JPH0544726Y2 - - Google Patents

Description

[Detailed Description of the Invention] Industrial Application Field The present invention relates to a mechanism for automatically scanning the surface of an object to be measured having a curved surface using a scanning device such as an optical device.

Background For products with curved surfaces, such as shadow masks for CRT devices, multiple predetermined locations on the processed curved surface are captured one after another as images using a microscope, and inspections are performed based on these images. There are cases where When moving a measuring device such as a microscope along a curved surface, the measuring device is moved to a predetermined position to be measured, and the axis of the measuring device (in the case of a microscope, its light beam) is aligned with the normal passing through that position. It is required to align the axes) and directly face the part to be measured, and to adjust the distance between the surface of the part to be measured and the measuring device to a predetermined distance.

Prior Art Conventional methods for this purpose generally utilize plane scanning devices, for example, for the above-mentioned items, conventional methods are capable of moving in the X and Y axes and rotating about the Z axis relative to the measuring instrument. Relative movement is performed using an autostage, and for the above items, manual operation is performed to align the surface of the measurement target with the predetermined scanning plane (X-Y plane). For the above, the measurement equipment is moved by hand. In the past, when scanning multiple positions on a curved surface in this way, manual operation was generally required.

In particular, when scanning a predetermined position on a curved surface using an optical device such as a microscope, manual intervention has traditionally been tolerated to some extent due to focus adjustment, and an appropriate scanning mechanism has not been provided. Nakatsuta.

Problems with the Prior Art Therefore, scanning a curved surface is a complicated task, and it has the disadvantage that it cannot be automated.

OBJECT OF THE INVENTION In view of the above, an object of the invention is to provide a method that allows scanning by a scanning device along a curved surface, thereby overcoming the problems of the prior art.

In particular, the present invention is directed to a mechanism that can easily position a measuring instrument such as a microscope with high precision and simple control over a plurality of predetermined positions on curved surfaces.

Summary of the invention The mechanism of the invention has a support surface that fixes an object to be measured, is movable along a first axis (Y-axis) in a reference plane (X-Y plane), and is movable along a first axis (Y-axis) in a reference plane (X-Y plane). a table device rotatably provided around an axis parallel to a second axis (Z-axis) perpendicular to the plane; and a position spaced apart from the support surface along the second axis (Z-axis). a movable stage mounted movably along a third axis (X-axis) that is disposed in the reference plane and perpendicular to the first axis; and parallel to the first axis (Y-axis). a pivot table that is attached to the movable table so as to be pivotable about an axis and tilted in a direction normal to the curved surface; and a scanning device is attached to the pivot table so as to be movable along the normal direction. It is characterized by the fact that it is composed of the following.

Configuration of the Embodiment The automatic scanning device shown in FIG.
A support stand 11 is disposed horizontally movably along 0, and a table 12 is disposed on this support stand 11 so as to be rotatable about a vertical axis. The reciprocating drive of the support base 11 and the rotational drive of the table 12 are controllably performed by a suitable motor. The object to be measured 1 is positioned and mounted on the table 12 by appropriate means.

On the other hand, a scanning device 2, such as a microscope, is placed above the table 12. This scanning device 2 is mounted on a pivot 13, which
It is configured to be movable in one direction (here, the vertical direction in the figure) relative to the main body. This reciprocating drive is also controllably effected by means of a suitable motor.

The pivot table 13 is attached to a movable table 15 so as to be pivotable in a vertical plane as shown by arrow A about an axis 14 parallel to the rail 10. This pivoting drive is also controllably effected by means of a suitable motor.

The moving platform 15 is attached to a second rail 16 that is disposed above the rail 10 and extends in a horizontal direction perpendicular to the rail 10.
It is possible to move along the This moving table 15
The displacing drive is also controllably effected by means of a suitable motor.

