JP2000266534A - Surface profile measuring apparatus, inclination adjuster therefor and method for adjusting attitude of object - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a surface profile measuring apparatus in which the attitude of an object can be adjusted easily without sacrifice of operability and highly accurate measurement can be performed while reducing the size and cost, an inclination adjuster therefore, and an attitude adjuster of object in such a surface profile measuring apparatus. SOLUTION: Prior to starting the measurement of the properties of an object, a work attitude adjusting table 10 is moved manually by a surface profile measuring apparatus 1 according to a calculated attitude correction amount of the object thus adjusting the attitude of the object. Since a worker is simply required to operate each adjusting means until an indicated correction amount is reached, the operation is facilitated and the attitude can be adjusted with high accuracy without sacrifice of operability.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface texture measuring device for measuring the surface roughness, undulation, contour shape, etc. of an object to be measured, an inclination adjusting device for the surface texture measuring device, and a surface texture measurement. In particular, the present invention relates to a method of adjusting a posture of a measuring object in a machine, and particularly, a method of measuring a convex or concave work having a ridgeline such as a cylindrical shape or a conical shape, before performing the main measurement, relative to a measuring object and a detector measuring direction. Used to correct the posture including the inclination.

[0002]

2. Description of the Related Art Conventionally, there has been known a shape measuring instrument for measuring roughness or contour of a measuring object having a ridge line such as a cylindrical shape or a conical shape (Japanese Patent Laid-Open No. Hei 8-2915).
3). This shape measuring machine has a driving means for the measuring object with respect to the detector, and before performing the main measurement, automatically changes the posture of the measuring object placed on the table to the reference posture ( (Position at the time of performing the main measurement) to perform positioning such as centering and leveling of the measurement object.

[0003]

However, in the above-described fully automatic shape measuring machine, a table, for example, X
In order to move in the axial direction (measurement direction), the Y-axis direction (direction orthogonal to the measurement direction in the horizontal plane), and the Z-axis direction (direction orthogonal to the measurement direction in the vertical plane), a drive source for each axis is used. For example, a motor is required. as a result,
There is a problem that a space for mounting a plurality of motors is required and the device becomes large-sized, and as a result, the measuring machine becomes large. Further, since a plurality of motors are required, vibrations from the respective motors overlap to generate a large vibration, and as a result, high-precision measurement may be impaired. Then, in order to prevent the vibration, the rigidity of the receiving stand such as a table must be increased, which also leads to an increase in the size of the apparatus.
Furthermore, since a plurality of motors are required, there is a problem that the apparatus becomes expensive.

SUMMARY OF THE INVENTION It is an object of the present invention to make it possible to easily adjust the posture of an object to be measured without impairing operability, to reduce the size and to reduce the cost, and to perform highly accurate measurement. An object of the present invention is to provide a surface texture measuring device, an inclination adjusting device for the surface texture measuring device, and a method of adjusting a posture of an object to be measured in the surface texture measuring device.

[0005]

SUMMARY OF THE INVENTION The present invention provides a method for measuring the properties of an object to be measured with a surface texture measuring instrument.
The work posture adjustment table is manually moved in accordance with the calculated amount of posture correction of the measurement object to adjust the posture of the measurement object, thereby achieving the above object. Specifically, in the surface texture measuring device according to the first aspect of the present invention, the measuring object having the ridge line is placed on the work posture adjustment table, and the measuring direction (X-axis direction) It is movable in an axial direction and a direction orthogonal to the horizontal plane (Y-axis direction) and rotatable in the XY plane, and is further movable in a direction orthogonal to the X-axis direction in the vertical plane (Z
(Axial direction), in a surface texture measuring machine that performs surface texture measurement by a detector that is movable in the X-axis direction after adjusting the posture of the measurement object, A measurement control unit for performing adjustment, and a measurement unit controlled by the measurement control unit, wherein the measurement control unit is configured to measure a surface texture of the measurement target; X-axis coordinate value input means for inputting X-axis coordinate values at a measurement start point and a measurement end point when adjusting the posture of an object, and Y at a measurement start point and a measurement end point when adjusting the posture of the measurement object.
A Y-axis coordinate value input means for inputting an axis coordinate value, and a swivel inclination amount based on the X-axis coordinate value input by the X-axis coordinate value input means and the Y-axis coordinate value input by the Y-axis coordinate value input means. (A tilt amount in the XY plane with respect to the X axis) and a swivel correction amount calculating means for calculating a swivel correction amount, and a swivel correction amount display means for displaying the swivel correction amount calculated by the swivel correction amount calculating means. The measuring means comprises: a Y-axis adjusting means for manually moving the measuring object in the Y-axis direction in accordance with the swivel correction amount displayed on the swivel correcting amount display means to adjust a posture; and And a swivel adjusting means for adjusting the posture by manually rotating in the XY plane.

Here, the measuring object having a ridge line includes a cylindrical (cylindrical) or conical measuring object, a prismatic shape such as a kamaboko shape, a triangular prism, a pentagonal prism, a triangular pyramid, a pentagonal pyramid, and the like. It also includes a measurement object such as a pyramid shape. In addition, if it is placed on the work posture adjustment table so that the ridgeline can be grasped, it can be used as a square pillar, hexagonal prism, etc.
It may be a measurement object such as a pyramid shape such as a hexagonal pyramid (for example, see FIG. 9 described later). Further, the ridge line includes not only a straight line but also a curved line (for example, a case where the measurement target has a bent cylindrical shape, see FIG. 10 described later). It need not be continuous over the entire length of the object.

[0007] Adjusting the attitude means to match the basic attitude at the time of performing the main measurement, and it is not necessary to have one attitude for one object to be measured, and there may be a plurality of attitudes. For example, when the object to be measured has a cylindrical shape, a reference posture corresponding to the case where roughness measurement or contour measurement is performed along the axial direction of the cylinder, and a reference posture along a radial direction of the cylinder (a direction orthogonal to the axis). There is a reference posture corresponding to the case where roughness measurement or contour measurement is performed. Further, as the mounting means, a table on which the object to be measured is mounted, a V block table, a vise, a clip, or the like, or a combination thereof can be adopted.

The Y-axis adjusting means and the swivel adjusting means include a manual movement of the object to be measured in the Y-axis direction,
For example, it is preferable to use a micrometer head or the like having a knob, in which the correction amount is digitally displayed and a knob is provided, so that the rotation in the XY plane can be easily performed manually and high-precision adjustment is possible. However, another configuration may be used as long as a similar effect can be obtained.

