JP3064184B2 - Shape measuring instruments - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shape measuring machine for performing shape measurement such as roughness measurement and contour measurement, and for positioning (centering and leveling) a measurement object having a ridge line such as a cylindrical shape or a conical shape. Etc.).

[0002]

2. Description of the Related Art Conventionally, roughness measurement or contour measurement of a measuring object having a ridge line such as a cylindrical shape or a conical shape has been performed using a shape measuring machine. In measuring the roughness or contour of a measuring object having such a ridge line, the measurer himself adjusts the fine movement knob of the shape measuring machine so that the posture of the measuring object placed on the table is the reference posture. (Posture at the time of performing this measurement), and positioning such as centering and leveling of an object to be measured was performed.

[0003]

However, the adjustment of the fine adjustment knob by the measurer as described above involves problems such as imposing a burden on the measurer, requiring skill of the measurer, and increasing the preparation time for measurement. Was. In addition, since the posture of the measurement target is corrected by manual adjustment by the measurer, the measurement target may not be accurately set to a desired posture (reference posture), and the measurement accuracy may be reduced. there were.

An object of the present invention is to provide a shape measuring instrument which can easily and accurately position an object to be measured and can perform a highly accurate measurement.

[0005]

SUMMARY OF THE INVENTION The present invention aims to achieve the above object by automatically positioning a measurement object. Specifically, the shape measuring instrument according to the present invention includes a supporting means for supporting a measurement object having a ridge line, a detector for measuring the shape of the measurement object supported by the supporting means, Driving means for relatively moving the detector and the detector, and at least two or more parallel scans are performed.
The tentative measuring means for performing provisional determination of the attitude of the supported measurement object by the support means, at each scan of the provisional measuring means I
The measurement pair indicated by a line connecting the vertexes of each obtained measurement value
Calculating means for calculating the direction of the ridge line of the elephant, and calculating the error of the attitude of the object to be measured from the direction of the ridge line with respect to the reference attitude; Posture control means for correcting the posture of the measurement object to the reference posture by operating means, and main measurement means for measuring the shape of the measurement object corrected to the reference posture by the detector. It is characterized by the following.

Here, the measuring object having a ridge line includes a cylindrical (cylindrical) or conical measuring object, a prismatic shape such as a kamaboko shape, a triangular prism, a pentagonal prism, a triangular pyramid, a pentagonal pyramid, and the like. A measurement object such as a pyramid shape is also included. Also, if supported by supporting means so that the ridgeline can be grasped, a square pillar,
The measurement target may be a prismatic shape such as a hexagonal prism or a pyramid shape such as a quadrangular pyramid or a hexagonal pyramid (for example, see FIG. 6 described later). Further, the ridge line includes not only a straight line but also a curved line (for example, a case where the measurement target has a bent cylindrical shape, see FIG. 7 described later). It does not have to be continuous over the entire length of the object.

The reference posture is a posture at the time of performing the main measurement, and need not be one posture for one measurement object, but may be a plurality of postures. For example, when the object to be measured has a cylindrical shape, a reference posture corresponding to the case where roughness measurement or contour measurement is performed along the axial direction of the cylinder, and a reference posture along a radial direction of the cylinder (a direction orthogonal to the axis). There is a reference posture corresponding to the case where roughness measurement or contour measurement is performed. Further, as the support means, a table on which the object to be measured is placed, an M block, a vice, a clip, or the like, or a combination thereof can be adopted.

[0008] Here, the direction of the ridge, two-dimensional direction (for example, when considering only the direction in the horizontal plane)
Or a three-dimensional direction (for example, when a direction in a horizontal plane and a tilt with respect to the horizontal plane are considered).

Furthermore, the shape measuring machine of the present invention, the reference
The direction of the ridgeline of the measurement object in the posture is
The measurement direction coincides with or is orthogonal to the measurement direction .

