic materials 0.000 claims 2
- 230000008020 evaporation Effects 0.000 description 27
- 239000000463 material Substances 0.000 description 11
- 238000007740 vapor deposition Methods 0.000 description 11
- 238000009826 distribution Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 230000007423 decrease Effects 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000003302 ferromagnetic material Substances 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000005686 electrostatic field Effects 0.000 description 2
- 230000005294 ferromagnetic effect Effects 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000002301 combined effect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229920005570 flexible polymer Polymers 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000003685 thermal hair damage Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/85—Coating a support with a magnetic layer by vapour deposition
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13344882A JPS5924445A (ja) | 1982-07-29 | 1982-07-29 | 磁気記録媒体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13344882A JPS5924445A (ja) | 1982-07-29 | 1982-07-29 | 磁気記録媒体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5924445A JPS5924445A (ja) | 1984-02-08 |
| JPH0551969B2 true JPH0551969B2 (enrdf_load_stackoverflow) | 1993-08-04 |
Family
ID=15105009
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13344882A Granted JPS5924445A (ja) | 1982-07-29 | 1982-07-29 | 磁気記録媒体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5924445A (enrdf_load_stackoverflow) |
-
1982
- 1982-07-29 JP JP13344882A patent/JPS5924445A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5924445A (ja) | 1984-02-08 |
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