In the present invention, the object to be measured having a ridge line is placed on the work posture adjustment table,
The position of the measurement object is adjusted by moving the work posture adjustment table and the detector relative to each other, corrected to the reference posture (posture at the time of the main measurement), and then the surface texture of the measurement object in the reference posture state is measured. I do. At this time, when adjusting the posture of the measurement object, the posture is temporarily measured at two points in the measurement direction of the measurement object placed on the work posture adjustment table, and based on the measurement result of the provisional measurement, An error of the posture of the measurement object with respect to the reference posture is calculated by the swivel correction amount calculating means, and further based on the numerical value displayed on the swivel correction amount display means, the operator manually sets the Y-axis adjusting means and the swivel adjusting means. By operating, the posture of the measuring object is corrected to the reference posture.

[0010] For this reason, at the time of posture adjustment, the operator, in accordance with the correction amount calculated from the measurement start point and the measurement end point of the measurement object placed on the work posture adjustment table,
By manipulating the Y-axis adjusting means and the swivel adjusting means, the posture of the measuring object in the XY plane can be adjusted. Since the operator only needs to operate each adjusting means until the displayed correction amount is reached, the operation is easy, and the posture can be adjusted with high accuracy without impairing the operability. In addition, since each adjusting means can be manually operated, a motor or the like as a driving means is not required. Therefore, a space for mounting the motor is not required, so that the structure can be simplified, the size can be reduced, and the cost of the device can be reduced, thereby achieving the above object. .

According to a second aspect of the present invention, there is provided the surface texture measuring device according to the first aspect, wherein the measurement control means determines a measurement start point and a measurement start point when adjusting the posture of the measurement object. Z-axis coordinate value input means for inputting the Z-axis coordinate value of the measurement object at the end point, and inclination in the XZ plane from the X-axis coordinate value and the Z-axis coordinate value input by the Z-axis coordinate value input means A tilt correction amount calculating unit that calculates the tilt amount and the tilt correction amount; and a tilt correction amount display unit that displays the tilt correction amount calculated by the tilt correction amount calculating unit. The object to be measured is Z according to the inclination correction amount calculated by the amount calculating means.
And a tilt adjusting means for adjusting the posture by manually moving the member in the axial direction.

Here, as the Z-axis adjusting means, for example, the correction amount is digitally displayed so that the movement of the object to be measured in the Z-axis direction is easy and the adjustment with high accuracy is possible. It is preferable to use a micrometer head or the like having a knob. However, another configuration may be used as long as a similar effect can be obtained.

According to the present invention, since the movement of the object to be measured in the Z-axis direction, that is, the inclination, can be adjusted, the posture in the XZ plane can be adjusted with higher accuracy.
As a result, highly accurate main measurement can be performed.

According to a third aspect of the present invention, there is provided the surface texture measuring device according to the first or second aspect, wherein the Y-axis adjusting means, the swivel adjusting means, and the tilt adjusting means are each a micrometer. It is characterized by using a head. Here, it is preferable that the micrometer head has a display unit for digitally displaying the correction amount. According to the present invention, since the posture can be adjusted by operating the micrometer head, the posture can be adjusted with high accuracy without impairing the operability.

According to a fourth aspect of the present invention, there is provided a method for adjusting a posture of a measuring object in a surface texture measuring device, wherein a measuring object having a ridge line is placed on a work posture adjusting table and a measuring direction (X-axis) is set. Direction) and a direction (Y-axis direction) orthogonal to the X-axis direction in a horizontal plane and rotatable in an XY plane, and a direction (Z-axis direction) orthogonal to the X-axis direction in a vertical plane. In the method for adjusting the attitude of a measurement object in a surface texture measuring device that performs surface texture measurement after adjusting the attitude of the measurement object with a detector that is swingable in the X-axis direction, In order to perform the adjustment, the position of the measurement object with respect to the detector at the measurement start point and the position of the measurement object with respect to the detector at the measurement end point are calculated from the position of the measurement object. That Display or printing the value with obtaining the energization correction amount, by operating the respective adjustment means of the work posture adjustment table according to the correction amount,
The posture of the measurement object is corrected.

According to the present invention, at the time of posture adjustment, the operator can determine Y according to the correction amount calculated from the measurement start point and the measurement end point of the measurement object placed on the work posture adjustment table. By operating the axis adjusting means and the swivel adjusting means, the posture of the object to be measured can be adjusted. The worker
Since it is only necessary to operate each adjusting means until the displayed correction amount is reached, the operation is easy, and the posture can be adjusted with high precision without impairing the operability. In addition, since each adjusting means can be manually operated, a motor or the like as a driving means is not required. Therefore, a space for mounting the motor is not required, so that the structure can be simplified, the size can be reduced, and the cost of the apparatus can be reduced.

According to a fifth aspect of the present invention, there is provided a method for adjusting a posture of a measuring object in a surface texture measuring device according to the fourth aspect of the present invention. The position of the measurement object with respect to the detector at the measurement start point and the position of the measurement object with respect to the detector at the measurement end point at the time of the adjustment of the posture are the maximum value of the Z axis with respect to the Y axis, or the Y axis. Is characterized by using the minimum value of the Z axis with respect to.

According to the present invention as described above, the present invention can be applied not only to a case where a measurement target is cylindrical but also to a case where a measurement target having a concave surface, for example, an inner surface of a cylinder is measured. Become.

According to a sixth aspect of the present invention, in the method for adjusting the posture of the object to be measured in the surface texture measuring device according to the fourth or fifth aspect, the method for adjusting the posture of the object to be measured in the surface texture measuring device according to the fourth or fifth aspect is provided. The adjustment of the attitude of the object is a rotation in the XY plane with respect to the detector. According to the present invention as described above, since the posture is adjusted by rotation in the XY plane, the measuring object can be moved along the reference measurement direction with a slight angle movement, and quick posture adjustment can be performed. Will be able to do it.

According to a seventh aspect of the present invention, there is provided a method for adjusting a posture of an object to be measured in a surface texture measuring device according to the fourth or fifth aspect. The adjustment of the attitude of the object is a swing in the XZ plane with respect to the detector. According to the present invention as described above, since the posture is adjusted by swinging in the XZ plane, the measuring object can be made to follow the reference plane by only slightly inclining at a slight angle. Will be able to do it.

The tilt adjusting device for a surface texture measuring device according to claim 8 of the present invention is movable in a measuring direction (X-axis direction) and detects a displacement of a surface of an object to be measured. Using a surface texture measuring device having means for moving the displacement detecting means in the measurement direction in order to collect a displacement signal from the displacement detecting means, and a movement trajectory of the displacement detecting means of the object to be measured. A tilt adjustment device for a surface texture measuring device that adjusts a relative angle with respect to a base line, comprising: a fulcrum at the time of measurement and adjustment; and an action point acting on the fulcrum, wherein the displacement detection is performed. Means for measuring the surface of the object to be measured, and determining the center locus of the measured value based on the displacement signal from the displacement detecting means, and making the center locus parallel to the base line of the moving means. The tilt adjustment An operation amount calculating means for obtaining an operation amount at an operation point with respect to the fulcrum of the step; an output means for displaying, printing or outputting the operation amount; and an inclination adjusting means for manually adjusting an inclination of an arbitrary specified amount. It is characterized by having.