[0010]

According to the present invention, the object to be measured having the ridge line is supported by the supporting means to be in a temporarily placed posture.
The attitude of the measurement object is corrected to the reference attitude by operating the driving means to cause the support means and the detector to move relative to each other, and then the shape of the measurement object in the reference attitude is measured by the measurement means. At this time, in correcting the posture of the measurement target, the posture of the measurement object supported by the support means is temporarily measured by the temporary measurement means, and the measurement object is measured by the calculation means based on the measurement result by the temporary measurement means. The attitude of the object to be measured is automatically corrected to the reference attitude by operating the driving means by the attitude control means based on the calculation result of the calculation means.

Therefore, in correcting the posture of the object to be measured, it is not necessary for the measurer himself to adjust the fine movement knob of the shape measuring machine as in the prior art. Not only that, the measurement target can be easily and accurately positioned, and the time required for measurement preparation (measurement setup time) is reduced. In addition, since the correction is automatically performed by the temporary measurement unit, the calculation unit, and the attitude control unit instead of the manual adjustment by the measurer, the positioning of the measurement target is accurately performed, and the measurement can be performed with high accuracy. These objects are achieved by these.

The provisional measuring means may be configured to perform at least two or more parallel scans, and the calculating means may be configured to calculate the direction of the ridgeline of the object to be measured based on the vertices of the measured values obtained in each scan. This makes it possible to easily and quickly grasp the posture of the measurement target in the temporarily placed state.

[0013] In addition, Oite to the shape measuring instrument of the present invention, the temporary
The detector used for provisional measurement by the measurement means is
Same as the detector used in the main measurement by step
May be present or different. However,
Same in terms of structure simplification, cost reduction, miniaturization, etc.
Preferably,

[0014]

An embodiment of the present invention will be described below with reference to the drawings. 1 and 2 show a shape measuring machine 1 according to the present embodiment.
0 is shown. FIG. 1 is a perspective view of a measuring machine main body 10A of the shape measuring machine 10, and FIG. 2 is a configuration diagram of the measuring machine main body 10A and control means 50 for controlling the measuring machine main body 10A. In FIG. 1, a measuring device main body 10A of a shape measuring device 10 includes a base 11, a Y-axis table 12 provided on the base 11 so as to be movable in the Y-axis direction, and a R-direction on the Y-axis table 12. R provided for swinging
A shaft table 13; a turning table 14 provided on the R-axis table 13 so as to be rotatable in the θ direction;
A column 15 erected at the rear right side in the figure, a Z-axis slider 16 provided on the column 15 so as to be able to move up and down in the Z-axis direction, and a Z-axis slider 16 provided in the X-axis direction (measurement direction). A measurement mechanism 20 movably provided. Further, the Y-axis table 12 is
By moving a moving member, not shown, provided between the base 11 and the base 11 along a groove 19 formed on the base 11, the position can be adjusted in the X-axis direction by manual operation.

The object 1 to be measured is placed on the turning table 14.
7 is placed directly or via a jig such as an M block 18 as shown in the figure. Then, the object 17 to be measured is turned by the turning table 14 and a jig such as an M block 18 used as necessary.
Are supported.

The measuring mechanism 20 is provided with an X-axis driving device 21 movably provided in the X-axis direction (measuring direction) with respect to the Z-axis slider 16, and is moved in the X-axis direction with respect to the X-axis driving device 21. A measurement arm 22 is freely attached, and a contact-type detector 24 attached to an end of the measurement arm 22 and having a stylus (contact) 23 at the tip is provided. The measurement mechanism 20 moves the stylus 23 to the measurement target 17 by moving the measurement arm 22 in the X-axis direction while keeping the stylus 23 in contact with the measurement target 17 placed on the turntable 14. The stylus 23 is displaced in the vertical direction in accordance with the unevenness of the surface contour shape, the amount of swing of the stylus 23 at this time is detected, and the contour shape, surface roughness, and the like of the measurement object 17 can be measured from the amount of swing.

