JP6726566B2 - Drive unit tilt adjusting method and drive unit tilt adjusting program - Google Patents

Description

The present invention relates to a drive unit inclination adjusting method and a drive unit inclination adjusting program for adjusting an angle of a drive unit provided with a tracing stylus and the like in a measuring instrument for measuring an object to be measured.

Conventionally, in a measuring device such as a roughness measuring device or a contour measuring device, a measuring element is moved along a measured surface of a workpiece to measure the measured surface. At this time, if the moving direction of the tracing stylus and the surface to be measured are not parallel, there is a problem that wear of the tracing stylus is accelerated, the surface to be measured is scratched, or the measurement accuracy is lowered.
Therefore, in the measuring instrument as described above, a so-called leveling operation is performed before the measurement is performed by making the moving direction of the tracing stylus by the drive unit parallel to the measured surface of the work. Such leveling methods include a method of adjusting the inclination of the work and a method of adjusting the inclination of the drive unit. In the former case, the tilt of the work is adjusted using, for example, a tilt stage or a triaxial adjustment table (see, for example, Patent Document 1). In the latter, for example, the drive unit is rotated and adjusted about an axis (α axis) intersecting the moving direction of the probe (see, for example, Patent Document 2).

JP-A-8-122055 JP-A-2007-198791

By the way, in the former leveling method, when the size of the work is relatively large, the load capacity of the tilt stage or the triaxial adjustment table may be exceeded, and the accuracy of the tilt adjustment may decrease or the tilt adjustment itself. May not be possible.
Also, in the latter leveling method, the size of the work is not affected by the weight, but when adjusting the angle of the drive unit by the drive force of an electric motor such as a CNC shape measuring instrument, the device configuration becomes complicated and the cost is reduced. There is a problem that it will be higher.

On the other hand, in the latter leveling method, there is a measuring instrument in which the measurer manually adjusts the angle of the drive unit. In this case, the size and weight of the work are not affected, and the configuration can be simplified. However, in a measuring instrument capable of manually adjusting the angle of the drive unit, the scale for adjusting the angle of the drive unit is generally in units of 1°, for example. Therefore, in the case where a minute adjustment of less than the unit of the scale provided (less than 1°) is required, it is very difficult to accurately perform the angle adjustment of the drive unit by relying on the scale. Further, in the manual angle adjustment of the drive unit, there is also a method of moving the drive unit left and right, reading the displacement of the detector, and finely adjusting the angle of the drive unit so as to reduce the change. Even in this case, complicated work is required and high skill is required.

It is an object of the present invention to provide a drive unit inclination adjusting method and a drive unit inclination adjusting program which have a simple structure and can easily adjust the angle of the drive unit.

The drive part inclination adjusting method of the present invention holds a probe that measures a surface to be measured of a work swingably, and is movable in a first direction and a second direction intersecting the first direction, and A drive unit rotatable about an adjustment axis that intersects the first direction and the second direction, a swing detection unit that detects a swing position of the tracing stylus, and an angle of the drive unit around the adjustment axis. A method for adjusting the inclination of the drive unit of a measuring instrument provided with an angle adjustment unit for changing the angle, the work angle acquisition step of acquiring the inclination angle of the surface to be measured, and the drive unit. Is calculated by a tip displacement amount calculating step of calculating a movement amount and a movement direction of the tip of the probe in the second direction when the tip is rotated by an inclination angle of the surface to be measured; Calculated in the first movement step of moving the drive section in the second direction so that the swing position becomes a predetermined reference position, and in the tip displacement amount calculation step of the drive section. A second movement step of moving the movement amount in the direction opposite to the movement direction, and the adjustment shaft of the drive unit so that the swing position detected by the swing detection unit becomes the reference position. And an angle adjusting step of adjusting a surrounding angle.

In the present invention, the inclination angle of the surface to be measured of the workpiece is acquired in the work angle acquisition step, and in the tip displacement amount calculation step, the contact angle of the probe when the drive unit is inclined by the same angle as the inclination angle of the surface to be measured. The moving direction and moving amount of the tip position are calculated.
On the other hand, in order to set the drive unit at the same inclination angle as the work surface to be measured, in addition to setting the drive unit at the same inclination angle as the measurement surface, the tip of the contact point touches the work surface to be measured. Must be in contact (positioned to allow measurement). Therefore, according to the present invention, further, in the first movement step, the swing position of the tracing stylus is detected by the swing detection unit, and the drive unit is moved in the second direction to detect the swing detected by the swing detection unit. The moving position is set to a predetermined reference position. In this first moving step, the tip of the tracing stylus comes into contact with the surface to be measured of the workpiece, and the position of the tracing stylus becomes the reference position.
Then, in the second movement step, the movement amount calculated in the tip displacement amount calculation step is moved in the direction opposite to the movement direction calculated in the tip displacement amount calculation step, and the swing adjustment is detected in the angle adjustment step. The tilt angle of the drive unit is adjusted by the angle adjustment unit so that the position of the tracing stylus detected by the unit becomes the reference position. As a result, the tip of the tracing stylus is brought into contact with the surface to be measured of the workpiece, and the inclination angle of the drive unit is the same as the inclination angle of the surface to be measured of the workpiece.

In the present invention as described above, when performing the angle adjustment of the drive unit, it is not necessary to refer to the angle scale indicating the tilt angle of the drive unit, and the angle adjustment based on the position of the probe detected by the detector can be performed. Will be done. The measurement value detected by the detector is a configuration for performing measurement (for example, roughness measurement or contour measurement) on the surface to be measured, and a highly accurate measurement result is output. Therefore, highly accurate angle adjustment can be performed by adjusting the angle of the drive unit based on the measurement result from such a detector.
In addition, the present invention does not require a drive motor or the like for adjusting the angle of the drive unit, can simplify the configuration, and can be applied to a conventionally used measuring device.