Here, the displacement detecting means can be any of a contact type or a non-contact type displacement detector as long as it can measure the displacement (height) of the surface of the object to be measured and can output a signal. It may be provided. In addition, as for the inclination adjusting means, it is preferable to use a micrometer head including an absolute micrometer head in order to manually perform the operation with high accuracy. The structure may be used.

According to the present invention, the center locus of the measured value obtained by measuring the surface of the object to be measured is obtained by the operation amount calculating means, and the center locus is outputted by the output means. The inclination is adjusted by the inclination adjusting means in accordance with the operation amount, and is made parallel to the base line of the moving means. For this reason, the center locus M of the measured value S may be moved until it is parallel to the base line of the moving means, so that the so-called cosine (cos) error occurs because the tilt adjustment amount is given as an absolute amount. Can be prevented, and the inclination adjustment error can be eliminated, so that the posture of the object to be measured can be easily adjusted without impairing the operability. Further, since the tilt adjustment can be performed manually without using a motor, the size can be reduced and the cost can be reduced.

According to a ninth aspect of the present invention, in the tilt adjusting device for a surface texture measuring device according to the eighth aspect, the operation amount is controlled by the tilt adjusting means. The tilt line connecting the fulcrum and the action point is an operation amount from a tilt adjustment reference position parallel to the base line of the moving means.

According to the present invention, since it is sufficient to perform the operation with respect to the tilt adjustment reference position, so-called cosine error is less likely to occur, and the tilt can be adjusted by one operation, so that the operation is easy. Become.

According to a tenth aspect of the present invention, there is provided a tilt adjusting device for a surface texture measuring machine according to the eighth or ninth aspect, wherein the tilt adjusting means is a micrometer head. Is included.

Here, the micrometer head constituting the inclination adjusting means is a concept including an absolute micrometer head. According to the present invention, a low-cost adjustment mechanism can be provided. In particular, when an absolute micrometer head is used, high-precision tilt adjustment can be performed with a small number of tilt adjustment operations.

[0028] The tilt adjusting device for a surface texture measuring device according to claim 11 of the present invention is the tilt adjusting device for a surface texture measuring device according to any one of claims 8 to 10, wherein the operation amount is: It is characterized in that it includes the operation amount at any two points of the inclination adjusting means for performing three-point support.

According to the present invention, since the tilt adjusting means can be operated independently at two points, not only the tilt adjustment in the X-axis direction but also the Y-axis (the axis orthogonal to the X-axis direction in the horizontal plane) can be performed. ) The inclination of the direction can be adjusted. Therefore, the surface of the measurement object can be measured three-dimensionally, and the measurement range is widened.

According to a twelfth aspect of the present invention, in the tilt adjusting apparatus for a surface texture measuring device according to any one of the eighth to eleventh aspects, there is provided the tilt adjusting device for a surface texture measuring device. It is characterized in that one of the moving means is provided.

According to the present invention, the inclination of the moving means can be adjusted by mounting the moving means. Therefore, even when the object to be measured is large or when it is difficult to place the object on the mounting table due to its heavy weight, the inclination of the object to be measured can be easily adjusted.

[0032]

Embodiments of the present invention will be described below with reference to the drawings. As shown in FIG. 1, a measuring device main body 1 </ b> A, which is a measuring unit of the surface texture measuring device 1 according to the first embodiment of the present invention, includes a base 11. A work posture adjustment table 10 is provided on the base 11, and the work posture adjustment table 10 is provided movably in the Y-axis direction (the X-axis direction, that is, the front-back direction orthogonal to the measurement direction in the horizontal plane). A Y-axis table 12, an R-axis table 13 provided on the Y-axis table 12 so as to be swingable in an R-axis direction (a direction orthogonal to the X-axis direction in a vertical plane), and an R-axis table 13 A turning table 14 is provided so as to be able to turn in the θ direction. A column 15 is erected at the right side of the rear portion of the base 11 in the figure, and a Z-axis slider 16 is provided on the column 15 so as to be able to move up and down in the Z-axis direction. The Z-axis slider 16 is provided with a measurement mechanism 20 movably in the X-axis direction (measurement direction).

The Y-axis table 12 is a Y-axis table 1
By moving a moving member (not shown) provided between the base 2 and the base 11 along the groove 19 formed on the base 11, the position can be adjusted in the X-axis direction by manual operation. A Y-axis micrometer head (hereinafter, referred to as a digimatic head) 41 constituting Y-axis adjusting means is provided on a side surface on the near side in the drawing of the Y-axis table 12. When the operator turns the knob by hand, the Y-axis table 12 is moved in the Y-axis direction. That is, the digimatic head 41 is a manual driving unit for moving the Y-axis table 12.

On the side surface on the near side of the R-axis table 13, a swivel digimatic head 42 constituting swivel adjusting means and a tilting digimatic head 43 constituting tilt adjusting means are provided. Of these, the swivel digimatic head 42 is used to operate the knob of the digimatic head 42 by hand, and the measurement target placed on the R-axis table 13 in the XY plane is operated. The direction of the (work) 17 with respect to the X axis can be changed. In addition, the tilting digimatic head 43 is used by the operator.
By operating the knob by hand, the inclination of the work 17 placed on the R-axis table 13 with respect to the X axis can be changed in the XZ plane.

The Y-axis, swivel, and tilting digimatic heads 41, 42, and 43 have a structure shown in FIGS.
As shown in FIG. 7, display units 41A, 42A, 43A for digitally displaying the value of the correction amount, that is, the value of the operation amount, are provided. Therefore, if the respective work posture correction amounts are given, the posture can be corrected simply and precisely by operating the knobs of each head 41 and the like according to the digital display value.

Each of the digimatic heads 41, 4
2, 43, the minimum read value is, for example, about 0.001 mm. In addition, the head 4 for the dimatic for the Y axis
1, the rotation of the mounting means 30 in the XY plane by the swivel digimatic head 42 is, for example, ± 2 ° within a range of ± 12.5 mm. Within the range, the tilting of the mounting means 30 in the XZ plane by the tilting digimatic head 43 is possible within a range of, for example, ± 1.5 °. Therefore, the posture can be corrected very precisely.

The work 17 is placed directly on the swivel table 14 or via a jig such as a V block table 18 as shown in the figure.
The turning table 14 and a jig such as the V block table 18 used as needed constitute a placing means 30 for placing the work 17 thereon.
0, the Y-axis table 12 and the R-axis table 13 constitute the work posture adjustment table 10. Note that the V block table 18 may be a fixing jig.