Further, the supporting means 3 is provided on the measuring instrument body 10A.
There is provided a driving means 40 for relatively moving the zero and the measuring mechanism 20 (see FIG. 2). The driving mechanism 40 is configured to rotate the turning table 14 in the θ direction with respect to the R-axis table 13 about the turning axis along the Z-axis direction.
1 and swing the R-axis table 13 in the R direction with respect to the Y-axis table 12 about the swing axis K along the Y-axis direction (that is, by tilting the R-axis table 13 with respect to the horizontal plane). A swing mechanism 42 for swinging) and a linear movement mechanism 43 for linearly moving the Y-axis table 12 relative to the base 11 in the Y-axis direction. Accordingly, the support means 30 can be turned in the θ direction by the turning mechanism 41, can be swung in the R direction by the swing mechanism 42, and can be moved linearly in the Y-axis direction by the linear movement mechanism 43 with respect to the measuring mechanism 20. I have.

In FIG. 2, the control means 50 controls the measuring mechanism 20 to temporarily measure the attitude of the measuring object 17 in the temporarily placed state supported by the supporting means 30.
1, an arithmetic means 52 for calculating an error of the attitude of the measuring object 17 with respect to the reference attitude based on the measurement result by the temporary measuring means 51, and a control signal sent to the driving means 40 based on the arithmetic result by the arithmetic means 52. The attitude control means 53 for operating the driving means 40 to correct the attitude of the measurement target 17 to the reference attitude, and the main measurement means 54 for measuring the shape of the measurement target 17 corrected to the reference attitude by the measurement mechanism 20. Have. The control means 50 includes a microcomputer, a data processing device, and various programs built therein.

The provisional measuring means 51 sends a command to the measuring mechanism 20 to move the detector 24 (the stylus 23) in the X-axis direction by the X-axis driving device 21 and the driving means 40
By sending a command to the linear motion mechanism 43 to move the support means 30 in the Y-axis direction, at least two or more parallel scans are performed, and a measurement value in each scan is obtained.

The calculating means 52 includes a ridge direction calculating section 52A for calculating the direction of the ridge line of the measuring object 17 from the vertices of the measured values obtained by each scan by the provisional measuring means 51, and the ridge line direction calculating section 52A. Calculating unit 5 for calculating an error of the obtained ridge line direction in the reference posture with respect to the ridge line direction
2B.

In the present embodiment, the shape of the measuring object 17 is measured as follows. First, the measuring object 17 is placed on the swivel table 14 using a jig such as an M block 18 as appropriate, and the position of the Y-axis table 12 is adjusted so that the measuring object 17 falls within the measuring range of the measuring mechanism 20. Make settings (temporary placement). Here, the shape of the measurement target 17 is a cylindrical shape, and measurement is performed along the axial direction of the cylinder. In this temporarily placed state, the temporary measurement means 51 performs temporary measurement of the attitude of the measurement target 17. For example, as shown in FIG. 3, the detector 24 is moved along the X-axis direction based on a command from the temporary measurement unit 51 to perform three parallel scans (scanning).

At this time, the intervals between the respective scans can be the same or different. Also,
In this embodiment, the movement in the Y-axis direction between each scan and the scan is performed by operating the linear motion mechanism 43 to move the measurement target 17 in the Y-axis direction. Alternatively, the measuring mechanism may be configured to be movable in the Y-axis direction, and the detector 24 may be moved in the Y-axis direction. Further, in performing the temporary measurement, the vertical movement of the measuring mechanism 20 in the Z-axis direction (relative movement between the column 15 and the Z-axis slider 16) and the setting of the initial position of the stylus 23 of the measuring mechanism 20 are performed by the temporary measuring means 51. It may be performed automatically or performed by a measurer.

Next, an error of the attitude of the object 17 to be measured with respect to the reference attitude is calculated by the calculating means 52 based on the measurement result by the temporary measuring means 51. FIG. 4 shows the provisional measuring means 5.
1 shows an example of the measurement result obtained by the method of FIG. In FIG. 4, vertices T1, T2, T3 of the respective measurement values obtained by scanning
(Indicated by a dashed line in the figure) indicates the direction of the ridgeline of the measurement object 17 in the temporarily placed state. Ridge direction calculation unit 52A
Are the coordinates (X1, Y) of these vertices T1, T2, T3.
1, Z1), (X2, Y2, Z2), (X3, Y3, Z
According to 3), the direction of the ridge line with respect to the (X, Y, Z) axis is calculated.