Further, in the driving portion inclination adjusting method of the present invention, the tip displacement amount calculating step includes a position of the driving portion in the first direction, a holding position where the tracing stylus is held in the driving portion, and a holding position to the tip of the tracing stylus. It is possible to calculate the amount of movement and the moving direction of the tip of the probe in the second direction based on the distance.
Here, the position of the drive unit in the first direction can be detected by a scale that measures the position of the drive unit in the first direction. Therefore, the position of the drive unit in the first direction with respect to the adjustment axis can be easily calculated from the value detected by the scale. The holding position is a position where the tracing stylus is attached in the drive unit, and is a fixed position (known value) in the drive unit. Therefore, the distance from the adjustment axis to the holding position can be easily calculated. The distance from the holding position to the tip of the tracing stylus is different depending on the type of the tracing stylus and the like, but is a value determined by the tracing stylus and can be measured in advance. Therefore, the distance from the adjustment axis to the tip of the probe can be easily calculated.
Then, if the tilt angle of the surface to be measured of the work is acquired by the work angle acquisition step as described above, from the tilt angle and the distance from the adjustment axis to the tip of the probe, a simple trigonometric function is used. It is possible to easily calculate the position (position with respect to the second direction) of the tip of the probe when the drive unit is tilted by the tilt angle of the surface to be measured.

In the drive part inclination adjusting method of the present invention, in the second moving step, when the opposite direction of the moving direction is a direction toward the work, the drive part is moved in the direction in which the tracing stylus moves away from the work. It is preferable to move the drive unit in the second direction after performing a retracting step of rotating the drive unit around.

When the moving direction calculated in the tip displacement amount calculating step is the side away from the work, the drive unit is moved to the work side in the second moving step. In this case, the stylus is pushed into the work, and the stylus and the work may be damaged.
On the other hand, in the present invention, in such a case, the retracting step is performed to change the inclination angle of the drive unit so that the tracing stylus moves in the direction away from the work. The angle to be changed may be an angle at which the tracing stylus is not pushed into the work (the tracing stylus does not come into contact with the work) when the drive unit is moved in the second movement step. As a result, it is possible to suppress the collision between the probe and the workpiece in the second moving step.

In the drive section inclination adjusting method of the present invention, it is preferable that the retracting step rotates the drive section around the adjustment axis by an angle equal to or larger than the inclination angle of the measured surface acquired in the work angle acquiring step.
According to the present invention, in the retracting step, the drive unit is rotated about the adjustment axis by the inclination angle of the surface to be measured or more, and therefore when the drive unit is moved to the work side after the retracting step, the probe is pressed against the work. Can be avoided, and damage to the probe and the work can be suppressed more reliably.

The drive part inclination adjusting method of the present invention holds a probe that measures a surface to be measured of a work swingably, and is movable in a first direction and a second direction intersecting the first direction, and A drive unit rotatable about an adjustment axis that intersects the first direction and the second direction, a swing detection unit that detects a swing position of the tracing stylus, and an angle of the drive unit around the adjustment axis. An angle adjusting section for changing the inclination of the driving section of a measuring instrument including: a work angle obtaining step of obtaining an inclination angle of the surface to be measured; A tip displacement amount calculation step of calculating a movement amount and a movement direction of the tip of the probe in the second direction when the tip is rotated by an inclination angle of the surface to be measured; A first informing step for informing that the drive section is moved in the second direction so that the swing position becomes a predetermined reference position; and the drive section after the first informing step. A second notification step of notifying that the moving amount is to be moved in a direction opposite to the moving direction calculated in the tip displacement amount calculating step, and to the rocking detection unit after the second notifying step. A third notification step of notifying that the angle of the drive unit around the adjustment axis is adjusted so that the swing position detected by the above-mentioned reference position becomes the reference position.

In the present invention, the inclination angle of the surface to be measured of the workpiece is acquired in the work angle acquisition step, and in the tip displacement amount calculation step, the contact angle of the probe when the drive unit is inclined by the same angle as the inclination angle of the surface to be measured. The moving direction and moving amount of the tip position are calculated.
Then, the first notification step notifies that the drive unit is moved in the second direction so that the position of the tracing stylus detected by the swing detection unit becomes the reference position. Thereby, the operator can easily move the drive unit to a position where the tip of the probe contacts the surface to be measured of the work and the position of the probe becomes the reference position according to the notification content.
Then, the second notification step notifies that the movement amount calculated in the tip displacement amount calculation step is to be moved in the direction opposite to the movement direction calculated in the tip displacement amount calculation step. Thereby, the worker can easily move the drive unit in the second direction by the required amount according to the content of the notification.
Then, the third notification step notifies that the angle adjustment unit adjusts the inclination angle of the drive unit so that the position of the tracing stylus detected by the swing detection unit becomes the reference position. Thereby, the operator can easily adjust the angle of the drive unit according to the content of the notification.
As described above, if the worker performs the work according to the work instruction notified in the first notification step to the third notification step, the angle of the drive unit is adjusted to the inclination angle of the measured surface of the work, In addition, the tip of the probe can be moved to a position suitable for measuring the surface to be measured. Therefore, it is possible to easily adjust the angle of the drive unit without requiring highly skilled technology.

The drive part inclination adjusting program of the present invention holds a probe that measures a surface to be measured of a work swingably, and is movable in a first direction and a second direction intersecting the first direction, and A drive unit rotatable about an adjustment axis that intersects the first direction and the second direction, a swing detection unit that detects a swing position of the tracing stylus, and an angle of the drive unit around the adjustment axis. And a drive unit inclination adjusting program that is read and executed by a computer that controls a measuring instrument including an angle adjusting unit that changes the drive angle, the computer performing the drive unit inclination adjusting method as described above. Is characterized by.

According to the present invention, the computer reads and executes the drive unit inclination adjusting program, so that the work angle acquiring step, the tip displacement amount calculating step, the first moving step (first notifying step), and the second moving step (first Second notification step) and angle adjustment step (third notification step). As a result, even in the existing measuring device that has been conventionally used, by causing the computer controlling the measuring device to read and execute the drive section tilt adjusting program of the present invention, the present invention as described above can be easily performed. It is possible to carry out the method for adjusting the inclination of the driving section.

INDUSTRIAL APPLICABILITY The present invention can easily match the angle of the drive unit of the measuring device with the inclination angle of the measured surface of the work with a simple configuration.

