JPH0829153A - Shape measuring instrument - Google Patents

Abstract

PURPOSE:To provide a shape measuring instrument which can easily and accurately position a measurement target, and perform an accurate measurement. CONSTITUTION:A shape measuring instrument 10 for measuring the shape of a measurement target with a ridge is provided with a tentative measurement means 51 for tentatively measuring the attitude of the measurement target, an operation means 52 for calculating an error for the reference attitude of an attitude of the measurement target based on a measurement result by the tentative measurement means 51, and an attitude control means 53 for correcting the attitude of the measurement target by operating a drive means 40 based on the operation means by the operation means 52, thus automatically positioning the measurement target and then performing an official measurement using a detector 24 by an official measurement means 54.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shape measuring machine for performing shape measurement such as roughness measurement and contour measurement, and positioning of a measuring object having a ridge line such as a cylindrical shape or a conical shape (centering and leveling). Etc.).

[0002]

BACKGROUND ART Conventionally, roughness measurement or contour measurement of a measuring object having a ridge line such as a cylindrical shape or a conical shape has been performed using a shape measuring machine. When measuring the roughness or contour of an object to be measured having such ridges, the operator himself adjusts the fine adjustment knob of the shape measuring machine to adjust the attitude of the object to be measured placed on the table to the reference attitude. It was corrected to (posture at the time of performing the main measurement), and positioning such as centering and leveling of the measurement object was performed.

[0003]

However, the adjustment of the fine movement knob by the measurer as described above has a problem that the measurer is burdened, the measurer's skill is required, and the preparation time for the measurement is long. It was Further, since the posture of the measurement target is corrected by the manual adjustment by the measurer, there is a possibility that the measurement target may not be accurately set to a desired posture (reference posture), and the measurement accuracy may deteriorate. there were.

An object of the present invention is to provide a shape measuring machine capable of easily and accurately positioning an object to be measured and performing highly accurate measurement.

[0005]

SUMMARY OF THE INVENTION The present invention is intended to achieve the above object by automatically positioning a measuring object. Specifically, the shape measuring machine of the present invention comprises a supporting means for supporting a measuring object having a ridge, a detector for measuring the shape of the measuring object supported by the supporting means, and supporting means for these. And a detector for relative movement, a temporary measurement means for temporarily measuring the posture of the measuring object supported by the supporting means, and a posture of the measuring object based on the measurement result by the temporary measuring means. Calculation means for calculating an error with respect to the reference attitude, attitude control means for operating the drive means based on the calculation result by the calculation means to correct the attitude of the object to be measured to the reference attitude, and the reference attitude Main measuring means for performing the shape measurement of the corrected object to be measured by the detector.

Here, the measuring object having a ridge line includes a cylindrical (cylindrical) or conical measuring object, a prismatic shape such as a kamaboko shape, a triangular prism, and a pentagonal prism, a triangular pyramid, and a pentagonal pyramid. It also includes measurement objects such as pyramids. Moreover, if it is supported by a supporting means so that the ridgeline can be grasped, a square pole,
It may be a prismatic shape such as a hexagonal prism or a pyramidal shape such as a quadrangular pyramid or a hexagonal pyramid (for example, refer to FIG. 6 described later). Further, the ridge line includes not only a straight line but also a curved line (for example, when the measurement object is a bent cylindrical shape, etc., which will be described later with reference to FIG. 7), and if the ridge line is continuous for a certain length, the measurement object It does not have to be continuous over the entire length of the object.

Further, the reference posture is a posture at the time of performing the main measurement, and it does not have to be one posture for one object to be measured and may be a plurality of postures. For example, when the object to be measured has a cylindrical shape, a reference posture corresponding to the case of performing roughness measurement or contour measurement along the axial direction of the cylinder and the radial direction of the cylinder (direction orthogonal to the axis) There is a reference posture corresponding to the case of performing roughness measurement or contour measurement. Further, as the supporting means, a table on which the measuring object is placed, an M block, a vise, a clip, or the like, or a combination thereof can be adopted. Further, the detector used in the temporary measurement by the temporary measurement means may be the same as or different from the detector used in the main measurement by the main measurement means. However, it is preferable that they are the same in terms of simplification of the structure of the measuring machine, cost reduction, downsizing, and the like.

