JPS61187410U - - Google Patents

Info

Publication number
JPS61187410U
JPS61187410U JP7040385U JP7040385U JPS61187410U JP S61187410 U JPS61187410 U JP S61187410U JP 7040385 U JP7040385 U JP 7040385U JP 7040385 U JP7040385 U JP 7040385U JP S61187410 U JPS61187410 U JP S61187410U
Authority
JP
Japan
Prior art keywords
axis
plane
movable
along
reference plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7040385U
Other languages
Japanese (ja)
Other versions
JPH0544726Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985070403U priority Critical patent/JPH0544726Y2/ja
Publication of JPS61187410U publication Critical patent/JPS61187410U/ja
Application granted granted Critical
Publication of JPH0544726Y2 publication Critical patent/JPH0544726Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案による曲面体表面の自動走査機
構を備えた装置の概略図。第２図ａ〜ｆは本考案
の自動走査機構における走査原理を説明するため
の段階を示す説明ず。 １……被測定物体即ちシヤドーマスク、２……
走査機器、１０……レール、１１……台車、１２
……テーブル、１３……枢動台、１４……軸線、
１５……移動第、１６……レール。 FIG. 1 is a schematic diagram of an apparatus equipped with an automatic scanning mechanism for the surface of a curved object according to the present invention. FIGS. 2a to 2f show steps for explaining the scanning principle in the automatic scanning mechanism of the present invention. 1...Object to be measured, that is, a shadow mask, 2...
Scanning equipment, 10...Rail, 11...Dolly, 12
...Table, 13...Pivot base, 14...Axis line,
15...Movement number, 16...Rail.

Claims (1)

【実用新案登録請求の範囲】 被測定物体の曲面上の測定点に対し、その点を
通る法線に走査機器の軸線を一致させ且つ曲面か
ら所定の間隔を隔てた位置へ走査機器を移動させ
るための機構であつて、 被測定物体を固定する支持面を有し、基準とす
る平面（Ｘ―Ｙ面）における第一の軸線（Ｙ軸）
に沿つて移動可能であるとともに、該平面に対し
て垂直な第二の軸線（Ｚ軸）に平行な軸線回りに
回転可能に設けられたテーブル装置と、 前記第二の軸線（Ｚ軸）に沿つて前記支持面か
ら隔てられた位置に配置され、前記基準とする平
面において前記第一の軸線と直交する第三の軸線
（Ｘ軸）に沿つて移動可能に取付けられた移動台
と、 前記移動台において、前記第一の軸線（Ｙ軸）
と平行な軸線回りに枢動可能に取付けられた枢動
台と、 前記枢動台に対して走査機器が、該枢動台が枢
動されていない状態にて前記第二の軸線（Ｚ軸）
に沿つて移動できるように、一方向へ移動可能に
取付けられていることと、 を包含して構成されたことを特徴とする曲面体表
面の自動走査機構。[Claims for Utility Model Registration] For a measurement point on a curved surface of an object to be measured, the axis of the scanning device is aligned with the normal line passing through that point, and the scanning device is moved to a position separated from the curved surface by a predetermined distance. The mechanism has a support surface for fixing the object to be measured, and has a first axis (Y-axis) in a reference plane (X-Y plane).
a table device that is movable along the plane and rotatable around an axis parallel to a second axis (Z-axis) perpendicular to the plane; a movable table disposed at a position spaced apart from the support surface along the reference plane and movably mounted along a third axis (X-axis) perpendicular to the first axis in the reference plane; In the movable table, the first axis (Y axis)
a pivot table mounted for pivoting about an axis parallel to the second axis (Z-axis); )
An automatic scanning mechanism for the surface of a curved body, characterized in that it is mounted so as to be movable in one direction so as to be able to move along the curved surface, and is configured to include the following.
JP1985070403U 1985-05-13 1985-05-13 Expired - Lifetime JPH0544726Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985070403U JPH0544726Y2 (en) 1985-05-13 1985-05-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985070403U JPH0544726Y2 (en) 1985-05-13 1985-05-13

Publications (2)

Publication Number Publication Date
JPS61187410U true JPS61187410U (en) 1986-11-21
JPH0544726Y2 JPH0544726Y2 (en) 1993-11-15

Family

ID=30606951

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985070403U Expired - Lifetime JPH0544726Y2 (en) 1985-05-13 1985-05-13

Country Status (1)

Country Link
JP (1) JPH0544726Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008082703A (en) * 2006-09-25 2008-04-10 Olympus Corp Substrate inspection device and substrate inspection method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS431095Y1 (en) * 1966-04-11 1968-01-19
JPS5890101A (en) * 1981-11-25 1983-05-28 Mitsutoyo Mfg Co Ltd Three-dimensional measurement apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS431095Y1 (en) * 1966-04-11 1968-01-19
JPS5890101A (en) * 1981-11-25 1983-05-28 Mitsutoyo Mfg Co Ltd Three-dimensional measurement apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008082703A (en) * 2006-09-25 2008-04-10 Olympus Corp Substrate inspection device and substrate inspection method

Also Published As

Publication number Publication date
JPH0544726Y2 (en) 1993-11-15

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