The figure which shows schematic structure of the surface texture measuring machine which concerns on 1st embodiment of this invention. The block diagram which shows the outline of the system configuration of the surface texture measuring machine of 1st embodiment. The flowchart which shows the drive part inclination adjustment method by the surface texture measuring machine of 1st embodiment. The figure which shows the measurement result with respect to a to-be-measured surface at the time of performing a preliminary measurement in 1st embodiment, and the inclination line along the to-be-measured surface calculated from the said measurement result. In the first embodiment, a diagram showing the positions of the X slider, the arm holder, and the stylus showing the state immediately after the process of step S8 is completed. The figure which shows the state which retracted the stylus from the workpiece|work by step S10 in 1st embodiment. The schematic diagram showing the processing performed by Step S12 in a first embodiment.

[First embodiment]
Hereinafter, a first embodiment of the present invention will be described with reference to the drawings.
[Configuration of this embodiment]
FIG. 1 shows a surface texture measuring machine 1 according to this embodiment.
The surface texture measuring machine 1 is configured to include a device body 10 which is a measuring instrument of the present invention, a control device 20 which is a computer for controlling the measuring instrument, and a display device 30.

[Device body configuration]
The apparatus main body 10 is configured to include a base 11, a table 12, a detector 13, and a moving mechanism 14. Further, a controller (not shown) is provided in the apparatus body 10, and the operator operates the controller to control the moving mechanism 14 to move the detector 13 to a desired position or to change the surface texture. It is possible to instruct the start and end of the measurement. Note that the controller 20 may not be provided, and the control device 20 may control the drive of the detector 13 and the moving mechanism 14.

The base 11 is a flat pedestal, and supports the table 12 and the moving mechanism 14.
The table 12 is placed on the base 11, and the work W is placed (installed) on the upper surface. The work W may be directly installed on the table 12, or may be installed in a state of being fixed by a fixing jig or the like, for example.

The detector 13 contacts the work W and detects the surface texture of the work W. Specifically, the detector 13 is configured to include a detector body 131, an arm holder 132, and a stylus 133.
The detector body 131 is supported by an X slider 145 (described later) of the moving mechanism 14. Further, an arm holder 132 extending in the X1 direction is detachably connected to the detector main body 131, and a stylus 133 as a tracing stylus is connected to a tip end portion (holding position 132A) of the arm holder 132. The stylus 133 has, for example, a shaft portion along the longitudinal direction of the arm holder 132 and a contactor protruding in a direction away from the shaft portion, and the tip of the contactor (hereinafter, the tip of the stylus 133 may be referred to). Can contact the work W. The stylus 133 is attachable to and detachable from the arm holder 132, and can be appropriately changed depending on the work W, the measurement method, the measurement type, and the like.

The detector body 131 also has a swing mechanism (not shown) that swings the arm holder 132 and the stylus 133, and the stylus 133 is swung by the swing mechanism. Specifically, the swing mechanism vibrates the stylus 133 along the protruding direction of the contact (Z1 direction). The detector main body 131 includes a detection sensor 131A (corresponding to the swing detection unit of the present invention) that detects the amount of displacement of the stylus 133 in the Z1 direction. The detection sensor 131A electrically detects minute vibrations of the stylus 133, and can realize a detection resolution of 0.0001 μm to 0.01 μm, for example. The detection value (displacement amount of the stylus 133) detected by the detection sensor 131A is transmitted to the control device 20. It should be noted that the detection result may be displayed on a display display provided on the drive main body 144, which will be described later.

The moving mechanism 14 includes a column 141, a Z slider 142, a Z driving mechanism 143, a driving main body 144, an X slider 145, an X driving mechanism 146, and a driving portion tilting mechanism 147 (angle adjusting portion). It is configured to include.
The column 141 is a columnar member that is erected on the upper surface of the base 11 and extends along the Z2 axis (the axis along the Z2 direction that is the second direction of the present invention).
The Z slider 142 is supported so as to be movable in the Z2 direction with respect to the column 141, and the drive body 144 is fixed to the Z slider 142.
The Z drive mechanism 143 is a mechanism that moves the Z slider 142 in the Z2 direction. Although not shown, the Z drive mechanism 143 can be configured by, for example, a Z axis drive motor and a Z axis rotation transmission mechanism that transmits the rotation of the Z axis drive motor. Further, as shown in FIG. 1, the Z drive mechanism 143 is provided with a Z adjustment knob 143A, and by manually adjusting the Z adjustment knob 143A, it is possible to adjust the position of the Z slider 142 in the Z2 direction. Become.
Further, the Z drive mechanism 143 is provided with a Z scale 142A (see FIG. 2) that detects the position of the Z slider 142 in the Z2 direction. The Z scale 142A outputs the detected position information in the Z2 direction to the control device 20. The position information in the Z2 direction detected by the Z scale 142A may be displayed on, for example, the display display provided on the drive body 144.

The drive body 144 is provided to the Z slider 142 via a drive tilt mechanism 147. That is, the drive unit tilting mechanism 147 is provided so as to be rotatable about the α axis 147A (corresponding to the adjustment axis of the present invention) intersecting (orthogonal in the present embodiment) the X1 axis and the Z2 axis.
The drive section tilting mechanism 147 rotates the drive body section 144 with respect to the Z slider 142 about the α axis 147A by adjusting the α axis adjustment knob 148 provided on the X slider 145, for example.
Further, the drive unit tilting mechanism 147 may be provided with an α-axis scale 147B that indicates the tilt angle of the drive body 144 with respect to the column 141, that is, the tilt angle of the X1 axis with respect to the Z2 axis.

The X slider 145 is provided on the drive body 144 via a guide rail (not shown).
The X drive mechanism 146 is a mechanism that moves the X slider 145 along the X1 axis (the axis along the X1 direction corresponding to the first direction of the present invention). The X drive mechanism 146 includes a feed mechanism (not shown) that moves the X slider 145 in the X1 direction along the guide rail. This feed mechanism can be configured by, for example, an X-axis drive motor and an X-axis rotation transmission mechanism that transmits the rotation of the X-axis drive motor to move the X slider 145. As the X drive mechanism 146, an X adjustment knob 146B is provided as shown in FIG. 1, and the position of the X slider 145 can be adjusted by manually adjusting the X adjustment knob 146B.
Further, the X drive mechanism 146 is provided with an X scale 146A (see FIG. 2) that detects the position of the X slider 145 in the X direction.