Further, in the shape measuring machine of the present invention, the temporary measuring means performs at least two or more parallel scans, and the computing means uses the apex of the measurement value obtained in each scan to measure the object to be measured. The feature is that the direction of the ridgeline of the object is calculated. Here, the direction of the ridge is a two-dimensional direction (for example, when considering only the direction in the horizontal plane)
Or may be a three-dimensional direction (for example, in the case of considering the direction in the horizontal plane and the inclination with respect to the horizontal plane).

Further, in the shape measuring machine of the present invention, the driving means pivots the supporting means about a pivot axis along a Z-axis direction orthogonal to the X-axis direction which is the measurement direction of the main measuring means. A swinging mechanism, a swinging mechanism that swings the supporting means about swinging axes along Y-axis directions orthogonal to the X-axis direction and the Z-axis direction, and the swinging mechanism in the Y-axis direction. And a direct-acting mechanism for linearly moving the support means.

[0010]

According to the present invention as described above, the object to be measured having the ridge line is supported by the supporting means to be in a temporarily placed posture,
The posture of the measuring object is corrected to the reference posture by operating the driving means to relatively move the supporting means and the detector, and then the shape of the measuring object in the state of the reference posture is measured by the main measuring means. At this time, in correcting the posture of the measurement object, the posture of the measurement object supported by the temporary measuring means is tentatively measured, and based on the measurement result by the temporary measuring means, the measuring object is measured by the calculating means. The error of the attitude of the object with respect to the reference attitude is calculated, and the attitude control means operates the drive means based on the calculation result by the operation means to automatically correct the attitude of the measurement object to the reference attitude.

Therefore, when the posture of the object to be measured is corrected, it is not necessary for the measurer himself to adjust the fine movement knob of the shape measuring machine as in the conventional case. Not only that, it becomes possible to position the measurement object easily and accurately, and the time required for preparation for measurement (measurement setup time) is shortened. In addition, since the correction is automatically performed by the temporary measurement means, the calculation means, and the attitude control means, not the manual adjustment by the measurer, the positioning of the measurement object is accurately performed, and high-precision measurement becomes possible. By these, the above-mentioned object is achieved.

Further, the provisional measuring means is configured to perform at least two or more parallel scans, and the computing means is configured to calculate the direction of the ridge line of the object to be measured by the apex of the measurement value obtained in each scan. By doing so, it becomes possible to easily grasp the posture of the measurement object in the temporarily placed state in a short time.

Further, the shape measuring machine of the present invention is provided with a driving mechanism including a swivel mechanism for swiveling the support means, a swing mechanism for tilting and swinging the support means, and a linear motion mechanism for linearly moving the support means. By providing the above, it becomes possible to surely correct the measurement object to the reference attitude for the main measurement, regardless of the attitude of the measurement object.

[0014]

An embodiment of the present invention will be described below with reference to the drawings. 1 and 2 show a shape measuring machine 1 of this embodiment.
0 is shown. FIG. 1 is a perspective view of a measuring machine body 10A of the shape measuring machine 10, and FIG. 2 is a configuration diagram of the measuring machine body 10A and a control means 50 for controlling the measuring machine body 10A. In FIG. 1, the measuring machine body 10A of the shape measuring machine 10 includes a base 11, a Y-axis table 12 movably provided on the base 11 in the Y-axis direction, and an R-direction on the Y-axis table 12 in the R direction. R that can swing
The axis table 13, a turning table 14 provided on the R axis table 13 so as to be turnable in the θ direction, and a base 11
A column 15 standing upright in the rear part of the drawing, a Z-axis slider 16 provided on the column 15 so as to be vertically movable in the Z-axis direction, and a Z-axis slider 16 in the X-axis direction (measurement direction). The measuring mechanism 20 is provided so as to be movable. Also, the Y-axis table 12 is
By moving a moving member (not shown) provided between the base 11 and the base 11 along the groove 19 formed on the base 11, the position can be manually adjusted in the X-axis direction.