The measuring mechanism 20 includes an X-axis driving device 21 movably provided in the X-axis direction with respect to the Z-axis slider 16.
A measuring arm 22 movably attached in the X-axis direction with respect to the X-axis driving device 21; a stylus (contact) 2 attached to an end of the measuring arm 22 and having a distal end
And a contact-type detector 24 having a contact sensor 3. Such a measurement mechanism 20 moves the stylus 23 in the X-axis direction while keeping the stylus 23 in contact with the work 17 placed on the turntable 14, thereby moving the stylus 23 to the object 17. Is displaced in the vertical direction in accordance with the unevenness of the surface contour shape of the stylus 23, the amount of swing of the stylus 23 at this time is detected, and the object 17
It is possible to measure the contour shape, surface roughness, etc.

As shown in FIG. 2, the surface texture measuring device 1
It comprises a main body 1A of the measuring machine and a measuring control means 50 for controlling the main body 1A of the measuring machine to adjust the posture of the work 17. The measurement control means 50 includes, in addition to the normal surface texture measurement control means 51, a work 1 for posture adjustment.
X coordinate value input means 52 for inputting an X coordinate value when measuring 7; Y coordinate value input means 53 for inputting a Y coordinate value;
Z coordinate value input means 54 for inputting the Z coordinate value, swivel correction amount calculating means 55 for calculating the swivel inclination amount and the correction amount from the X coordinate value and the Y coordinate value, and displaying and printing the calculated swivel correction amount Swivel correction amount display means 56,
It includes a tilt correction amount calculating means 57 for calculating the tilt inclination amount and the tilt correction amount from the X coordinate value and the Z coordinate value, and a tilt correction amount display means 58 for displaying and printing the correction amount. , A microcomputer and a data processing device, and various programs incorporated therein.

Next, as a preparation for measuring the roughness of the ridge line portion of the cylindrical work 17 using the work posture adjustment table 10, an operation procedure for adjusting the posture of the work 17 will be described with reference to FIGS. This will be described based on the schematic diagram and the flowchart of FIG. In the present embodiment, as shown in FIG.
Two points are input while shifting the vertices of the cylinder, the inclination of the cylinder is obtained from the coordinates of the vertices, and the inclination is corrected so as to match the reference posture.

As shown in FIG. 8, when the adjustment of the work posture is started in step 100, the "run-through mode" is selected in step 110 from the software of the controller of the surface texture measuring machine 1. In step 120, as shown in FIG. 4, the operator manually moves the detector 24 in the X-axis direction to the measurement start point A, and moves the stylus 23 to the work 1.
7 is positioned substantially at the center (Y-axis direction). Step 1
At 30, the operator turns the knob of the Y-axis digimatic head 41 by hand to move the Y-axis table 12 back and forth,
For example, the position where the Z coordinate value of the work 17 displayed on the CRT is the maximum is detected.

In step 140, the X coordinate value and the Y coordinate value of the position where the Z coordinate value becomes the maximum are input to the measurement control means 50 by key. At this time, the value displayed on the display section 41A of the Y-axis digimatic head 41 is input as the Y coordinate value. Further, the X coordinate value is automatically input to the measurement control means 50 side. In step 150, as shown in FIG.
The detector 24 is manually or automatically moved to the measurement end point B in the X-axis direction, and the stylus 23 is positioned substantially at the center of the work 17 (Y-axis direction).

At step 160, the operator turns the knob of the Y-axis digimatic head 41 by hand to move the Y-axis table 12 back and forth, for example, to maximize the Z coordinate value of the work 17 displayed on the CRT. Is detected. In step 170, the X coordinate value of the position where the Z axis has the maximum value and Y
The coordinate values are input to the measurement control means 50 by key input. On this occasion,
The Y coordinate value is displayed on the display section 41 of the Y-axis digital head 41.
Enter the value displayed in A. Further, the X coordinate value is automatically input to the measurement control means 50 side.

In step 180, the coordinate values (Xs, Ys, Xe, Ye) obtained in steps 140 and 170
Then, the swivel inclination angle δ is obtained by the formula of tan δ = (Ye−Ys) / (Xe−Xs), and further, the swivel correction amount ds is obtained. Swivel correction amount ds
Is obtained as follows. That is, as shown in FIG. 3, the swivel rotation fulcrum A and the operation point of the swivel digimatic head 42 (the position where the swivel is pushed and pulled).
When the distance of B is L and the inclination angle of the swivel is δ,
The operation amount ds of the swivel digimatic head is tan
From δ = (ds / L), ds = Ltanδ. The swivel operation amount ds thus obtained is displayed on, for example, a CRT or a liquid crystal display, or printed on a printer.

In step 190, as shown in FIG. 6, the operator turns the knob of the swivel digimatic head 42 to correct the inclination of the workpiece 17 in the XY plane according to the obtained swivel operation amount ds. . Step 200
Then, the operator manually or automatically moves the detector 24 again to the measurement start point A in the X-axis direction, and the stylus 23 is moved.
Is positioned substantially at the center (Y-axis direction) of the work.

In step 210, the operator turns the knob of the Y-axis digimatic head 41 by hand to move the Y-axis table 12 back and forth, for example, to maximize the Z coordinate value of the work 17 displayed on the CRT. Is detected. In step 220, the controller is switched to the normal measurement mode to start measuring the surface roughness and the like.
Then, the work posture adjustment is completed.

Here, the work is assumed to be a cylinder, but when measuring a work having a concave surface, for example, the inner surface of a cylinder,
In the above steps 130, 160 and 210, it is sufficient to detect the minimum value instead of the maximum value. If the work surface is not a simple curve, for example, the maximum value and the minimum value are used instead of the maximum value and the minimum value. The same purpose can be achieved by obtaining the minimum value.

In this flowchart, only the case where swivel adjustment is performed in the XY plane is shown. However, the correction amount of the tilting digimatic head 43 can be similarly obtained from the inclination of the work with respect to the X axis in the XZ plane. Can,
In that case, the Z coordinate values are also obtained and input in steps 140 and 170 at the same time, and in step 180,
The tilt amount and the tilt correction amount are obtained according to the same principle as that for obtaining the swivel tilt amount and the correction amount, and the values are displayed or printed. In step 190, the XZ of the work is operated by operating the tilt dimatic head. The inclination in the plane can be corrected.

Finally, the surface texture measurement control means 51 which has received the correction completion signal sends a command to the measurement mechanism 20 to move (scan) the detector 24 in the X-axis direction, and to set the measurement object in the reference posture. Perform 17 main measurements. At this time, when performing the main measurement, the elevation of the measurement mechanism 20 in the Z-axis direction and the setting of the initial position of the stylus 23 of the measurement mechanism 20 are performed as follows.
As in the case of the posture adjustment, the surface texture measurement control means 51 may automatically perform the adjustment, or the measurer may perform the adjustment. However, since the posture of the measurement target 17 is accurately grasped by the posture adjustment, it is preferable that the surface texture measurement control unit 51 automatically performs the measurement from the viewpoint of labor saving. Further, the instruction of the timing to start the main measurement may be a command from the measurer who has confirmed the completion of the correction, instead of the correction completion signal from the controller.