As the drive device for each member in the above-described device configuration, any suitable means can be used, for example, a feeding screw means for reciprocating drive, a rotary drive means by a motor for pivoting drive, etc.
These drive systems are well known and will not be described in detail. Further, the mechanical operation control of each of these members can be performed extremely easily and with high precision.

Further, when using an optical device such as a microscope as the scanning device 2, it is preferable to use one having an automatic focusing mechanism.

The feature of the present invention is that the mechanism is constructed by comprehensively combining the members whose respective drives are controlled as described above. In particular, by controlling the drive of each member described above, the scanning device 2 can be controlled to be measured. The purpose is to enable scanning along the curved surface of the object 1.

Principle of Operation of the Mechanism of the Invention Referring to FIG. 2, the principle of moving and positioning the scanning device at a desired position and with a desired orientation by means of the mechanism of the invention will be explained.

For this purpose, it is assumed that the object to be measured 1 is on the X-Y plane of the X-Y-Z coordinate system, as shown in the planar state in a of the figure, and the point o, which indicates the position of the object to be measured 1, is on the X-Y plane of the coordinate system. Assume that the origin coincides with 0. The scanning device 2 also scans the object to be measured 1 on the Z axis.
It is assumed that the axis of the scanning device 2 is previously aligned with the Z axis passing through the origin 0 and perpendicular to the XY plane. Such an initial set can be performed in the same manner as in conventional plane scanning techniques. From this state, when the axis of the scanning device 2 is aligned with the normal line passing through the point p to the point p on the curved surface of the object to be measured 1, and the scanning device 2 is moved to a position separated by a predetermined distance from the curved surface. I will explain about it.

First, as shown in d in Fig. 2, the position of the center of curvature o' of the curved surface at point p is calculated by calculating
It can be determined as coordinates in a coordinate system. Furthermore, the position of point p can be similarly determined as coordinates in the X-Y-Z coordinate system. These calculations can be performed based on the dimensions and shape of the object to be measured 1 that are known in advance.

From this state, as shown in b in the figure, the object to be measured 1 is rotated on the X-Y plane around the Z-axis,
With this, the X-Y connecting the center of curvature o' and the point p
The projection line on the plane can easily be made parallel to one axis, here the X-axis. This rotation is relative to the scanning device 2, so that it is also possible to rotate the scanning device 2. Such a rotation angle α of the object to be measured 1 can be easily calculated because the coordinates of each point in the X-Y-Z coordinate system are known.

In this way, the X-Y connecting the center of curvature o' and the point p
After the object to be measured 1 is rotated to make the projection line on the plane parallel to the X-axis, the center of curvature is The projection line on the XY plane connecting o' and point p can be easily made to coincide with the X axis. Again, this movement is relative to the scanning device 2, so that it is also possible to move the scanning device 2. This moving distance can also be easily calculated because the coordinates of each point in the X-Y-Z coordinate system are known.

Also, at this stage, the inclination angle of the line connecting the center of curvature o' and the point p, that is, the normal l passing through the point p, that is, the inclination angle θ with respect to the z-axis, as shown at d in the figure, can be calculated. Therefore, the pivot base 13 to which the scanning device 2 is attached is pivoted at the same angle as this angle θ, and its axis is
It is easy to adjust l' to be parallel to the normal l.

Furthermore, a scanning device 2 located above the X-Y plane
Since the height distance of is known in advance, the scanning device 2
The coordinates of the intersection between the normal l and a plane parallel to the X-Y plane where is located can be calculated, and based on this, the scanning device 2 is moved in the It is easy to make the axis l' coincide with the normal l.

After moving the pivot table 13 and the scanning device 2 so that the axis l' of the device coincides with the normal line l passing through the point p to be measured, the scanning device 2 is moved as shown in f in the figure. By moving the scanning device 2 along its axis l', the scanning device 2 can be positioned at a predetermined distance from the curved surface. Of course, since the shape and dimensions of the object to be measured 1 are basically known for this moving distance, the movement can be controlled based on required calculations.