Here, the X slider 145 corresponds to the drive unit in the present invention, and is moved by the X drive mechanism 146 in the X1 direction. Further, when the Z slider 142 is moved in the Z2 direction by the Z drive mechanism 143, the X slider 145 connected to the Z slider 142 via the drive main body 144 is also moved in the Z2 direction. Further, the drive body tilting mechanism 147 rotates the drive body section 144 about the α-axis 147A, so that the X slider 145 connected to the drive body section 144 also rotates about the α-axis 147A.
Since the detector 13 is supported by the X slider 145 as described above, the stylus 133 held by the detector 13 can also move in the X1 direction and the Z2 direction together with the X slider 145. It becomes rotatable around the shaft 147A. Therefore, when the drive main body 144 is rotated by the drive tilt mechanism 147, the drive main body 144 is moved in the X2 direction (the direction along the upper surface of the table 12 and the extending direction of the arm holder 132 in a plan view seen from the Z2 direction). On the other hand, the X1 direction is inclined.

[Configuration of control device]
FIG. 2 is a block diagram showing an outline of a system configuration of the surface texture measuring machine 1.
The control device 20 can be configured by a computer such as a personal computer. The control device 20 includes a storage unit 21, an operation unit 22, and a control unit 23.

The storage unit 21 stores various programs and various data for controlling the drive of the surface texture measuring machine 1.
As the various programs stored in the storage unit 21, a drive unit inclination adjusting program of the present invention, a part program including a measurement procedure when performing the measurement process for the work W, and the like are stored.
In addition, as various data, the dimensions of the arm holder 132 and the stylus 133 in the apparatus main body 10 (or the dimensions from the holding position 132A to the tip of the stylus 133) and the holding position 132A in the drive main body 144 are recorded. .. As the position of the holding position 132A in the drive main body 144, for example, a dimension from a predetermined reference position preset in the drive main body 144 to the holding position 132A may be recorded.

The operation unit 22 includes, for example, a mouse, a keyboard, a joystick, etc., and outputs an operation signal to the control unit 23 when operated by an operator.
The control unit 23 is configured by, for example, an arithmetic circuit such as a CPU (Central Processing Unit), a storage circuit, and the like, and by reading and executing various programs (driving unit inclination adjustment program) stored in the storage unit 21, As shown in FIG. 2, it functions as a work angle acquisition unit 231, a tip displacement amount calculation unit 232, a notification control unit 233, a mode switching unit 234, and a measurement control unit 235.

The work angle acquisition unit 231 acquires the tilt angle (work tilt angle) of the measured surface of the work W. As a method of obtaining the work inclination angle, for example, a value set and input by operating the operation unit 22 may be read, and the work inclination is obtained by controlling the apparatus body 10 to perform preliminary measurement of the surface to be measured. The corner may be calculated.

The tip displacement amount calculation unit 232 detects the detected values from the Z scale 142A and the X scale 146A (position coordinates in the coordinate system of the device body 10 of the drive body unit 144), the dimension from the holding position 132A to the tip of the stylus 133, The dimension from the α-axis 147A to the tip of the stylus 133 is calculated based on the detection value of the detection sensor 131A. Further, the tip displacement amount calculation unit 232 rotates the drive body 144 around the α axis by the same angle as the workpiece inclination angle based on the workpiece inclination angle and the distance from the α axis 147A to the tip of the stylus 133. When the X1 axis and the measured surface are made parallel to each other, the movement amount and the movement direction of the tip of the stylus 133 along the Z2 axis are calculated.

The notification control unit 233 causes the display device 30 to display the procedure of the inclination adjusting method of the drive unit (X slider 145) to notify it. The procedure of the tilt adjusting method may be notified by voice or the like. Details of the notification control by the notification control unit 233 will be described later.
The mode switching unit 234 switches the operation mode of the device body 10. Specifically, the mode switching unit 234 sets the measurement mode in which the measurement process is performed on the surface to be measured of the workpiece W and the moving direction (X1 direction) of the X slider 145 to the surface to be measured based on, for example, the operation of the measurer. Switch to the leveling mode, etc., which matches the inclination direction of.
The measurement control unit 235 controls the Z drive mechanism 143 and the X drive mechanism 146 of the apparatus body 10 to move the Z slider 142 and the X slider 145 and drive the detector 13 according to various programs such as a part program. The stylus 133 is swung to obtain the detection value from the detection sensor 131A.

[How to adjust the inclination of the drive unit]
Next, the method for adjusting the inclination of the drive unit in this embodiment will be described.
In the measurement of the surface to be measured of the work W using the surface texture measuring device 1 of the present embodiment, the stylus constituted by the arm holder 132 and the stylus 133 is attached to the apparatus body 10, and the tip of the stylus 133 is attached to the surface to be measured. And the X slider 145 is moved along the tilt angle of the surface to be measured (work tilt angle). Therefore, it is necessary to make the moving direction (X1 direction) of the X slider 145 driven by the X driving mechanism 146 parallel to the surface to be measured. Therefore, in the present embodiment, the drive section tilting mechanism 147 is adjusted to adjust the tilt angle of the drive body section 144 with respect to the column 141 (Z2 axis), and the X slider 145 set in the drive body section 144 is moved. The direction (X1 direction) is adjusted to the work inclination angle.

At this time, it is necessary to have a mechanism for automatically adjusting the inclination angle in the X1 direction. In the existing surface texture measuring machine 1, it is necessary to manually rotate the drive main body 144 for adjustment. Usually, in such a surface texture measuring machine 1, the measurer adjusts the angle while referring to the α-axis scale 147B. However, only the adjustment can be made in units of scale (for example, in units of 1°) formed on the α-axis scale 147B, and sufficient accuracy cannot be obtained when the angle is adjusted with accuracy less than that scale unit. There is also a method of moving the position of the X slider 145 in the X1 direction while referring to the detection value of the detection sensor 131A and adjusting the tilt angle so that the change in the detection value is minimized. Highly skilled technology is required.
On the other hand, in the present embodiment, even in the simple surface texture measuring machine 1 that does not have the automatic angle adjustment function, it is possible to easily change the movement direction (X1 direction) of the X slider 145 without requiring high skill. It is possible to adjust the tilt angle. Hereinafter, the method will be described in detail.