According to this embodiment, the following effects can be obtained. 1) At the time of the posture adjustment, the operator, for the Y-axis, according to the correction amount calculated from the measurement start point A and the measurement end point B of the work 17 placed on the V block table 18 of the work posture adjustment table 10, By turning the knobs of the swivel and tilting digimatic heads 41, 42, 43, the work 17
You can adjust your posture. Each of the digimatic heads 41 and the like has a display section 41A and the like, and the operator only needs to turn the knob section until the digitally displayed numerical value is reached, so that the operation is easy and the posture adjustment is performed quickly and highly. Can be done with precision.

2) When adjusting the posture, the knob of each of the digimatic heads 41, 42, and 43 is turned according to the correction amount calculated from the measurement start point A and the measurement end point B, as described above. Since the adjustment can be performed, a motor for driving the work posture adjustment table 10 and the like are not required. Therefore, a space for mounting the motor is not required, and the size of the apparatus can be reduced.

3) Since no motor is required, it is not necessary to use a rigid table in consideration of vibrations caused by the motor, so that the structure can be simplified and the size can be reduced. Thus, the cost of the apparatus can be reduced.

4) The work posture adjustment table 10 is a Y-axis digital head 4 for linearly moving the mounting means 30.
1. The configuration includes the swivel digital head 42 for rotating the mounting means 30 and the tilting dimatic head 43 for tilting and rocking the mounting means 30, so that the workpiece 17 can be held in any posture. Even if it is mounted, it can be surely corrected to the reference posture at the time of performing the main measurement.

Next, the second embodiment of the present invention will be described with reference to FIGS.
An embodiment will be described. The present embodiment is an inclination adjusting device 60 that uses the surface texture measuring device 1 of the first embodiment, measures the inclination of the work 17 by the measurement mechanism 20, and adjusts the work 17 to a correct posture based on the measured value. . That is,
The tilt adjusting device 60 according to the present embodiment includes the R-axis table 1
3 and the mounting means 30 including the tilting digimatic head 43. Instead of these, the base 11
Can be used by mounting on top.

As shown in FIG. 9, the tilt adjusting device 60
Are operation amount calculation means 63 for calculating an operation amount for tilt adjustment based on information from the displacement detection means 61 and the movement means 62, and output means 64 for displaying, printing or outputting the calculated operation amount. And tilt adjusting means 65 for performing tilt adjustment by giving a minute displacement to the point of action. The displacement detecting means 61 is configured by a contact type or non-contact type displacement detector, and outputs a height (displacement) signal of the surface of the measurement object. It corresponds to the detector 24. The moving means 62 drives the displacement detecting means 61 along a built-in reference plane (base line).
This corresponds to an X-axis driving device of the measuring mechanism 20 of the embodiment. As a result, the displacement detecting means 61 outputs a series of measured values by tracing the surface of the measurement object.
The operation amount calculating means 63 calculates the center locus of the measured value, calculates the amount of inclination between the center locus and the base line of the moving means 62, and further sets the inclination amount to zero to make the center locus and the base line parallel. To calculate the amount of operation necessary for this.

As shown in FIG. 10, the tilt adjusting device 60
Is mounted on the base 67, the upper surface of the base 67, and the receiving table 68, the supporting table 69, and the supporting table 69 which are attached at a predetermined distance from each other, and constitutes the tilt adjusting means 75 together with the supporting table 69. A micrometer head 70, and a mounting table 71 provided above the receiving table 68 and the support table 69 for mounting the work 17 thereon are provided.

At a position corresponding to the receiving table 68 on the lower surface of the mounting table 71, a substantially semi-spherical fulcrum member 72 for rotatably supporting the mounting table 71 is fixed. A substantially semi-spherical action point member 73 is fixed at a position corresponding to.

A receiving portion 68A having a V-shaped cross section or a conical cross section is formed on the upper surface of the receiving base 68 to receive the spherical portion of the fulcrum member 72. The receiving portion 68A is formed to have a depth such that the horizontal center line position of the spherical portion of the fulcrum member 72 is at a position equal to the upper surface height of the pedestal 68, but is not necessarily equal to the upper surface height. . When the fulcrum member 72 is supported by the receiving portion 68A, the center position of the sphere of the fulcrum member 72 becomes the fulcrum A.

The semicircular size of the working point member 73 is formed smaller than the fulcrum member 72, and when the tip of the working point member 73 is in contact with the flat end face of the micrometer head 70. The tip of the action point member 73 is the action point B. Then, the tip of the action point member 73 and the fulcrum A
Is the slope line C of the slope adjustment device 60. Note that the shape of the action point member 73 is preferably such that the amount of protrusion in the vertical direction is always constant irrespective of the rotation angle of the mounting table 71 from the viewpoint of preventing occurrence of errors.

When the surface of the work 17 is measured by the tilt adjusting device 60, first, the center locus M is calculated from the measured values.
Ask for. FIG. 11 shows an example in which the center trajectory M is obtained from the measured values collected by the displacement detector of the displacement detector 61. In the drawing, the X axis indicates the tracing direction of the displacement detector (that is, the moving unit 62). Is parallel to the base line N). Here, as an example, the center locus M is obtained by the least squares method.

When the surface of the work 17 is inclined and the center locus M and the base line N of the moving means 62 are not parallel, FIG.
1, the center locus M rises to the right, or
Although not shown, it falls to the right. On the other hand, displacement detection means 61
Has a certain restriction on the relationship between the resolution and the measurement range. Specifically, when the resolution is increased, the measurement range becomes narrow, and in order to widen the measurement range, it is necessary to lower the resolution. As described above, when the center locus M has an inclination, it is necessary to widen the measurement range, so that measurement with high resolution cannot be performed. In the present invention, the center locus M and the base line N are made parallel by the inclination adjusting device 60, so that the measurement can be performed at the maximum resolution that is optimal for the work 17.

The tilt adjusting means 75 shown in FIG. 10 is configured to apply a small linear displacement in the vertical direction with respect to the point of action B and rotate the mounting table 71 with respect to the fulcrum A. Depending on the initial tilt angle state of the mounting table 71 when performing, it is not possible to obtain an accurate tilt adjustment amount (operation amount). That is, as shown in FIG.
If the inclination line C is parallel to the base line N, the angle of the center locus M with respect to the base line N is θ1
In the case of, an accurate operation amount can be obtained from the calculation formula of Δh = r · sin θ1. Here, r indicates the distance from the fulcrum A of the mounting table 71 to the application point B.

