JPS63118504U - - Google Patents
Info
- Publication number
- JPS63118504U JPS63118504U JP857087U JP857087U JPS63118504U JP S63118504 U JPS63118504 U JP S63118504U JP 857087 U JP857087 U JP 857087U JP 857087 U JP857087 U JP 857087U JP S63118504 U JPS63118504 U JP S63118504U
- Authority
- JP
- Japan
- Prior art keywords
- reference plane
- displacement sensor
- measurement
- sensor
- optical displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims description 13
- 230000003287 optical effect Effects 0.000 claims description 7
- 238000005259 measurement Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
第１図は実施例に係る微小変位測定装置を示す
斜視図、第２図は光学式変位センサ用測定対象物
を示す斜視図、第３図は微小変位測定装置の動作
を示す説明図、第４図は従来の微小変位測定装置
を示す斜視図、第５図は従来の問題点を示す説明
図である。
１……組立治具、２……被測定物、３……測定
基準治具、４……補助機構、５……Ｘ方向光学式
変位センサ、６……Ｙ方向光学式変位センサ、７
……傾斜角センサ、９……Ｘ基準面、１０……Ｙ
基準面、１１……光学式変位センサ用測定対象物
、１２……軸、１４……重心。
FIG. 1 is a perspective view showing a minute displacement measuring device according to an embodiment, FIG. 2 is a perspective view showing a measuring object for an optical displacement sensor, FIG. 3 is an explanatory diagram showing the operation of the minute displacement measuring device, and FIG. FIG. 4 is a perspective view showing a conventional minute displacement measuring device, and FIG. 5 is an explanatory diagram showing problems with the conventional device. 1... Assembly jig, 2... Object to be measured, 3... Measurement reference jig, 4... Auxiliary mechanism, 5... X-direction optical displacement sensor, 6... Y-direction optical displacement sensor, 7
...Tilt angle sensor, 9...X reference plane, 10...Y
Reference plane, 11...Measurement object for optical displacement sensor, 12... Axis, 14... Center of gravity.
Claims (1)
、傾斜角センサとを備え、被測定物に対し、ＸＹ
方向の変位量および傾斜角を測定する微小変位測
定装置において、 前記測定基準治具に、光学式変位センサの投光
軸と対応するＸＹ基準面を有し、かつ自重により
Ｘ基準面が常に垂直になり、Ｙ基準面が常に水平
となる光学式変位センサ用測定対象物を回転自在
に設けたことを特徴とする微小変位測定装置。[Claims for Utility Model Registration] Equipped with a measurement standard jig, an optical displacement sensor in the XY direction, and an inclination angle sensor,
In a minute displacement measurement device that measures directional displacement and inclination angle, the measurement reference jig has an XY reference plane corresponding to the light projection axis of the optical displacement sensor, and the X reference plane is always vertical due to its own weight. A minute displacement measuring device characterized in that a measuring object for an optical displacement sensor is rotatably provided so that the Y reference plane is always horizontal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP857087U JPS63118504U (en) | 1987-01-26 | 1987-01-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP857087U JPS63118504U (en) | 1987-01-26 | 1987-01-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63118504U true JPS63118504U (en) | 1988-08-01 |
Family
ID=30793070
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP857087U Pending JPS63118504U (en) | 1987-01-26 | 1987-01-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63118504U (en) |
-
1987
- 1987-01-26 JP JP857087U patent/JPS63118504U/ja active Pending
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