FIG. 3 is a flowchart of the drive part inclination adjusting method of the present embodiment.
In the present embodiment, the following description will be made on the assumption that the inclination angle of the drive main body 144 about the α-axis 147A is approximately 0° in the initial state.
In the drive section inclination adjusting method of the present embodiment, when the input signal for performing the leveling process is input in the control device 20 by the operation of the operation section 22 by the measurer, the mode switching section 234 causes the operation mode to be changed. Is set to the leveling mode (step S1).

When the operation mode is switched to the leveling mode by the mode switching unit 234, the control unit 23 reads and executes the drive unit tilt adjustment program stored in the storage unit 21. As a result, the work angle acquisition unit 231 acquires the tilt angle (work tilt angle θ) of the measured surface of the work W (step S2; work angle acquisition step).

In step S2, as described above, the work angle acquisition unit 231 may use the measurement result of the preliminary measurement for the work W or the value set and input by the operation of the operation unit 22.
Here, an example in which preliminary measurement is performed on the surface to be measured of the work W will be described.
FIG. 4 is a diagram showing a measurement result for the surface to be measured when performing the preliminary measurement, and an inclined line along the surface to be measured calculated from the measurement result.
In this preliminary measurement, the moving mechanism 14 is driven to a position where the tip of the stylus 133 contacts the surface to be measured of the work W. In the preliminary measurement, since the measurement is performed on a part of the surface to be measured, in this part, the tip of the stylus 133 is within the swingable angle range of the arm holder 132 and the stylus 133. Abutting against. Therefore, it is possible to perform the preliminary measurement while keeping the drive body 144 horizontal (approximately 0°).

The operator operates the α-axis adjusting knob 148 to change the inclination angle of the drive body 144 (X slider 145) so that the X1 axis, which is the moving direction of the stylus 133, is substantially along the measured surface. May be In this case, it is possible to suppress the inconvenience that the stylus 133 contacts the surface to be measured outside the swingable angular range of the arm holder 132 and the stylus 133 during the preliminary measurement, and it is possible to suppress damage to the stylus 133 and the work W. Even in this case, since the stylus 133 may be brought into contact with a part of the surface to be measured, it is not necessary to strictly match the inclination angle with the inclination angle of the surface to be measured at this stage.

In the preliminary measurement as described above, when the stylus 133 is moved along the X1 axis to measure the shape of the surface to be measured, the detection result shown by the solid line in FIG. 4 is obtained.
The work angle acquisition unit 231 uses the coordinates of each point of the obtained measurement result to calculate a linear approximation formula as indicated by the broken line in FIG. In the calculation of the linear approximation formula, for example, the least square method or the like can be used. Further, the work angle acquisition unit 231 obtains the work inclination angle θ of the measured surface from the calculated linear approximation formula (a linear formula along the measured surface).
In the above example, the work inclination angle θ is calculated based on preliminary measurement in which the stylus 133 is moved along a part of the surface to be measured for measurement, but other methods may be used. For example, the stylus is brought into contact with two or more measurement points on the surface to be measured, and these measurement points are determined from the measurement results (measurement values of the Z scale 142A, the X scale 146A, and the detection sensor 131A) at each measurement point. The work inclination angle θ may be obtained by calculating a straight line expression (or a plane expression of the inclined surface) that passes.
Further, as described above, when the work inclination angle of the surface to be measured is known in advance, the operator may set and input the work inclination angle by operating the operation unit 22.

After the above step S2, the notification control unit 233 notifies the fact that the tip of the stylus 133 is brought into contact with the measured surface of the work W, for example, by displaying it on the display device 30 (step S3). The notification process performed by the notification control unit 233 may be displayed on the display screen of the display device 30 as described above, or may be displayed on a display (not shown) or the like provided in the drive main body unit 144. May be notified.
As a result, the measurer operates the Z adjustment knob 143A and the X adjustment knob 146B according to the content of the notification to move the Z slider 142 and the X slider 145 so that the stylus 133 comes into a position where the stylus 133 contacts the surface to be measured. be able to.

Then, when an operation signal indicating that the position setting of the stylus 133 is completed is input by the operation of the operation unit 22 by the measurer, the tip displacement amount calculation unit 232 causes the detection value output from the Z scale 142A and the X scale 146A. Is read to obtain the position coordinates of the stylus 133 (step S4). Here, an example in which the position coordinates of both the X1 direction and the Z2 direction are acquired as the position of the stylus 133 is shown, but at least the X position in the X1 direction may be acquired. The position of the measured surface with which the tip of the stylus 133 contacts is not particularly limited.

Next, the tip displacement amount calculation unit 232 calculates the coordinates of the tip position of the stylus 133 from the center of the α axis 147A (step S5).
The design dimensions of the individual arm holders 132 and stylus 133 mounted on the detector main body 131 are known, and the position of the X slider 145 relative to the drive main body 144 by the X scale 146A (X slider 145 relative to the α axis 147A). Position) can be detected.

Specifically, the tip displacement amount calculation unit 232 uses the α axis 147A as the origin, and in the biaxial coordinate system of the X1 direction (X1 axis) and the Z1 direction (Z1 axis) orthogonal to the α axis 147A and the X1 direction. The coordinates of the tip of the stylus 133 (initial coordinates (X ₀ , Z ₀ )) are calculated.
The initial coordinate X _{0 with} respect to the X1 direction is a dimension (known) from the mounting position of the arm holder 132 to the detector body 131 to the holding position 132A, and the shaft portion of the stylus 133 contacts from the holding position 132A where the arm holder 132 is mounted. It is determined by the dimension up to the position where the child is provided (known), the design dimension of the X slider 145 and the detector body 131 (known), and the detection value (measured value) of the X scale 146A.
The initial coordinates Z _{0 with} respect to the Z1 direction are the projection size (known) of the contact of the stylus 133 and the size in the Z1 direction from the α-axis 147A of the drive body 144 to the holding position 132A (the drive body 144 and the X slider 145, It can be calculated by the calculation based on the known design dimensions of the detector body 131 and the arm holder 132).

