JPH0546889B2 - - Google Patents

Info

Publication number

JPH0546889B2

JPH0546889B2 JP60125246A JP12524685A JPH0546889B2 JP H0546889 B2 JPH0546889 B2 JP H0546889B2 JP 60125246 A JP60125246 A JP 60125246A JP 12524685 A JP12524685 A JP 12524685A JP H0546889 B2 JPH0546889 B2 JP H0546889B2

Authority

JP

Japan

Prior art keywords

pressure

sensitive

sensitive cell

hole

cell

Prior art date

1985-06-11

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired - Lifetime

Links

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• 239000000758 substrate Substances 0.000 claims description 6
• 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 4
• 238000000034 method Methods 0.000 description 8
• 239000004065 semiconductor Substances 0.000 description 6
• 238000003754 machining Methods 0.000 description 5
• 238000001514 detection method Methods 0.000 description 4
• 238000003780 insertion Methods 0.000 description 4
• 230000037431 insertion Effects 0.000 description 4
• 238000004519 manufacturing process Methods 0.000 description 3
• 230000000694 effects Effects 0.000 description 2
• 238000000605 extraction Methods 0.000 description 2
• 239000000463 material Substances 0.000 description 2
• 238000012545 processing Methods 0.000 description 2
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 238000005520 cutting process Methods 0.000 description 1
• 238000009792 diffusion process Methods 0.000 description 1
• 238000009826 distribution Methods 0.000 description 1
• 238000002474 experimental method Methods 0.000 description 1
• 230000002093 peripheral effect Effects 0.000 description 1
• 238000012827 research and development Methods 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1