The direction of the ridge line (direction in the XY plane and the inclination with respect to the XY plane) calculated by the ridge line direction calculation unit 52A is determined by the error calculation unit 52B, and the position of the measurement target 17 in the reference posture set in advance. Calculate the error from the ridge direction. Here, since the measurement is performed along the axial direction of the cylinder, the direction of the ridge line of the measurement target 17 in the reference posture matches the X-axis direction which is the measurement direction.

Thereafter, the attitude control means 53 operates the turning mechanism 41 of the driving means 40 to turn the turning table 14 in the θ direction based on the calculation result by the error calculating section 52B, thereby turning the XY of the ridge line of the object 17 to be measured. The direction in the plane is corrected, the swing mechanism 42 is operated to swing the R-axis table 13 to correct the inclination of the ridge line of the measuring object 17 with respect to the XY plane, and the linear movement mechanism 43 is further operated to operate the Y axis. The axis table 12 is linearly moved in the Y-axis direction, and the ridge line of the measuring object 17 is arranged at a position immediately below the stylus 23 of the measuring mechanism 20 or the like. In addition, the turning mechanism 41 by the attitude control means 53,
The order of operation of the swing mechanism 42 and the linear motion mechanism 43 is arbitrary as long as the attitude of the measurement target 17 can be finally corrected to the reference attitude.

Finally, the main measuring means 54 which has received the correction completion signal from the attitude control means 53 sends a command to the measuring mechanism 20 to move (scan) the detector 24 in the X-axis direction, thereby setting the reference attitude. The main measurement of the measurement object 17 is performed. At this time, when performing the main measurement, the vertical movement of the measurement mechanism 20 in the Z-axis direction and the setting of the initial position of the stylus 23 of the measurement mechanism 20 are performed in the same manner as the temporary measurement by the temporary measurement means 51. May be performed automatically, or may be performed by a measurer. However, since the posture of the measuring object 17 is accurately grasped by the provisional measurement by the provisional measurement means 51, it is preferable that the measurement be performed automatically by the measurement means 54 from the viewpoint of labor saving. Further, the instruction of the timing to start the main measurement may be an instruction from the measurer who has confirmed the completion of the correction, instead of the correction completion signal from the attitude control unit 53.

In the measurement of the shape of the cylindrical measuring object 17 as described above, the measurement may be performed along the radial direction of the cylinder (direction perpendicular to the axis). In this case, the direction of the ridgeline of the measurement target 17 in the reference posture is a direction (Y-axis direction) orthogonal to the X-axis direction which is the measurement direction. FIG. 5 shows an example of the posture of the measurement target 17 in the temporarily placed state in this case. In this case, similarly to the case of FIG. The scanner 24 is moved in the X-axis direction to perform three parallel scans (scanning).

Thereafter, in the same manner, based on the measurement result by the temporary measuring means 51, the measuring
The posture control unit 53 calculates an error with respect to the reference posture, and the posture control unit 53 controls the turning mechanism 41 and the swing mechanism 4 of the driving unit 40.
2, the linear motion mechanism 43 is operated to correct the posture of the measurement target 17 to the reference posture, and finally, the main measurement of the measurement target 17 set to the reference posture by the main measurement means 54 is performed.

According to this embodiment, the following effects can be obtained. That is, a tentative measuring means 51 for temporarily measuring the attitude of the measuring object 17, an arithmetic means 52 for calculating an error of the attitude of the measuring object 17 with respect to the reference attitude based on the measurement result by the tentative measuring means 51, Since the attitude control means 53 for automatically correcting the attitude of the measurement target 17 by operating the driving means 40 based on the calculation result by the means 52 is provided, the conventional method for correcting the attitude of the measurement target 17 is provided. It is not necessary for the measurer himself to adjust the fine movement knob of the shape measuring instrument as in the above, so that the burden on the measurer can be reduced, and even if the person is not a skilled person, the measurement target 17 can be measured.
Can be easily and accurately positioned, and the time required for preparation for measurement (measurement setup time) can be reduced.

