JPH0544726Y2 - - Google Patents
Info
- Publication number
- JPH0544726Y2 JPH0544726Y2 JP1985070403U JP7040385U JPH0544726Y2 JP H0544726 Y2 JPH0544726 Y2 JP H0544726Y2 JP 1985070403 U JP1985070403 U JP 1985070403U JP 7040385 U JP7040385 U JP 7040385U JP H0544726 Y2 JPH0544726 Y2 JP H0544726Y2
- Authority
- JP
- Japan
- Prior art keywords
- axis
- scanning device
- plane
- measured
- curved surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 235000002597 Solanum melongena Nutrition 0.000 description 1
- 244000061458 Solanum melongena Species 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985070403U JPH0544726Y2 (de) | 1985-05-13 | 1985-05-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985070403U JPH0544726Y2 (de) | 1985-05-13 | 1985-05-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61187410U JPS61187410U (de) | 1986-11-21 |
JPH0544726Y2 true JPH0544726Y2 (de) | 1993-11-15 |
Family
ID=30606951
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985070403U Expired - Lifetime JPH0544726Y2 (de) | 1985-05-13 | 1985-05-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0544726Y2 (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5121199B2 (ja) * | 2006-09-25 | 2013-01-16 | オリンパス株式会社 | 基板検査装置および基板検査方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS431095Y1 (de) * | 1966-04-11 | 1968-01-19 | ||
JPS5890101A (ja) * | 1981-11-25 | 1983-05-28 | Mitsutoyo Mfg Co Ltd | 三次元測定機 |
-
1985
- 1985-05-13 JP JP1985070403U patent/JPH0544726Y2/ja not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS431095Y1 (de) * | 1966-04-11 | 1968-01-19 | ||
JPS5890101A (ja) * | 1981-11-25 | 1983-05-28 | Mitsutoyo Mfg Co Ltd | 三次元測定機 |
Also Published As
Publication number | Publication date |
---|---|
JPS61187410U (de) | 1986-11-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5011282A (en) | Laser beam path alignment apparatus for laser processing machines | |
US5251156A (en) | Method and apparatus for non-contact measurement of object surfaces | |
US20120281239A1 (en) | Six axis motion control apparatus | |
WO1992008568A1 (en) | Laser alignment and control system | |
JPWO2008066017A1 (ja) | X線透視装置 | |
US20120194651A1 (en) | Shape measuring apparatus | |
KR20040038674A (ko) | 엑스레이 형광투시 장치 | |
JPH03150405A (ja) | 物体の輪郭測定方法及び装置 | |
JPH0544726Y2 (de) | ||
JP3293830B2 (ja) | 物体の幾何学パラメータを測定および計算する装置および方法 | |
US20030103277A1 (en) | Imaging device with angle-compensated focus | |
JPH0755439A (ja) | 三次元形状計測装置 | |
JP3064184B2 (ja) | 形状測定機 | |
JP2902608B2 (ja) | 三次元測定方法 | |
JPH0675617A (ja) | カメラ視点変更方式 | |
JP4255997B2 (ja) | 半導体ウエハの外観検査装置 | |
JPH10216981A (ja) | 光軸移動型レーザー加工装置 | |
JPS61144541A (ja) | 光学部品の偏心測定装置 | |
JPH1123751A (ja) | XYθステージおよびXYθステージの制御装置 | |
JPH07333160A (ja) | 被検査物の表面性状観察装置 | |
JP2003233424A (ja) | Xyステージの位置補正方法、装置、及び、これを用いた位置決め方法、装置 | |
CN116753864B (zh) | 一种用于立方箱体的全向三维扫描装置及扫描方法 | |
JPH041453Y2 (de) | ||
JPH07107597B2 (ja) | 移動物標投射装置 | |
JP3516028B2 (ja) | 蛍光x線分析方法および装置 |