After that, the tip displacement calculation unit 232 determines the position (movement) of the tip of the stylus 133 when the drive main body 144 is rotated about the α axis 147A by the work inclination angle θ (calculated in step S2). Amount and moving direction) are calculated (step S6; tip displacement amount calculation step).
That is, the coordinates of the tip of the stylus 133 when the drive body 144 is rotated by the work inclination angle θ with the α axis as the origin are set to (X ₁ , Z ₁ ), and the initial coordinates before rotation are set to (X ₀ , Z ₁ ). ₀ ), the following equations (1) and (2) are established.
X ₁ =X ₀ cos θ−Z ₀ sin θ (1)
Z ₁ =X ₀ sin θ+Z ₀ cos θ (2)
Therefore, from the formulas (1) and (2), the movement amount and the movement direction of the tip of the stylus 133 in the Z direction can be calculated by the following formula (3).
Zm=Z ₁ −Z ₀ =(X ₀ sin θ+Z ₀ cos θ)−Z ₀ (3)

In the above equations (1) to (3), the initial coordinates (X ₀ , Z ₀ ) are the coordinates calculated in step S4, and the stylus 133 when the drive body 144 is rotated by the work inclination angle θ. The amount of movement of the tip of the Z2 in the Z2 direction is |Zm|, and the sign of Zm is the moving direction.

After that, the fact that the Z slider 142 is moved is notified so that the detection value of the detection sensor 131A (the swing displacement amount of the stylus 133) becomes the reference value (step S7; first notification step).
That is, the Z slider 142 is moved so that the swing position of the stylus 133 detected by the detection sensor 131A becomes the reference position. Here, as the reference position, for example, a position where the detection value of the detection sensor 131A is 0 mm (the stylus 133 is not swung in any direction) can be exemplified.
In step S7, the measurer operates the Z adjustment knob 143A to move the Z slider 142. Then, the notification control unit 233 monitors the detection value of the detection sensor 131A, and when the detection value becomes the reference value, an image is displayed on the display provided in the display device 30 or the drive main body unit 144, or a sound is output. The fact that the adjustment has succeeded is notified by the above (step S8).

Next, the notification control unit 233 determines whether or not the moving direction calculated in step S5 is a direction away from the work W (step S9).

When it is determined as Yes in step S9 (when the moving direction calculated in step S6 is the direction away from the work W), the notification control unit 233 adjusts the α-axis adjusting knob 148 to move the stylus 133 from the work W. It is informed that the vehicle will move in the direction of leaving (step S10; evacuation step).
FIG. 5 is a diagram showing the position of the detector 13 (the arm holder 132 and the stylus 133) supported by the X slider 145, which shows the state immediately after the process of step S8 is completed. FIG. 6 is a diagram showing a state in which the stylus 133 has been retracted from the work W in step S10.
In the present embodiment, the X slider 145 is moved to the side opposite to the movement direction calculated in step S6 by the movement amount (|Zm|) calculated in step S6 (details will be described later). When the calculated movement direction is the side opposite to the work W, the X slider 145 is moved to the work W side. In this case, the stylus 133 is pushed into the work W, and the stylus 133 and the work W may be damaged. Therefore, in the present embodiment, when the movement direction calculated in step S6 is on the opposite side to the work W, the state of step S6 as shown in FIG. 5 is changed to the state as shown in FIG. The part 144 is rotated to move the tip of the stylus 133 in a direction away from the work.

Further, the notification control unit 233 may notify the work inclination angle θ acquired in step S2, and may prompt the drive main body portion 144 with respect to the table 12 to have an angle equal to or greater than the work inclination angle θ. For example, as described above, when the α-axis scale 147B is provided, the α-axis adjustment knob 148 is adjusted with reference to the α-axis scale 147B to connect to the drive main body 144 and the drive main body 144. It is easy to set the tilt direction (X1 direction) of the X slider 145 that is greater than or equal to the work tilt angle θ.

Then, the notification control unit 233 determines whether the stylus 133 has been separated from the work W (step S11). For example, when the operator operates the operation unit 22 to input an operation signal indicating that the stylus 133 has been separated from the work W, the notification control unit 233 completes the movement of the stylus 133 (YES). To determine.

If No is determined in step S11, the process waits until the stylus 133 is completely retracted (that is, until Yes is determined in step S11).
When it is determined as Yes in step S11 and when it is determined as No in step S9 (when the moving direction calculated in step S5 is a direction approaching the work W), the Z slider 142 is moved along the Z2 direction. It is informed that the X slider 145 is moved in the opposite direction to the movement direction calculated in step S6 by the movement amount (|Zm|) calculated in step S6 by moving (step S12; second notification). Step).

FIG. 7 is a schematic diagram showing the processing executed in step S12.
According to the notification of step S12, the measurer operates the Z adjustment knob 143A to move the Z slider 142 along the Z2 direction, and along with this movement, is connected to the drive main body 144 and the drive main body 144. The X slider 145 is also moved, and the arm holder 132 and the stylus 132 are moved to the state shown in FIG. 7.
In this case, the notification control unit 233 determines whether or not the movement amount of the Z slider 142 becomes Zm based on the detection value from the Z scale 142A, and when the movement amount becomes Zm, image display and The fact that the movement adjustment in the Z direction has succeeded is notified by voice or the like (step S13).