The object to be measured 1 is placed on the turntable 14.
7 is placed directly, or is placed via a jig such as the M block 18 as shown in the figure. Then, by the turning table 14 and a jig such as the M block 18 used as necessary, the measurement object 17 is measured.
The supporting means 30 for supporting the

The measuring mechanism 20 is provided with an X-axis drive device 21 provided so as to be movable in the X-axis direction (measurement direction) with respect to the Z-axis slider 16, and is moved in the X-axis direction with respect to the X-axis drive device 21. The measuring arm 22 is freely attached, and a contact type detector 24 is attached to the end of the measuring arm 22 and has a stylus (contact) 23 at its tip. The measuring mechanism 20 moves the measuring arm 22 in the X-axis direction while keeping the state where the stylus 23 is in contact with the measuring object 17 placed on the swivel table 14, so that the stylus 23 moves toward the measuring object 17. The stylus 23 is displaced in the vertical direction according to the unevenness of the surface contour shape, the amount of swing of the stylus 23 at this time is detected, and the contour shape and surface roughness of the measurement object 17 can be measured from the amount of swing.

Further, the supporting means 3 is provided on the measuring machine main body 10A.
There is provided a driving means 40 for moving the 0 and the measuring mechanism 20 relative to each other (see FIG. 2). The drive means 40 is a turning mechanism 4 for turning the turning table 14 in the θ direction with respect to the R-axis table 13 about a turning axis along the Z-axis direction.
1, and the R-axis table 13 is swung in the R direction with respect to the Y-axis table 12 about the swing axis K along the Y-axis direction (that is, the R-axis table 13 is tilted with respect to the horizontal plane). An oscillating mechanism 42 and a linear motion mechanism 43 for linearly moving the Y-axis table 12 in the Y-axis direction with respect to the base 11 are provided. Therefore, the supporting means 30 can be swung with respect to the measuring mechanism 20 in the θ direction by the swiveling mechanism 41, can be swung in the R direction by the swinging mechanism 42, and can be linearly moved in the Y axis direction by the linear moving mechanism 43. There is.

In FIG. 2, the control means 50 controls the measuring mechanism 20 to perform the temporary measurement of the posture of the measuring object 17 in the temporarily placed state supported by the supporting means 30.
1, a calculation means 52 for calculating an error of the attitude of the measuring object 17 with respect to the reference attitude based on the measurement result by the temporary measurement means 51, and a control signal is sent to the drive means 40 based on the calculation result by the calculation means 52. An attitude control means 53 for operating the drive means 40 to correct the attitude of the measurement object 17 to the reference attitude, and a main measurement means 54 for performing the shape measurement of the measurement object 17 corrected to the reference attitude by the measurement mechanism 20. I have it. The control means 50 is composed of a microcomputer, a data processing device, and various programs incorporated therein.

The temporary measuring means 51 sends a command to the measuring mechanism 20 to move the detector 24 (stylus 23) in the X-axis direction by the X-axis driving device 21, and at the same time, the driving means 40.
By sending a command to the linear motion mechanism 43 to move the support means 30 in the Y-axis direction, at least two or more parallel scans are performed to obtain measured values in each scan.

The calculating means 52 calculates a ridge line direction calculating portion 52A for calculating the direction of the ridge line of the measuring object 17 from the vertices of the measurement values obtained by each scanning by the temporary measuring means 51, and the ridge line direction calculating portion 52A. An error calculation unit 5 for calculating an error in the ridgeline direction in the standard posture in the ridgeline direction
2B and.

In this embodiment, the shape of the measuring object 17 is measured as follows. First, the measurement target 17 is placed on the revolving table 14 by appropriately using a jig such as the M block 18, and the position of the Y-axis table 12 is adjusted so that the measurement target 17 is within the measurement range of the measurement mechanism 20. Make settings (temporary placement). Here, the shape of the measuring object 17 is a cylindrical shape, and the measurement is performed along the axial direction of the cylinder. In this temporarily placed state, the provisional measurement means 51 provisionally measures the posture of the measuring object 17. For example, as shown in FIG. 3, the detector 24 is moved along the X-axis direction on the basis of a command from the provisional measurement means 51 to perform three parallel scans (scan-).

At this time, the intervals between the scans may be the same or different. Also,
In the present embodiment, the movement between the scans in the Y-axis direction is performed by operating the linear motion mechanism 43 to move the measuring object 17 in the Y-axis direction, but the detector 24 is moved in the X-axis direction. Alternatively, a measuring mechanism that can move in the Y-axis direction may be configured and the detector 24 may be moved in the Y-axis direction. Furthermore, when performing the temporary measurement, the temporary measurement means 51 sets up and down the measurement mechanism 20 in the Z-axis direction (relative movement between the column 15 and the Z-axis slider 16) and sets the initial position of the stylus 23 of the measurement mechanism 20. It may be performed automatically or by a measurer.

