Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel LtdfiledCriticalKobe Steel Ltd
Priority to JP1456183ApriorityCriticalpatent/JPS59141007A/ja
Publication of JPS59141007ApublicationCriticalpatent/JPS59141007A/ja
Publication of JPH0551842B2publicationCriticalpatent/JPH0551842B2/ja
G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
G01B11/00—Measuring arrangements characterised by the use of optical techniques
G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
G01B11/024—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of diode-array scanning