JPH0544961B2 - - Google Patents
Info
- Publication number
- JPH0544961B2 JPH0544961B2 JP59152932A JP15293284A JPH0544961B2 JP H0544961 B2 JPH0544961 B2 JP H0544961B2 JP 59152932 A JP59152932 A JP 59152932A JP 15293284 A JP15293284 A JP 15293284A JP H0544961 B2 JPH0544961 B2 JP H0544961B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- polarized light
- dimensional
- metal object
- inspected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 37
- 239000002184 metal Substances 0.000 claims description 36
- 230000003287 optical effect Effects 0.000 claims description 27
- 238000000034 method Methods 0.000 claims description 17
- 238000005286 illumination Methods 0.000 claims description 5
- 230000007547 defect Effects 0.000 description 17
- 230000010287 polarization Effects 0.000 description 11
- 238000003384 imaging method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000000605 extraction Methods 0.000 description 5
- 238000007689 inspection Methods 0.000 description 5
- 229910000679 solder Inorganic materials 0.000 description 4
- 230000002950 deficient Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229920006395 saturated elastomer Polymers 0.000 description 3
- 238000005476 soldering Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000002932 luster Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
Landscapes
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15293284A JPS6131909A (ja) | 1984-07-25 | 1984-07-25 | 金属物体の立体形状検出装置およびその方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15293284A JPS6131909A (ja) | 1984-07-25 | 1984-07-25 | 金属物体の立体形状検出装置およびその方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6131909A JPS6131909A (ja) | 1986-02-14 |
JPH0544961B2 true JPH0544961B2 (fr) | 1993-07-07 |
Family
ID=15551289
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15293284A Granted JPS6131909A (ja) | 1984-07-25 | 1984-07-25 | 金属物体の立体形状検出装置およびその方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6131909A (fr) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63170746U (fr) * | 1987-01-14 | 1988-11-07 | ||
DE3806686A1 (de) * | 1988-03-02 | 1989-09-14 | Wegu Messtechnik | Mehrkoordinatenmess- und -pruefeinrichtung |
JPH0239449A (ja) * | 1988-07-28 | 1990-02-08 | Matsushita Electric Ind Co Ltd | ワイヤボンディングの検査方法 |
JPH04105341A (ja) * | 1990-08-24 | 1992-04-07 | Hitachi Ltd | 半導体装置のリード曲がり、浮き検出方法及び検出装置 |
JPH0563050A (ja) * | 1991-08-29 | 1993-03-12 | Adotetsuku Eng:Kk | Icリードフレームの状態測定方法及び装置 |
JP3141470B2 (ja) * | 1991-12-19 | 2001-03-05 | 株式会社日立製作所 | 3次元形状検出方法および装置 |
JPH07103730A (ja) * | 1993-09-30 | 1995-04-18 | Sumitomo Metal Mining Co Ltd | リードフレーム検査装置 |
JP5120625B2 (ja) * | 2008-03-07 | 2013-01-16 | アイシン精機株式会社 | 内面測定装置 |
JP6085795B2 (ja) * | 2012-09-24 | 2017-03-01 | シーシーエス株式会社 | 製品検査システム、製品検査方法及び製品検査装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS528839A (en) * | 1975-07-10 | 1977-01-24 | Tokyo Optical Co Ltd | Observation method regarding phase structural body |
JPS5467443A (en) * | 1977-11-09 | 1979-05-30 | Canon Inc | Observer |
JPS5754803A (en) * | 1980-09-19 | 1982-04-01 | Toshiba Corp | Inspecting device for transparent pattern |
JPS5929499A (ja) * | 1982-08-12 | 1984-02-16 | 株式会社日立製作所 | リ−ド先端位置検出方式 |
-
1984
- 1984-07-25 JP JP15293284A patent/JPS6131909A/ja active Granted
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS528839A (en) * | 1975-07-10 | 1977-01-24 | Tokyo Optical Co Ltd | Observation method regarding phase structural body |
JPS5467443A (en) * | 1977-11-09 | 1979-05-30 | Canon Inc | Observer |
JPS5754803A (en) * | 1980-09-19 | 1982-04-01 | Toshiba Corp | Inspecting device for transparent pattern |
JPS5929499A (ja) * | 1982-08-12 | 1984-02-16 | 株式会社日立製作所 | リ−ド先端位置検出方式 |
Also Published As
Publication number | Publication date |
---|---|
JPS6131909A (ja) | 1986-02-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20100289891A1 (en) | Apparatus for inspecting object under inspection | |
US5101442A (en) | Three-dimensional imaging technique using sharp gradient of illumination | |
JPH06137826A (ja) | 形状検出方法およびその装置 | |
JPH0544961B2 (fr) | ||
JPH034081B2 (fr) | ||
US4875779A (en) | Lead inspection system for surface-mounted circuit packages | |
JP3135063B2 (ja) | 比較検査方法および装置 | |
JP3223483B2 (ja) | 欠陥検査方法とその装置 | |
JP2986025B2 (ja) | 基板の検査方法 | |
JPH04221705A (ja) | 外観検査装置 | |
JP3341739B2 (ja) | バンプ頂点検出方法並びにこれを用いたバンプ高さ測定方法及び装置 | |
JP2000193434A (ja) | 異物検査装置 | |
JP3507262B2 (ja) | 表面検査装置 | |
JP3141470B2 (ja) | 3次元形状検出方法および装置 | |
JPH04142410A (ja) | 形状認識装置 | |
JP2818597B2 (ja) | パターン検査方法 | |
JPH0711410B2 (ja) | 部品検査装置 | |
JPH01227910A (ja) | 光学検査装置 | |
JPH0771930A (ja) | スリット光プロジェクタ | |
JPS61205808A (ja) | 形状検出装置 | |
JPH04282845A (ja) | 三次元形状測定装置 | |
JP3232811B2 (ja) | 実装済みプリント基板の検査方法 | |
JP3093048B2 (ja) | ボンディングワイヤ検査装置 | |
JPH01265143A (ja) | 半田状態の検査装置 | |
JP2000195886A (ja) | ウェハバンプの検査装置及び検査方法 |