By means of this method, it is possible to position the scanning device 2 directly in the desired direction with respect to a predetermined measuring position of the object 1 to be measured.

In particular, when an optical device such as a microscope is used as the scanning device 2, by adopting an automatic focusing mechanism, it is possible to obtain a clear image regardless of shape and size errors of the object to be measured 1. It becomes possible.

Operation in the apparatus of the embodiment As is clear from the above-mentioned operation principle, the first
In the apparatus shown in the figure, the position of the support base 11, the reference point on the table 12, such as the rotation center position and rotation angle, the height position of the scanning device 2, the pivot angle of the pivot base 13, the position of the movable base 15, and the measured object. Object 1
The measurement points above, etc. are all the same three-dimensional X
-YZ coordinates. The calculation of the driving distance as described in the operating principle is performed based on these data.

Based on such calculation results, for example, the first rotation of the object to be measured 1 in FIG.
The subsequent parallel movement is achieved by the rotational drive of
It is obtained by moving along the rail 10. Next, the tilt of the scanning device 2 is adjusted by pivoting the pivot table 13, and the scanning device 2 is adjusted by moving the moving table 15 along the second rail 16.
is directly opposed to the position p to be measured. Thereafter, by moving the scanning device 2 along a predetermined direction relative to the pivot table 13, the object to be measured 1 can be scanned while keeping its axis l' aligned with the normal l. It is brought close to the curved surface and positioned at a predetermined position.

As I will reiterate, this type of positioning is achieved by calculating the driving distance and controlling the movement based on this, since the shape and dimensions of the object to be measured 1 and the position to be measured are known in advance. .

Of course, positional deviations due to dimensional errors and the like are unavoidable. Therefore, especially when using the optical device as the scanning device 2, by employing an automatic focusing mechanism, desired measurements and inspections can be made regardless of these errors.

In addition, when scanning multiple points or continuously, by providing successive positions as data in advance, it is possible to properly position and scan the scanning device 2 with respect to successive points as described above. Eggplant.

Effects of the invention It becomes possible to position the scanning device extremely easily and accurately with respect to multiple target positions on a curved surface.

The configuration for this purpose and the operation control of each part are very simple.

Automation can therefore be easily achieved, for example, by using a microprocessor.

There is basically no restriction depending on the type of curved surface, and a highly versatile curved surface scanning device can be realized.

[Brief explanation of drawings]

FIG. 1 is a schematic diagram of an apparatus equipped with an automatic scanning mechanism for the surface of a curved object according to the present invention. FIGS. 2a to 2f are explanatory diagrams showing steps for explaining the scanning principle in the automatic scanning mechanism of the present invention. 1...Object to be measured, that is, a shadow mask, 2...
Scanning equipment, 10...Rail, 11...Dolly, 12
...Table, 13...Pivot base, 14...Axis line,
15...Moving platform, 16...Rail.

Claims (1)

[Claims for Utility Model Registration] For a measurement point on a curved surface of an object to be measured, the axis of the scanning device is aligned with a normal line on a predetermined curved surface that passes through that point and is spaced a predetermined distance from the curved surface. A mechanism for moving a scanning device to a position, which has a support surface for fixing an object to be measured, and has a first axis (Y-axis) in a reference plane (X-Y plane).
a table device that is movable along the plane and rotatable around an axis parallel to a second axis (Z-axis) perpendicular to the plane; a movable table disposed at a position spaced apart from the support surface along the reference plane and movably mounted along a third axis (X-axis) perpendicular to the first axis in the reference plane; a pivot table attached to the movable table so as to be pivotable about an axis parallel to a first axis (Y-axis) and tilted in a direction normal to the curved surface; a scanning device relative to the pivot table; An automatic operation mechanism for a surface of a curved body, characterized in that the mechanism is configured to include the following: being mounted so as to be movable along the normal direction.