However, if the inclination line C of the mounting table 71 is not parallel to the base line N but is inclined upward to the right from the base line N, and the operation of Δh is performed at an angular position away from the base line N, As shown in FIG. 12, the rotation angle is θ2. In the case of performing the operation of Δh from a horizontal position and the case of performing the operation of Δh at an angular position away from the base line N, the operation of Δh is performed from a position that is steep by the angle away from the base line N, The angle θ2 is steeper than the angle θ1 with respect to the inclined line C located away from the base line N. That is, since θ1 is smaller than θ1, θ1 does not coincide with θ2, and a relationship of θ1> θ2 is established. Therefore, the initial inclination angle of the mounting table 71 is
If it is not parallel, the relationship between the operation amount and the rotation angle cannot be uniquely determined, which causes a tilt adjustment error.

Therefore, as in the present embodiment, the action point B connecting the fulcrum A of the mounting table 71 and the action point B in the tilt adjustment device 60 is parallel to the base line N of the moving means 62.
Is set as the tilt adjustment reference position P and is determined as an operation amount from the tilt adjustment reference position P, such an error can be prevented from occurring. That is, by always giving the operation amount not as a relative amount but as an absolute amount from the tilt adjustment reference position P, it is possible to prevent occurrence of a tilt adjustment error.

FIG. 13A shows a case where the inclination of the measurement object measurement surface is measured in a state where the initial inclination of the inclination line C is lowered rightward by ht with respect to the inclination adjustment reference position P. Here, the inclination angle with respect to the base line N including the inclination adjustment reference position P is θt, and the inclination angle of the measurement object measurement surface with respect to the base line N including the inclination adjustment reference position P is θw. Should be rotated by θw, but the error occurs as described above, so that the relative minute displacement amount at the action point B for relatively rotating only θw cannot be uniquely determined. . In this case, as shown in FIG. 13B, by giving an operation amount hc having a rotation angle of θc (= θt + θw), the inclination (center trajectory) of the measurement object measurement surface is matched with the base line without error. Will be able to do it.

The amount of rotation of the mounting table 71 is given by the micrometer head 70 of the tilt adjusting means 75, and the amount of minute displacement (operation amount) at the point of action B determines the amount of rotation. Therefore, the work 17 on the mounting table 71
In order to adjust the surface inclination, the amount of inclination between the center locus M of the measured value and the base line N of the moving means 62 is determined, and the amount of operation required to make both M and N parallel is determined. By giving the corresponding minute displacement by the inclination adjusting means 75, the inclination of the surface of the work 17 can be made parallel to the base line N of the moving means 62. As a result, the displacement detecting means 61
Can measure the surface of the work 17 with the maximum resolution.

According to the second embodiment, the following effects can be obtained. 5) If the surface of the work 17 is measured and inclined, the micrometer head 70 may be turned and operated until the center locus M of the measured value S is parallel to the base line N of the moving means 62, and the inclination is adjusted. Since the amount is given as an absolute amount, the occurrence of a so-called cosine error can be prevented, and the inclination adjustment error can be eliminated. Therefore, the inclination adjustment can be completed with one operation, and the object to be measured can be measured. Can be easily adjusted without impairing the operability.

6) Since the tilt adjustment of the work 17 can be performed by manual operation such as turning the micrometer head 70 without using a motor, a motor or the like is not required, miniaturization can be achieved, and cost can be reduced. Can be cheap. 7) Since the tilt adjustment of the work 17 is performed by operating the micrometer head 70 of the tilt adjusting means 75, high-precision adjustment can be performed.

Next, a third embodiment of the present invention will be described with reference to FIG. This embodiment and the following fourth and fifth embodiments
In the embodiment, the same members and structures as those in the second embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted or simplified.

In the tilt adjusting device 80 of the present embodiment, the tilt adjusting means 85 is attached to the tip of an absolute micrometer head 81 mounted horizontally, and the tilt piece 82 is mounted on the support base 79. It is composed. That is, the inclined piece 82 is connected to the tip of the absolute micrometer head 81 so as to be movable in the direction of the arrow X, and only the surface in contact with the working point member 73 is inclined such that the micrometer head 81 side is lower. Is formed. Therefore, if the knob of the micrometer head 81 is rotated by manual operation, the inclined piece 82 moves back and forth, and the action point member 73 moves in the vertical direction by the action of the inclined surface of the inclined piece 82, and the mounting table 7 is moved.
In other words, the angle of the surface of the work 17 is adjusted.

According to the third embodiment, the following effects are obtained in addition to the effects similar to the above-mentioned items 5) to 7). 8) Since the absolute micrometer head 81 is particularly used as the tilt adjusting means, the operation from the reference position P becomes easy, and the tilt adjustment can be performed with high accuracy with a small number of tilt adjustment operations.

Next, a fourth embodiment of the present invention will be described with reference to FIG. The tilt adjusting device 90 of the present embodiment is a device capable of three-dimensional tilt adjustment. That is, FIG. 15 showing the inclination adjusting device 90 of the present embodiment has the same side shape as the right side surface of FIG. 10 showing the second embodiment, but the second embodiment has one micrometer head 70. In contrast to this, in the tilt adjusting device 90, the tilt adjusting means 95 is configured by using two micrometer heads 70 on the support base 69.

These two micrometer heads 7
0 and 70 can be operated independently, so
In addition to the tilt adjustment in the X-axis direction, the tilt adjustment in the Y-axis direction (axis orthogonal to both the X-axis and the Z-axis) can be performed, and the surface of the work 17 can be measured three-dimensionally. ing.

According to the fourth embodiment, the following effects are obtained in addition to the effects similar to the above-mentioned items 5) to 7). 9) Since the tilt adjusting means 90 can be independently operated at two points, not only the tilt adjustment in the X-axis direction but also the Y
The tilt adjustment in the axis direction (the axis orthogonal to the X-axis direction in the horizontal plane) can be performed. Therefore, the surface of the measurement object can be measured three-dimensionally, and the measurement range is widened.

Next, a fifth embodiment of the present invention will be described with reference to FIG. In the present embodiment, the work 1 is adjusted by adjusting the inclination of the mounting table 71 on which the work 17 is mounted by the tilt adjusting devices 60, 80, and 90 of the second to fourth embodiments.
7 is to adjust the inclination of the moving means 62, whereas the surface inclination of 7 is adjusted.

That is, in the present embodiment, the tilt adjusting device 60 of the second embodiment is used, and the moving means 62 is mounted on the mounting table 71. This moving means 62
The tilt is adjusted by the action of the fulcrum member 72 and the action point member 73 driven by the micrometer head 70. Further, the displacement detection means 61
The moving means 62 can move in the direction of arrow X in the figure.

Such an embodiment is suitable for use when the work 17 is large in size as shown in FIG. 16 or when it is impossible to place the work 17 on the mounting table 71 due to its weight. Therefore, the work 17 is arranged near the inclination adjusting device 60.

According to the fifth embodiment, the following effects are obtained in addition to the effects similar to the above 5) to 7). 10) The moving means 62 on the mounting table 71 of the tilt adjusting device 60
Is mounted, the inclination of the moving means 62 can be adjusted. Therefore, even when the work 17 is large in size or when it is difficult to place the work 17 on the mounting table 71 due to its heavy weight, the inclination of the work 17 can be easily adjusted.

