JPH0546088B2 - - Google Patents
Info
- Publication number
- JPH0546088B2 JPH0546088B2 JP2214272A JP21427290A JPH0546088B2 JP H0546088 B2 JPH0546088 B2 JP H0546088B2 JP 2214272 A JP2214272 A JP 2214272A JP 21427290 A JP21427290 A JP 21427290A JP H0546088 B2 JPH0546088 B2 JP H0546088B2
- Authority
- JP
- Japan
- Prior art keywords
- mark
- optical system
- wafer
- exposure
- detecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2214272A JPH03123016A (ja) | 1990-08-15 | 1990-08-15 | 露光方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2214272A JPH03123016A (ja) | 1990-08-15 | 1990-08-15 | 露光方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62012367A Division JPS62181430A (ja) | 1987-01-23 | 1987-01-23 | 露光装置の校正方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03123016A JPH03123016A (ja) | 1991-05-24 |
| JPH0546088B2 true JPH0546088B2 (enrdf_load_stackoverflow) | 1993-07-13 |
Family
ID=16652986
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2214272A Granted JPH03123016A (ja) | 1990-08-15 | 1990-08-15 | 露光方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03123016A (enrdf_load_stackoverflow) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3476476A (en) * | 1967-03-28 | 1969-11-04 | Optomechanisms Inc | Alignment means for photo repeat machine |
| JPS5548693B2 (enrdf_load_stackoverflow) * | 1973-06-26 | 1980-12-08 | ||
| US4052603A (en) * | 1974-12-23 | 1977-10-04 | International Business Machines Corporation | Object positioning process and apparatus |
-
1990
- 1990-08-15 JP JP2214272A patent/JPH03123016A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03123016A (ja) | 1991-05-24 |
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