JPH05500385A - ドーピング方法 - Google Patents

ドーピング方法

Info

Publication number
JPH05500385A
JPH05500385A JP2512608A JP51260890A JPH05500385A JP H05500385 A JPH05500385 A JP H05500385A JP 2512608 A JP2512608 A JP 2512608A JP 51260890 A JP51260890 A JP 51260890A JP H05500385 A JPH05500385 A JP H05500385A
Authority
JP
Japan
Prior art keywords
manganese
zinc
compound
zinc sulfide
mnx2
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2512608A
Other languages
English (en)
Japanese (ja)
Inventor
ヒュベーリネン,ヤッコ アンテロ
Original Assignee
エピシステムズ オサケユイチア リミティド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エピシステムズ オサケユイチア リミティド filed Critical エピシステムズ オサケユイチア リミティド
Publication of JPH05500385A publication Critical patent/JPH05500385A/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/24Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using chemical vapour deposition [CVD]
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/08Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state the diffusion materials being a compound of the elements to be diffused
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/34Deposited materials, e.g. layers
    • H10P14/3402Deposited materials, e.g. layers characterised by the chemical composition
    • H10P14/3424Deposited materials, e.g. layers characterised by the chemical composition being Group IIB-VIA materials
    • H10P14/3428Sulfides
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/34Deposited materials, e.g. layers
    • H10P14/3438Doping during depositing
    • H10P14/3441Conductivity type
    • H10P14/3446Transition metal elements; Rare earth elements

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroluminescent Light Sources (AREA)
  • Chemical Vapour Deposition (AREA)
  • Luminescent Compositions (AREA)
JP2512608A 1989-09-26 1990-09-17 ドーピング方法 Pending JPH05500385A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI894534A FI83721C (fi) 1989-09-26 1989-09-26 Dopningsfoerfarande
FI894534 1989-09-26

Publications (1)

Publication Number Publication Date
JPH05500385A true JPH05500385A (ja) 1993-01-28

Family

ID=8529054

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2512608A Pending JPH05500385A (ja) 1989-09-26 1990-09-17 ドーピング方法

Country Status (6)

Country Link
JP (1) JPH05500385A (enExample)
DE (1) DE4091748T (enExample)
FI (1) FI83721C (enExample)
FR (1) FR2652358B1 (enExample)
GB (1) GB2252450B (enExample)
WO (1) WO1991005028A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103897692A (zh) * 2014-03-31 2014-07-02 中国科学院上海光学精密机械研究所 过渡金属离子浓度渐变掺杂硫化锌或硒化锌及其制备方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS554794B2 (enExample) * 1973-07-31 1980-01-31
GB2047462B (en) * 1979-04-20 1983-04-20 Thomas J Method of manufacturing thin film electroluminescent devices
US4389973A (en) * 1980-03-18 1983-06-28 Oy Lohja Ab Apparatus for performing growth of compound thin films
JPS58157886A (ja) * 1982-03-16 1983-09-20 Matsushita Electric Ind Co Ltd 螢光体薄膜の製造方法
JPS6287487A (ja) * 1985-10-14 1987-04-21 Sharp Corp 不純物ド−プ単結晶形成方法

Also Published As

Publication number Publication date
FI83721B (fi) 1991-04-30
FR2652358B1 (fr) 1993-09-03
GB2252450B (en) 1993-01-20
FI83721C (fi) 1993-11-22
GB9205180D0 (en) 1992-05-13
GB2252450A (en) 1992-08-05
WO1991005028A1 (en) 1991-04-18
DE4091748T (enExample) 1992-08-27
FR2652358A1 (fr) 1991-03-29
FI894534A0 (fi) 1989-09-26

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