After step S13, the notification control unit 233 further notifies that the α-axis adjustment knob is operated to adjust the detection value of the detection sensor 131A to the reference value (for example, 0 mm) (step S14; Three notification steps, angle adjustment step).
Thereby, the measurer operates the α-axis adjusting knob while referring to the detection value of the detection sensor 131A (visible on the display device 30 and the display provided on the drive main body 144) to detect the detection sensor 131A. The tilt angle of the drive body 144 is adjusted to a position where the value becomes the reference value. Since the X slider 145 is connected to the drive body 144, the tilt angle of the X slider 145, which is the drive unit, is adjusted by this operation, and the X1 direction, which is the moving direction of the X slider 145, is It is adjusted in the same direction as the tilt direction of the measured surface of the work W.

By the way, the above example is premised on that the inclination angle of the drive main body 144 with respect to the α axis 147A is approximately 0° in the initial state, but the present invention is not limited to this.
That is, the inclination angle of the drive body 144 may be inclined at an angle other than 0° in the initial state. In this case, the control device 20 performs the adjustment in consideration of the angle, for example, when the measurer inputs the inclination angle in advance.
Specifically, when the measurer inputs the tilt angle (θ ₀ ) of the drive main body 144 in the initial state, the control device 20 notifies the movement amount of the Z slider 142 in the Z2 direction in step S12. Is multiplied by 1/cos θ ₀ (that is, the fact that the Z slider 142 is moved by |Zm|/cos θ ₀ is notified). This makes it possible to combine the X1-Z1 coordinate system and the X2-Z2 coordinate system.

[Operation and effect of this embodiment]
In the surface texture measuring machine 1 of the present embodiment, in the leveling mode, the tilt angle (work tilt angle θ) of the measured surface of the work W is acquired in the work angle acquisition step of step S2. Further, in the tip displacement amount calculation step of step S6, the position (movement amount and movement direction) of the tip of the stylus 133 when the drive main body 144 is rotated by the work inclination angle θ around the α axis 147A is calculated. To do. Furthermore, the first notification step of step S7 notifies that the Z slider 142 is moved so that the detection value of the detection sensor 131A becomes the reference value. After the Z slider 142 has been moved in this step S7, in the second notification step of step S12, the movement direction (|Zm|) calculated in step S6 of the X slider 145 is moved in the moving direction calculated in step S6. Notify that the movement will be in the opposite direction. Then, in the third notification step (angle adjustment step) of step S14, it is notified that the detection value of the detection sensor 131A is adjusted to the reference value (for example, 0 mm).

Accordingly, when adjusting the inclination angle of the drive body 144 with respect to the α-axis 147A, it is not based on the method of referring to the α-axis scale 147B but based on the detection value of the detection sensor 131A capable of detecting a more accurate measurement value. The angle will be adjusted.
That is, with the α-axis scale 147B, the angle cannot be adjusted with an accuracy of less than the provided scale unit (for example, a unit of 1°), but in the present embodiment, highly accurate drive based on the detection value of the detection sensor 131A. The angle of the part can be adjusted.
Further, in the present embodiment, since the angle of the drive main body 144 around the α-axis 147A is adjusted, a separate drive motor or the like is unnecessary, and the configuration can be simplified. In other words, even with respect to the surface texture measuring instrument 1 that has been conventionally used, it is possible to adjust the tilt angle with high accuracy simply by introducing a program that implements the above-described drive section tilt adjusting method into the control device 20. You can

In the present embodiment, in step S5, the detected value (measured value) of the X scale 146A, the dimension (known) from the mounting position of the arm holder 132 to the detector body 131 to the holding position 132A, and the shaft portion of the stylus 133 are the arms. The dimension from the holding position 132A attached to the holder 132 to the position where the contact is provided (known), the design dimension of the X slider 145 and the detector body 131 (known), the protruding dimension of the contact of the stylus 133 (known), The movement amount and the movement direction are calculated using the dimension (known) in the Z1 direction from the α axis 147A to the holding position 132A in the drive body section 144.
Therefore, the initial position of the tip position of the stylus 133 can be easily calculated based on the known value and the detected value of the X scale 146A, and the initial position of the tip position of the stylus 133 and the work inclination acquired in step S2. With the angle θ, the moving amount and moving direction of the stylus 133 can be easily calculated.

In the present embodiment, when the moving direction calculated in step S6 is the direction away from the work W, the angle of the drive body 144 with respect to the α-axis 147A is changed to rotate the stylus 133 in the direction away from the work W. To inform you.
Therefore, in the processing of steps S12 to S13, the stylus 133 is not pushed into the work W when the Z slider 142 is moved, and damage to the stylus 133 or the work W can be prevented.

[Second embodiment]
Next, a second embodiment according to the present invention will be described.
In the above-described first embodiment, in step S3 to step S4, step S7 to step S8, and step S12 to step S13, the measurer is informed that the Z slider 142 is to be moved (by the measurer's operation. The Z slider 142 is moved), but the second embodiment differs from the above in that the control device 20 implements it.

That is, in the present embodiment, the control device 20 controls the X drive mechanism 146 to move the X slider 145, instead of the processing of steps S3 to S4 of the first embodiment, and the detection from the detection sensor 131A. The position where the value fluctuates is detected as the contact position. The Z drive mechanism 143 may be driven instead of the X drive mechanism 146, or both the X drive mechanism 146 and the Z drive mechanism 143 may be driven.
In this case, in step S4, the tip displacement amount calculation unit 232 reads the detection values output from the Z scale 142A and the X scale 146A at the contact position and acquires the position coordinates of the stylus 133.

In addition, the first movement step is performed instead of the processing of steps S7 to S8. In this case, the control device 20 controls the Z drive mechanism 143 to move the Z slider 142 while reading the detection value of the detection sensor 131A. Then, the control device 20 stops the movement of the Z slider 142 at the position where the detection value of the detection sensor 131A becomes the reference value.

Furthermore, the second moving step is performed instead of the processing of steps S12 to S13. In this case, the control device 20 obtains the Z target value by adding the movement amount Zm calculated in step S6 to the detection value (Z coordinate) of the Z scale 142A before the movement is started, and controls the Z drive mechanism 143. Then, it is moved to a position where the detected value from Z scale 142A becomes the Z target value (the position shown in FIG. 6).

In the second embodiment as described above, the measurer only has to perform the evacuation step in the case where it is determined to be “YES” in step S9 and the angle adjustment step in step S14, and therefore, compared to the first embodiment. It is possible to reduce the operation process by the operator and improve the operability.

