JPH0545668B2 - - Google Patents

Info

Publication number
JPH0545668B2
JPH0545668B2 JP6716685A JP6716685A JPH0545668B2 JP H0545668 B2 JPH0545668 B2 JP H0545668B2 JP 6716685 A JP6716685 A JP 6716685A JP 6716685 A JP6716685 A JP 6716685A JP H0545668 B2 JPH0545668 B2 JP H0545668B2
Authority
JP
Japan
Prior art keywords
tape
film
weight
deposited
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP6716685A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61227161A (ja
Inventor
Yutaka Okudaira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Mitsubishi Plastics Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Plastics Industries Ltd filed Critical Mitsubishi Plastics Industries Ltd
Priority to JP6716685A priority Critical patent/JPS61227161A/ja
Publication of JPS61227161A publication Critical patent/JPS61227161A/ja
Publication of JPH0545668B2 publication Critical patent/JPH0545668B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)
JP6716685A 1985-03-30 1985-03-30 蒸着フイルムの製造方法 Granted JPS61227161A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6716685A JPS61227161A (ja) 1985-03-30 1985-03-30 蒸着フイルムの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6716685A JPS61227161A (ja) 1985-03-30 1985-03-30 蒸着フイルムの製造方法

Publications (2)

Publication Number Publication Date
JPS61227161A JPS61227161A (ja) 1986-10-09
JPH0545668B2 true JPH0545668B2 (cs) 1993-07-09

Family

ID=13337037

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6716685A Granted JPS61227161A (ja) 1985-03-30 1985-03-30 蒸着フイルムの製造方法

Country Status (1)

Country Link
JP (1) JPS61227161A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4787088B2 (ja) * 2006-06-23 2011-10-05 株式会社住化分析センター 電極パターン形成方法

Also Published As

Publication number Publication date
JPS61227161A (ja) 1986-10-09

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