Then, instead of manual adjustment by the measurer,
Temporary measurement means 51, calculation means 52, and attitude control means 5
3 automatically corrects the measurement object 17
Positioning can be performed accurately, and highly accurate measurement can be performed.

Further, since the measuring mechanism 20 used in the actual measurement by the actual measuring means 54 is also used for the temporary measurement by the temporary measuring means 51, it is not necessary to prepare another measuring mechanism for the temporary measurement. Therefore, the structure of the measuring instrument can be simplified, the cost can be reduced, and the size can be reduced.

Further, the control means 50 includes a provisional measurement means 51
, Three parallel scans are performed, and the ridge direction calculation unit 52A of the calculating means 52 calculates the direction of the ridge line of the measurement object 17 from the vertices T1 to T3 of the measured values obtained in each scan. With this configuration, the posture of the measurement target 17 in the temporarily placed state can be easily and quickly grasped.

The driving means 40 operated by the attitude control means 53 includes a turning mechanism 41 for turning the support means 30 and a swing mechanism 42 for tilting and swinging the support means 30.
And a linear motion mechanism 43 for linearly moving the support means 30, so that the target object 17 can be placed in any temporary position regardless of the posture, so that the reference position when performing the main measurement is ensured. Can be modified.

It should be noted that the present invention is not limited to the above-described embodiment, but includes other configurations capable of achieving the object of the present invention. For example, the following modifications are included in the present invention. That is, in the above embodiment, the detector 24
Is a contact-type detector configured to perform shape measurement by bringing the stylus 23 into contact with the measurement target 17. However, the detector used for the main measurement or the detector used for the provisional measurement is a detector having such a configuration. It is not limited to a detector, and may be, for example, an optical non-contact detector.

In the above-described embodiment, three scans by the provisional measuring means 51 are performed in parallel. However, the number of scans is not limited to three. In short, it is only necessary to be able to grasp the direction of the ridgeline.
The scanning need not be parallel to each other. For example, scanning may be performed so as to intersect.

Further, in the above embodiment, the measurement object 17
Has a cylindrical shape, but is not limited to such a shape. In short, any object having a ridgeline may be used. For example, as shown in FIG. 6, a prismatic measurement object 72 or the like may be used if it is supported by the support means 71 so that the ridgeline can be grasped.

The ridge line of the object to be measured does not need to be a straight line as in the above-described embodiment, but may be a curved line. For example, as shown in FIG. May be measured. In such a case, by increasing the number of scans by the provisional measurement unit 51, the posture of the measurement target can be more accurately corrected to a desired posture (reference posture).

Further, in the above embodiment, the provisional measuring means 51
Is a single temporary measurement, but the temporary measurement may be performed a plurality of times and each measurement result may be averaged. At this time, provisional measurement may be performed a plurality of times with the posture changed. For example, the provisional measurement may be performed in two postures by rotating the turning table 14 by 90 degrees. , A more accurate provisional measurement can be performed.

In the above embodiment, the driving means 40
Has a configuration including a turning mechanism 41, a swing mechanism 42, and a linear motion mechanism 43. However, the present invention is not limited to such a configuration. It is only necessary to be able to surely correct the reference posture when performing. For example, a drive unit provided with a mechanism for moving the Y-axis table 12 in the X-axis direction based on a control signal from the attitude control unit 53 in addition to the turning mechanism 41, the swing mechanism 42, and the linear movement mechanism 43 may be used.

In the above embodiment, the driving means 40
Although the support means 30 is moved with respect to the base 11 by the control signal from the posture control means 53 to correct the measurement target 17 to the reference posture, the measurement mechanism 20 is moved with respect to the base 11. (Dotted line in FIG. 2), or the support means 30 and the measuring mechanism 20
May be moved relative to the base 11. In short, the support means 30 and the measurement mechanism 20 are moved relative to each other by the control signal from the attitude control means 53 to bring the measurement object 17 into the reference attitude. What is necessary is just a configuration that can be modified.