Next, based on the measurement result by the temporary measuring means 51, the calculating means 52 calculates the error of the attitude of the measuring object 17 with respect to the reference attitude. In FIG. 4, the temporary measuring means 5
An example of the measurement result according to No. 1 is shown. In FIG. 4, the vertices T1, T2, T3 of the measured values by scanning
The line connecting the points (the one-dot chain line in the figure) indicates the ridge direction of the measuring object 17 in the temporarily placed state. Ridge direction calculation unit 52A
Are coordinates (X1, Y) of these vertices T1, T2, T3.
1, Z1), (X2, Y2, Z2), (X3, Y3, Z
According to 3), the direction of the ridgeline with respect to the (X, Y, Z) axes is calculated.

Then, the error calculation unit 52B calculates the direction of the ridge line calculated by the ridge line direction calculation unit 52A (the direction in the XY plane and the inclination with respect to the XY plane) and the measurement target 17 in the preset reference posture. Calculate the error from the direction of the ridge. Here, since the measurement is performed along the axial direction of the cylinder, the direction of the ridgeline of the measuring object 17 in the reference posture coincides with the X-axis direction which is the measuring direction.

After that, the attitude control means 53 operates the turning mechanism 41 of the driving means 40 to turn the turning table 14 in the θ direction based on the calculation result of the error calculating section 52B, and the XY of the ridge line of the measuring object 17 is measured. The direction in the plane is corrected, the swing mechanism 42 is operated to swing the R-axis table 13 to correct the inclination of the ridge line of the measuring object 17 with respect to the XY plane, and the linear motion mechanism 43 is operated to move the Y axis. The axis table 12 is linearly moved in the Y-axis direction to dispose the ridgeline of the measuring object 17 at a position directly below the stylus 23 of the measuring mechanism 20 or the like. In addition, the turning mechanism 41 by the attitude control means 53,
The order of operation of the swing mechanism 42 and the linear motion mechanism 43 is arbitrary as long as the posture of the measuring object 17 can be finally corrected to the reference posture.

Finally, the main measuring means 54 which has received the correction completion signal from the attitude control means 53 sends a command to the measuring mechanism 20 to move (scan) the detector 24 in the X-axis direction to set the reference attitude. The main measurement of the measuring object 17 is performed. At this time, in performing the main measurement, the vertical movement of the measurement mechanism 20 in the Z-axis direction and the setting of the initial position of the stylus 23 of the measurement mechanism 20 are performed in the same manner as in the temporary measurement by the temporary measurement means 51. May be performed automatically or by a measurer. However, since the posture of the measuring object 17 is accurately grasped by the provisional measurement by the provisional measurement means 51, it is preferable that the main measurement means 54 automatically perform the operation from the viewpoint of labor saving. Further, the instruction of the timing to start the main measurement may be a command from the measurer who confirms the completion of the correction, instead of the correction completion signal from the attitude control unit 53.

In the shape measurement of the cylindrical measurement object 17 as described above, the measurement may be performed along the radial direction of the cylinder (direction orthogonal to the axis). In this case, the direction of the ridgeline of the measuring object 17 in the reference posture is the direction (Y-axis direction) orthogonal to the X-axis direction which is the measurement direction. FIG. 5 shows an example of the posture of the measurement object 17 in the temporarily placed state in this case. In this case as well, as in the case of FIG. 3 described above, detection is performed based on a command from the temporary measurement means 51. The device 24 is moved in the X-axis direction to perform three parallel scans (scan-).

Thereafter, similarly, based on the measurement result by the temporary measuring means 51, the measuring means 17 is calculated by the calculating means 52.
The error of the posture of the drive unit 40 relative to the reference posture is calculated, and the posture control unit 53 causes the swing mechanism 41 and the swing mechanism 4 of the drive unit 40.
2, and the linear motion mechanism 43 is operated to correct the posture of the measurement target 17 to the reference posture, and finally, the main measurement of the measurement target 17 made to be the reference posture by the main measurement unit 54 is performed.