The present invention is not limited to the above embodiments, but includes other configurations that can achieve the object of the present invention. For example, the following modifications are also included in the present invention. is there. That is, in the first embodiment,
The detector 24 is a contact-type detector configured to perform shape measurement by bringing the stylus 23 into contact with the measurement target 17. However, the detector used for the main measurement or the detector used for the provisional measurement is such a detector. It is not limited to the detector having the configuration, and may be, for example, an optical non-contact detector.

Further, in the first embodiment, the measuring object 17 has a cylindrical shape. However, the measuring object 17 is not limited to such a shape. In short, any measuring object having a ridgeline can be used. I just need. For example, as shown in FIG. 17, a prism-shaped measurement object 97 or the like may be used if it is placed on the placement means 96 so that the ridgeline can be grasped.

The ridge line of the object to be measured does not need to be a straight line as in the above embodiment, but may be a curved line.
For example, as shown in FIG. 18, the shape of a bent cylindrical work 98 may be measured. In such a case, by increasing the number of measurement points by the detector 24, the posture of the work 98 can be more accurately corrected to a desired posture (reference posture).

Further, in the first embodiment, the measuring mechanism 20 uses the X-axis driving device 21 to
Although the scanning mechanism is configured to move the workpiece 17 in the X-axis direction with respect to the base 11, the scanning mechanism may be configured to move the workpiece 17 (the mounting means 30) relative to the base 11 in the X-axis direction. If the configuration is such that the detector 24 and the measurement object 17 are relatively moved in the X-axis direction (measurement direction), it is possible to perform scanning during measurement (main measurement or measurement at the time of posture adjustment).

In the second, fourth, and fifth embodiments, the micrometer head 70 is used as the inclination adjusting means. However, instead of the micrometer head 70, as in the third embodiment, An absolute micrometer head 81 may be used. Alternatively, a micrometer head 70 may be used instead of the absolute micrometer head 81 of the third embodiment.

In the fifth embodiment, the mounting table 71
Although the moving unit 62 is provided above, the mounting table 71 may also be used as a reference surface member included in the moving unit 62.
Furthermore, in the fifth embodiment, the tilt adjusting device for installing the moving means 62 is the tilt adjusting device 6 of the second embodiment.
Although 0 is used, the present invention is not limited to this, and the tilt adjusting devices 80 and 90 of the third and fourth embodiments may be used.

[0085]

As described above, according to the surface texture measuring apparatus of the present invention and the method of adjusting the attitude of the object to be measured in the surface texture measuring instrument, the workpiece is placed on the work attitude adjusting table when the attitude is adjusted. In accordance with the correction amount calculated from the measurement start point and the measurement end point of the measured object,
By manipulating the Y-axis adjusting means and the swivel adjusting means, the posture of the measuring object in the XY plane can be adjusted. Since the operator only needs to operate each adjusting means until the displayed correction amount is reached, the operation is easy, and the posture can be adjusted with high accuracy without impairing the operability. In addition, since each adjusting means can be manually operated, a motor or the like as a driving means is not required. Therefore, there is an effect that a space for mounting the motor is not required, the structure can be simplified, the size can be reduced, and the cost of the device can be reduced.

Further, according to the inclination adjusting apparatus for a surface texture measuring device of the present invention, the center locus of the measured value obtained by measuring the surface of the object to be measured is obtained by the operation amount calculating means.
The inclination of the center trajectory is adjusted by the inclination adjusting means in accordance with the operation amount output by the output means, and is made parallel to the base line of the moving means. For this reason, the center locus M of the measured value S may be moved until it is parallel to the base line of the moving means, so that the so-called cosine (cos) error occurs because the tilt adjustment amount is given as an absolute amount. Can be prevented, and the inclination adjustment error can be eliminated, so that the posture of the object to be measured can be easily adjusted without impairing the operability. In addition, since the tilt adjustment can be performed manually without using a motor, there is an effect that the size can be reduced and the cost can be reduced.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a surface texture measuring device according to a first embodiment of the present invention.

FIG. 2 is a configuration diagram showing a surface texture measuring device of the embodiment.

FIG. 3 is a view showing the principle of attitude adjustment by the surface texture measuring device of the embodiment.

FIG. 4 is a view showing a procedure of posture adjustment by the surface texture measuring device of the embodiment.

FIG. 5 is a view showing a procedure of posture adjustment by the surface texture measuring device of the embodiment.

FIG. 6 is a diagram showing a procedure of posture adjustment by the surface texture measuring device of the embodiment.

FIG. 7 is a view showing a procedure of posture adjustment by the surface texture measuring device of the embodiment.

FIG. 8 is a flowchart showing a procedure of posture adjustment by the surface texture measuring device of the embodiment.

FIG. 9 is a block diagram showing an inclination adjusting device according to a second embodiment of the present invention.

FIG. 10 is a front view showing the tilt adjusting device of the embodiment.

FIG. 11 is a diagram showing a center trajectory obtained from measurement values collected by the displacement measuring device of the embodiment.

FIG. 12 is a diagram showing a relationship between a center locus and a base line in the embodiment.

FIG. 13 is a diagram illustrating a case where the inclination of the measurement object measurement surface of the embodiment is measured.

FIG. 14 is a front view showing a tilt adjusting device according to a third embodiment of the present invention.

FIG. 15 is a side view showing an inclination adjusting device according to a fourth embodiment of the present invention.

FIG. 16 is a front view showing a tilt adjusting device according to a fifth embodiment of the present invention.

FIG. 17 is an explanatory view showing a modified embodiment of the present invention.

FIG. 18 is an explanatory view showing another modification of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Surface texture measuring device 1A Measuring machine main body which is a measuring means 10 Work attitude adjustment table 17 Work which is a measuring object 20 Measuring mechanism 23 Stylus 24 Detector 30 Mounting means 41 Digimatic head for Y axis which is a Y axis adjusting means 42 Digimatic head for swivel axis as swivel adjusting means 43 Digimatic head for tilt as tilt adjusting means 50 Control means 52 X coordinate value input means 53 Y coordinate value input means 54 Z coordinate value input means 55 Swivel correction amount calculation means 56 Swivel correction amount display means 57 Inclination correction amount calculation means 58 Inclination correction amount display means 60, 80, 90 Inclination adjustment device 61 Displacement detection means 62 Moving means 63 Operation amount calculation means 64 Output means 65 Inclination adjustment means 70 Absolute micrometer head 71 mounting table 72 fulcrum member 73 work Point member 75, 85, 95 Tilt adjusting means A Support point B Point of action C Tilt line of tilt adjusting device M Center trajectory of measured value N Base line of moving means S Measured value P Point of action where tilt line is parallel to base line of moving means Position of

