JPH0549922B2 - - Google Patents
Info
- Publication number
- JPH0549922B2 JPH0549922B2 JP58028597A JP2859783A JPH0549922B2 JP H0549922 B2 JPH0549922 B2 JP H0549922B2 JP 58028597 A JP58028597 A JP 58028597A JP 2859783 A JP2859783 A JP 2859783A JP H0549922 B2 JPH0549922 B2 JP H0549922B2
- Authority
- JP
- Japan
- Prior art keywords
- components
- light
- polarized light
- polarized
- optical path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 39
- 230000001427 coherent effect Effects 0.000 claims description 4
- 238000003384 imaging method Methods 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
- 230000010287 polarization Effects 0.000 abstract description 8
- 230000004907 flux Effects 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 abstract 2
- 230000010355 oscillation Effects 0.000 abstract 2
- 230000005540 biological transmission Effects 0.000 abstract 1
- 239000013078 crystal Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2859783A JPS59154309A (ja) | 1983-02-24 | 1983-02-24 | 面形状測定用干渉計 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2859783A JPS59154309A (ja) | 1983-02-24 | 1983-02-24 | 面形状測定用干渉計 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59154309A JPS59154309A (ja) | 1984-09-03 |
JPH0549922B2 true JPH0549922B2 (US06633782-20031014-M00005.png) | 1993-07-27 |
Family
ID=12252994
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2859783A Granted JPS59154309A (ja) | 1983-02-24 | 1983-02-24 | 面形状測定用干渉計 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59154309A (US06633782-20031014-M00005.png) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2891715B2 (ja) * | 1989-03-31 | 1999-05-17 | キヤノン株式会社 | 縞走査型干渉測定装置 |
JP2631942B2 (ja) * | 1993-06-25 | 1997-07-16 | 小松ゼノア株式会社 | 超小旋回パワショベル |
JP3788894B2 (ja) * | 2000-06-21 | 2006-06-21 | 日本電信電話株式会社 | 3次元位置検出センサ及び位置決め方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5575603A (en) * | 1978-11-30 | 1980-06-07 | Ibm | Method of measuring interference |
JPS5862507A (ja) * | 1981-09-17 | 1983-04-14 | インタ−ナシヨナル ビジネス マシ−ンズ コ−ポレ−シヨン | 表面の形状を光の干渉により決定する方法 |
JPS58176511A (ja) * | 1982-04-09 | 1983-10-17 | Hitachi Ltd | 干渉方法及びその装置 |
JPS58208610A (ja) * | 1982-05-17 | 1983-12-05 | ブリティッシュ・テクノロジー・グループ・リミテッド | 物体の表面検査装置 |
-
1983
- 1983-02-24 JP JP2859783A patent/JPS59154309A/ja active Granted
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5575603A (en) * | 1978-11-30 | 1980-06-07 | Ibm | Method of measuring interference |
JPS5862507A (ja) * | 1981-09-17 | 1983-04-14 | インタ−ナシヨナル ビジネス マシ−ンズ コ−ポレ−シヨン | 表面の形状を光の干渉により決定する方法 |
JPS58176511A (ja) * | 1982-04-09 | 1983-10-17 | Hitachi Ltd | 干渉方法及びその装置 |
JPS58208610A (ja) * | 1982-05-17 | 1983-12-05 | ブリティッシュ・テクノロジー・グループ・リミテッド | 物体の表面検査装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS59154309A (ja) | 1984-09-03 |
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