According to this embodiment, the following effects can be obtained. That is, provisional measurement means 51 for performing provisional measurement of the attitude of the measurement object 17, and calculation means 52 for calculating an error of the attitude of the measurement object 17 with respect to the reference attitude based on the measurement result by the provisional measurement means 51. Since the attitude control means 53 for automatically correcting the attitude of the measuring object 17 by operating the driving means 40 based on the calculation result by the means 52 is provided in the conventional method for correcting the attitude of the measuring object 17. Since it is not necessary for the measurer himself to adjust the fine movement knob of the shape measuring machine as described above, the burden on the measurer can be reduced, and the measurement target 17
Can be easily and accurately positioned, and the time required for preparation for measurement (measurement setup time) can be shortened.

Then, not manual adjustment by the measurer,
Temporary measurement means 51, calculation means 52, and attitude control means 5
Since the correction is automatically performed according to 3, the measurement object 17
Can be accurately positioned, and highly accurate measurement can be performed.

Further, since the measuring mechanism 20 used for the main measurement by the main measuring means 54 is also used for the temporary measurement by the temporary measuring means 51, it is not necessary to prepare another measuring mechanism for the temporary measuring. Since it does not exist, the structure of the measuring machine can be simplified, the cost can be reduced, and the size can be reduced.

Further, the control means 50 includes a temporary measuring means 51.
The three parallel scans are performed, and the ridgeline direction calculation unit 52A of the calculation unit 52 calculates the direction of the ridgeline of the measurement object 17 from the vertices T1 to T3 of the measurement values obtained in each scan. Since the configuration is adopted, the posture of the measurement object 17 in the temporarily placed state can be easily grasped in a short time.

The drive means 40 operated by the attitude control means 53 includes a swing mechanism 41 for swinging the support means 30 and a swing mechanism 42 for tilting and swinging the support means 30.
And a linear movement mechanism 43 that linearly moves the supporting means 30, so that the reference posture when performing the main measurement can be ensured even when the measurement target 17 is temporarily placed in any posture. Can be modified to

The present invention is not limited to the above-described embodiments, but includes other configurations that can achieve the object of the present invention, and the following modifications and the like are also included in the present invention. That is, in the above embodiment, the detector 24
Is a contact type detector having a configuration in which the stylus 23 is brought into contact with the measuring object 17 to perform shape measurement. However, the detector used for the main measurement or the detector used for the temporary measurement is a detector having such a configuration. The detector is not limited to the device, but may be, for example, an optical non-contact detector.

Further, in the above embodiment, the scanning by the provisional measuring means 51 was performed three in parallel, but the number of scanning is not limited to three, and any number of two or more may be used. All that is required is to be able to grasp the direction of the ridgeline.
Then, it is not necessary to perform parallel scanning, and for example, scanning may be performed so as to intersect.

Further, in the above embodiment, the measuring object 17
Has a cylindrical shape, but the shape is not limited to such a shape, and any measurement object having a ridge may be used. For example, as shown in FIG. 6, a prism-shaped measurement target 72 or the like may be used as long as it is supported by the support means 71 so that the ridge line can be grasped.

The ridgeline of the object to be measured does not have to be a straight line as in the above embodiment, but may be a curved line. For example, as shown in FIG. The shape may be measured. Then, in such a case, by increasing the number of scans by the provisional measurement unit 51, the posture of the measurement object can be corrected more accurately to a desired posture (reference posture).

Further, in the above embodiment, the temporary measuring means 51
Although the temporary measurement by the above was once, the temporary measurement may be performed a plurality of times and the respective measurement results may be averaged. At this time, the provisional measurement may be performed a plurality of times with the posture changed, for example, the revolving table 14 may be rotated 90 degrees to perform the provisional measurement in two postures. It is possible to perform more accurate provisional measurement with.

In the above embodiment, the driving means 40
Has a structure including a turning mechanism 41, a swinging mechanism 42, and a linear motion mechanism 43. However, the structure is not limited to such a structure. It suffices to be able to surely correct the reference posture when performing. For example, in addition to the turning mechanism 41, the swinging mechanism 42, and the linear motion mechanism 43, a driving unit may be provided which has a mechanism for moving the Y-axis table 12 in the X-axis direction in response to a control signal from the attitude control unit 53.