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Toshihiro Kanematsu 3-1-147 Tachibana-dori Higashi, Miyazaki-shi, Miyazaki Pref. Mitutoyo Co., Ltd. (72) Inventor Hiroyuki Hidaka 3-1-147 Tachibana-dori Higashi, Miyazaki City, Miyazaki Pref. Mitutoyo F-term (reference) 2F069 AA54 AA57 AA60 AA61 CC02 DD25 DD27 EE04 EE26 FF01 GG01 GG06 GG35 GG39 GG52 GG56 GG62 HH01 JJ08 JJ25 LL03 LL07 MM04 MM11 MM17 MM23 MM32 QQ05

Claims (12)

[Claims] An object having a ridgeline is placed on a work attitude adjustment table, and a measuring direction (X-axis direction) and a direction orthogonal to the X-axis direction in a horizontal plane (Y-axis direction) are set. And can be rotated in the XY plane,
Furthermore, a direction orthogonal to the X-axis direction in the vertical plane (Z-axis direction)
In a surface texture measuring device which is capable of swinging and measures the surface texture by a detector movable in the X-axis direction after adjusting the posture of the measurement object, the posture of the measurement object is adjusted. Control means for measuring, and measurement means controlled by the measurement control means, wherein the measurement control means measures surface texture of the measurement object, and a posture of the measurement object. X-axis coordinate value input means for inputting X-axis coordinate values at a measurement start point and a measurement end point at the time of adjustment, and Y-axis coordinate values at a measurement start point and a measurement end point at the time of adjusting the posture of the measurement object. A swivel inclination amount (with respect to the X-axis) based on a Y-axis coordinate value input unit, and an X-axis coordinate value input by the X-axis coordinate value input unit and a Y-axis coordinate value input by the Y-axis coordinate value input unit. An inclination amount in the XY plane) and a swivel correction amount calculating means for calculating a swivel correction amount; and a swivel correction amount display means for displaying the swivel correction amount calculated by the swivel correction amount calculating means. Measuring means, Y-axis adjusting means for manually moving the measurement object in the Y-axis direction in accordance with the swivel correction amount displayed on the swivel correction amount display means to adjust the posture, and measuring the measurement object in an XY plane. And a swivel adjustment means for adjusting the posture by manually rotating the surface texture measurement device. 2. The surface texture measuring device according to claim 1, wherein the measurement control unit inputs a Z-axis coordinate value of the measurement object at a measurement start point and a measurement end point when adjusting the posture of the measurement object. Z-axis coordinate value input means, and a tilt correction amount for calculating a tilt inclination amount and a tilt correction amount in an XZ plane from the X-axis coordinate value and the Z-axis coordinate value input by the Z-axis coordinate value input means. Calculating means, and a tilt correction amount display means for displaying the tilt correction amount calculated by the tilt correction amount calculating means, wherein the measuring means performs the measurement in accordance with the tilt correction amount calculated by the tilt correction amount calculating means. A surface texture measuring device comprising: a tilt adjusting means for adjusting a posture by manually moving an object in a Z-axis direction. 3. The surface texture measuring device according to claim 1, wherein the Y-axis adjustment unit, the swivel adjustment unit, and the inclination adjustment unit each use a micrometer head. . 4. A measuring object having a ridge line is placed on a work posture adjustment table, and a measuring direction (X-axis direction) and a direction orthogonal to the X-axis direction in a horizontal plane (Y-axis direction) are set. And can be rotated in the XY plane,
Furthermore, a direction orthogonal to the X-axis direction in the vertical plane (Z-axis direction)
In a method for adjusting the attitude of a measurement object in a surface texture measuring device that performs surface texture measurement after adjusting the attitude of the measurement object by a detector that is swingable in the X-axis direction, In order to perform the adjustment, the position of the measurement target relative to the detector at the measurement start point and the position of the measurement target relative to the detector at the measurement end point are used to calculate the orientation of the measurement target. The surface texture is obtained by calculating a posture correction amount, displaying or printing the value, and operating the adjusting means of the work posture adjustment table according to the correction amount to correct the posture of the measurement object. A method for adjusting the attitude of a measuring object in a measuring machine. 5. The method for adjusting the posture of a measurement object in a surface texture measuring device according to claim 4, wherein the position of the measurement object with respect to the detector at a measurement start point of the measurement object is adjusted when the posture of the measurement object is adjusted. The position of the measurement object at the measurement end point with respect to the detector is defined as a Z-axis maximum value with respect to the Y-axis or a Z-axis minimum value with respect to the Y-axis. Adjustment method. 6. The method for adjusting the posture of a measurement target in the surface texture measuring device according to claim 4 or 5, wherein the adjustment of the posture of the measurement target is rotation in an XY plane with respect to the detector. A method for adjusting the attitude of a measurement object in a surface texture measuring device, characterized by the following. 7. The method for adjusting the posture of a measurement target in the surface texture measuring device according to claim 4 or 5, wherein the adjustment of the posture of the measurement target is swinging in the XZ plane with respect to the detector. A method for adjusting the attitude of a measurement object in a surface texture measuring device. 8. A displacement detecting means which is movable in a measuring direction (X-axis direction) and measures a displacement of the surface of the object to be measured, and the displacement detecting means for collecting a displacement signal from the displacement detecting means. Using a surface texture measuring machine having a moving means for moving the means in the measurement direction, and for a surface texture measuring machine for adjusting a relative angle of the object to be measured with respect to a base line serving as a movement trajectory of the displacement detecting means. An inclination adjusting device, comprising: a fulcrum at the time of measurement and adjustment, and an action point acting on the fulcrum, wherein the displacement detecting means measures a surface of the object to be measured, and the displacement detecting means The amount of operation for obtaining the center locus of the measured value based on the displacement signal from the controller and calculating the amount of operation at the point of action of the tilt adjusting means with respect to the fulcrum necessary for making the center locus parallel to the base line of the moving means Calculation means, output means for displaying or printing or outputting data of the operation amount, and inclination adjustment means for manually adjusting the inclination of an arbitrary designated amount, the inclination adjustment for a surface texture measuring device, apparatus. 9. The inclination adjusting device for a surface texture measuring device according to claim 8, wherein the operation amount is such that an inclination line connecting a fulcrum and an operation point of the inclination adjustment means is parallel to a base line of the moving means. A tilt adjustment device for a surface texture measuring device, wherein the tilt adjustment amount is an operation amount from a tilt adjustment reference position. 10. The inclination adjusting device for a surface texture measuring device according to claim 8, wherein said inclination adjusting means includes a micrometer head. Adjustment device. 11. The tilt adjustment device for a surface texture measuring device according to claim 8, wherein the operation amount is an operation amount at any two points of the tilt adjustment means that supports three points. A tilt adjusting device for a surface texture measuring device, comprising: 12. The surface texture measuring device according to claim 8, wherein one of the object to be measured and the moving means is provided. Tilt adjustment device for measuring machine.