[Modification]
The present invention is not limited to the above-described embodiment, and modifications and the like within the scope of the present invention are included in the present invention.
For example, in the above-described embodiment, an example in which the industrial machine of the present invention is applied to the surface texture measuring machine 1 has been described, but the invention can be applied to various measuring machines for measuring the size or shape of an article. it can. For example, it can be suitably applied to a three-dimensional measuring machine that measures the position of each point on the surface of an article, a roundness measuring machine that measures the roundness of a cylindrical article, and the like.

In step S7 to step S8, the example in which the Z2 axis is moved so that the detection value of the detection sensor 131A becomes the reference value (0 mm) has been shown, but the present invention is not limited to this. For example, in step S3, when the tip of the stylus 133 is brought into contact with the measured surface W2, the detection value of the detection sensor 131A becomes the reference value (so that the swing position of the stylus 133 becomes the reference position). The stylus 133 may be brought into contact with the work.

When the workpiece inclination angle is calculated by the preliminary measurement in step S2, for example, the scanning measurement in which the tip of the stylus 133 is moved along the measured surface W2 may be performed. Further, two or more position data (values of the Z scale 142A and the X scale 146A) when the tip of the stylus is manually brought into contact with the surface to be measured are acquired, and the work inclination angle is calculated from these position data. Good. Further, when the work inclination angle is known, it may be manually input to the control device 20.

In the above embodiment, an example in which the device body 10, the control device 20, and the display device 30 are configured as separate bodies has been shown, but a configuration may be adopted in which a display unit is provided in, for example, the drive body unit 144 of the device body 10, The control device 20 may be incorporated in the device body 10.

INDUSTRIAL APPLICATION This invention can be utilized for the measuring device which can change the inclination angle of the drive part which hold|maintains a tracing stylus.

DESCRIPTION OF SYMBOLS 1... Surface texture measuring device (measuring instrument), 10... Device main body, 13... Detector, 14... Moving mechanism, 20... Control device, 21... Storage part, 22... Operation part, 23... Control part, 131... Detector Main body, 131A... Detection sensor (swing detection unit), 132... Arm holder, 132A... Holding position, 133... Stylus (measuring element), 142... Z slider, 142A... Z scale, 143... Z drive mechanism, 143A... Z Adjustment knob 144... Drive main body section, 145... X slider (drive section), 146... X drive mechanism, 146A... X scale, 146B... X adjustment knob, 147... Drive section tilting mechanism, 147A... α axis (adjustment axis) Reference numeral 147B... α-axis scale, 231... Work angle acquisition unit, 232... Tip displacement amount calculation unit, 233... Notification control unit, 234... Mode switching unit, 235... Measurement control unit.

Claims (5)

While holding the stylus for measuring the surface to be measured of the work swingably, it is movable in a first direction and a second direction intersecting the first direction, and in the first direction and the second direction. A drive unit rotatable about intersecting adjustment axes, a swing detection unit that detects a swing position of the tracing stylus, and an angle adjustment unit that changes an angle of the drive unit around the adjustment axis. A method for adjusting the inclination of the drive unit of the measuring instrument, comprising:
A work angle acquisition step of acquiring the inclination angle of the surface to be measured,
A tip displacement amount calculation step of calculating a movement amount and a movement direction of the tip of the probe in the second direction when the drive unit is rotated by an inclination angle of the surface to be measured,
A first movement step of moving the drive unit in the second direction so that the swing position detected by the swing detection unit becomes a predetermined reference position;
A second movement step of moving the drive portion by the movement amount in a direction opposite to the movement direction calculated in the tip displacement amount calculation step;
An angle adjustment step of adjusting an angle of the drive unit around the adjustment axis so that the swing position detected by the swing detection unit becomes the reference position;
A method for adjusting the inclination of a drive unit, which comprises: The drive unit inclination adjusting method according to claim 1,
In the second moving step, when the opposite direction of the moving direction is a direction toward the work, after performing a retracting step of rotating the drive unit around the adjustment axis in a direction in which the tracing stylus moves away from the work. A driving unit inclination adjusting method, comprising: moving the driving unit in the second direction. The drive section inclination adjusting method according to claim 2,
The drive section inclination adjusting method, wherein the retracting step rotates the drive section around the adjustment axis by an angle equal to or more than the inclination angle of the measured surface acquired in the work angle acquiring step. While holding the stylus for measuring the surface to be measured of the work swingably, it is movable in a first direction and a second direction intersecting the first direction, and in the first direction and the second direction. A drive unit rotatable about intersecting adjustment axes, a swing detection unit that detects a swing position of the tracing stylus, and an angle adjustment unit that changes an angle of the drive unit around the adjustment axis. A method for adjusting the inclination of the drive unit of the measuring instrument, comprising:
A work angle acquisition step of acquiring the inclination angle of the surface to be measured,
A tip displacement amount calculation step of calculating a movement amount and a movement direction of the tip of the tracing stylus with respect to the second direction when the drive unit is rotated by an inclination angle of the surface to be measured,
A first informing step of informing that the drive unit is moved in the second direction so that the swing position detected by the swing detection unit becomes a predetermined reference position;
After the first informing step, a second informing step of informing that the drive unit is moved by the movement amount in the direction opposite to the movement direction calculated in the tip displacement amount calculation step,
After the second notification step, a notification that the angle around the adjustment axis of the drive unit is adjusted so that the swing position detected by the swing detection unit becomes the reference position A notification step,
A method for adjusting the inclination of a drive unit, which comprises: While holding the stylus for measuring the surface to be measured of the work swingably, it is movable in a first direction and a second direction intersecting the first direction, and in the first direction and the second direction. A drive unit rotatable about intersecting adjustment axes, a swing detection unit that detects a swing position of the tracing stylus, and an angle adjustment unit that changes an angle of the drive unit around the adjustment axis. Is a drive unit tilt adjustment program that is read and executed by a computer that controls the measuring instrument,
A drive unit inclination adjusting program for causing the computer to execute the drive unit inclination adjusting method according to any one of claims 1 to 4.

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