In the above embodiment, the driving means 40 is
Although the supporting means 30 is moved with respect to the base 11 by the control signal from the attitude control means 53 to correct the measuring object 17 to the reference attitude, the measuring mechanism 20 is moved with respect to the base 11. 2 (dotted line in FIG. 2), or the supporting means 30 and the measuring mechanism 20.
Both of them may be moved with respect to the base 11, and in short, the support means 30 and the measuring mechanism 20 are moved relative to each other by the control signal from the attitude control means 53 to bring the measuring object 17 to the reference attitude. It should have a configuration that can be modified.

Further, in the above embodiment, the measuring mechanism 20
Has a configuration in which the detector 24 is moved in the X-axis direction with respect to the base 11 by the X-axis drive device 21 to perform scanning, but the measurement target 17 (supporting means 30) is moved relative to the base 11 in the X-direction. The measurement mechanism may be configured to move by scanning in the axial direction, and in short, the detector 24 and the measurement target 17 may be used.
If and are configured to move relative to each other in the X-axis direction (measurement direction), scanning during measurement (main measurement or temporary measurement) can be performed.

[0042]

As described above, according to the present invention, in performing the main measurement, the posture of the object to be measured is automatically corrected by the temporary measuring means, the calculating means, and the posture controlling means. The burden on the measurer can be reduced, and even an unskilled person can easily and accurately position the measurement target, and the time required to prepare for measurement (measurement setup time)
There is an effect that can be shortened and highly accurate measurement can be performed.

Further, the provisional measuring means is configured to perform at least two or more parallel scans, and the computing means is configured to calculate the direction of the ridge line of the object to be measured by the apex of the measurement value obtained in each scan. Then, there is an effect that the posture of the measurement object in the temporarily placed state can be easily grasped in a short time.

Further, the shape measuring machine of the present invention is provided with a driving mechanism including a swivel mechanism for swiveling the support means, a swing mechanism for tilting and swinging the support means, and a linear motion mechanism for linearly moving the support means. By providing the above, there is an effect that it is possible to surely correct the measurement target object to the reference position when the main measurement is performed, regardless of the attitude of the measurement target.

[Brief description of drawings]

FIG. 1 is a perspective view showing a measuring device main body according to an embodiment of the present invention.

FIG. 2 is a configuration diagram showing a measuring machine body and control means of the above-described embodiment.

FIG. 3 is an explanatory view showing a scanning state of temporary measurement of the above-mentioned embodiment.

FIG. 4 is an explanatory view showing a measurement result of a temporary measurement of the above-mentioned embodiment.

FIG. 5 is an explanatory view showing a scanning state of another temporary measurement of the embodiment.

FIG. 6 is an explanatory diagram showing a modified example of the present invention.

FIG. 7 is an explanatory diagram showing another modification of the present invention.

[Explanation of symbols]

 10 Shape Measuring Machine 10A Measuring Machine Main Body 17 Measuring Object 24 Detector 30 Supporting Means 40 Driving Means 41 Swinging Means 42 Swinging Means 43 Direct Acting Means 50 Control Means 51 Temporary Measuring Means 52 Computing Means 53 Attitude Control Means 54 Main Measuring Means T1, T2, T3 Peak of measured value

Claims (3)

[Claims] 1. A support means for supporting an object to be measured having a ridge, a detector for measuring the shape of the object to be measured supported by the support means, and a relative movement of these supporting means and the detector. Driving means, temporary measuring means for temporarily measuring the posture of the measuring object supported by the supporting means, and calculating an error of the posture of the measuring object with respect to the reference posture based on the measurement result by the temporary measuring means. Calculation means, attitude control means for operating the drive means based on the calculation result by the calculation means to correct the attitude of the measurement object to the reference attitude, and the measurement object corrected to the reference attitude. A shape measuring machine, comprising: a main measuring unit that measures the shape by the detector. 2. The shape measuring machine according to claim 1, wherein the temporary measuring means performs at least two or more parallel scans, and the computing means uses the apex of the measurement values obtained in the respective scans. A shape measuring machine, characterized in that it calculates a direction of a ridgeline of the measurement object. 3. The shape measuring machine according to claim 1 or 2, wherein the driving means has a turning axis along a Z-axis direction orthogonal to an X-axis direction which is a measurement direction of the main measuring means. A swivel mechanism for swiveling the support means around a center, and a swing mechanism for swinging the support means around a swing axis along a Y-axis direction orthogonal to the X-axis direction and the Z-axis direction respectively. And a linear movement mechanism for linearly moving the supporting means in the Y-axis direction.