Further, in the above embodiment, the measuring mechanism 20
Has a configuration in which the detector 24 is moved in the X-axis direction with respect to the base 11 by the X-axis driving device 21 to perform scanning. The scanning mechanism may be configured to scan by moving in the axial direction. In short, the detector 24 and the object 17 to be measured may be used.
Is relatively moved in the X-axis direction (measurement direction), it is possible to perform scanning at the time of measurement (main measurement or provisional measurement).

[0042]

As described above, according to the present invention, the tentative measuring means, the calculating means, and the attitude control means automatically correct the attitude of the object to be measured when performing the main measurement. The burden on the measurer can be reduced, the measurement target can be positioned easily and accurately even by non-experts, and the time required for measurement preparation (measurement setup time)
And it is possible to perform highly accurate measurement.

Further, the provisional measurement means is configured to perform at least two or more parallel scans, and the calculation means is configured to calculate the direction of the ridgeline of the object to be measured based on the vertices of the measurement values obtained in each scan. This has the effect that the posture of the measurement object in the temporarily placed state can be easily and quickly grasped.

Further, the shape measuring machine of the present invention further comprises a turning mechanism for turning the support means, a swing mechanism for tilting and swinging the support means, and a driving means for linearly moving the support means. Is provided, there is an effect that, regardless of the posture of the measurement object in the temporary placement state, the measurement object can be surely corrected to the reference posture for performing the main measurement.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a measuring instrument main body according to an embodiment of the present invention.

FIG. 2 is a configuration diagram showing a measuring instrument main body and control means of the embodiment.

FIG. 3 is an explanatory diagram showing a scanning state of the temporary measurement in the embodiment.

FIG. 4 is an explanatory diagram showing a measurement result of the provisional measurement of the embodiment.

FIG. 5 is an explanatory diagram showing another temporary measurement scanning state in the embodiment.

FIG. 6 is an explanatory view showing a modification of the present invention.

FIG. 7 is an explanatory view showing another modified example of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Shape measuring machine 10A Measuring machine main body 17 Object to be measured 24 Detector 30 Support means 40 Driving means 41 Turning mechanism 42 Swing mechanism 43 Linear movement mechanism 50 Control means 51 Temporary measuring means 52 Computing means 53 Attitude control means 54 Main measuring means T1, T2, T3 Top of measured value

──────────────────────────────────────────────────続 き Continuation of front page (56) References JP-A-62-261916 (JP, A) JP-A-2-218908 (JP, A) JP-A-2-129505 (JP, A) JP-A 60-261916 196608 (JP, A) Japanese Utility Model Showa 64-51808 (JP, U) (58) Field surveyed (Int. Cl. ⁷ , DB name) G01B 21/00-21/32

Claims (3)

(57) [Claims] 1. A supporting means for supporting a measuring object having a ridgeline, a detector for measuring the shape of the measuring object supported by the supporting means, and a relative movement between the supporting means and the detector. Driving means, at least two or more
A tentative measurement unit that performs tentative measurement of the posture of the measurement object supported by the support unit by performing parallel scans, and a line connecting the vertexes of each measurement value obtained in each scan of the tentative measurement unit.
Calculate the direction of the ridge line of the measurement object shown, and
Calculating means for calculating an error of the attitude of the measurement object with respect to a reference attitude from the direction of the ridge line; and operating the driving means based on a calculation result by the calculation means to change the attitude of the measurement object to the reference attitude. A shape measuring machine comprising: attitude control means for correcting; and main measuring means for measuring the shape of the object to be measured corrected to the reference attitude by the detector. 2. The shape measuring apparatus according to claim 1, wherein a direction of a ridge line of the measurement object in the reference posture is:
Shape measuring machine characterized that you have consistent or perpendicular to the measurement direction in the measurement. 3. The shape measuring machine according to claim 1, wherein said shape measuring device is used for temporary measurement by said temporary measuring means.
Detector used in the main measurement by the main measurement means.
The detector and the same thing der form measuring instrument according to claim Rukoto that.