JP2007198791A - Surface property measuring instrument - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a surface property measuring instrument which enables high-precision setting and measurement in auto-set operation and a measuring instrument following function. <P>SOLUTION: The surface property measuring instrument comprises: a Y-axis movement mechanism, a Z-axis movement mechanism (a Z slider 4), and an X-axis movement mechanism 6, which move an object under measurement W and a detector 8 relatively in the three-axis directions orthogonal to each other; a tilting mechanism (a swivel plate 5) for tilting the X-axis movement mechanism 6 so that the relative movement direction becomes parallel to the measurement surface of the object under measurement; a tilt angle storage means for storing the tilt angle; and a control means for controlling the drive of the Z-axis movement mechanism (the Z slider 4) and the X-axis movement mechanism 6 so that the relative distance between the object under measurement W and the detector 8 is changed to the perpendicular direction with respect to the measurement surface of the object under measurement W on the basis of the tilt angle stored in the tilt angle storage means. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a surface texture measuring instrument that measures surface texture such as surface roughness, swell, and shape of an object to be measured.

2. Description of the Related Art A shape measuring machine that measures surface properties such as the shape of an object to be measured is known as a surface texture measuring instrument (see, for example, Patent Document 1).
As shown in FIG. 9, the conventional shape measuring machine includes a base 1 on which a workpiece W is placed, a Z-axis column 3 erected vertically on the upper surface of the base 1, and a Z-axis column 3. A Z-slider 4 provided so as to be movable up and down (Z-axis direction), a turning plate 5 provided on the Z-slider 4 so as to be turnable about the Y-axis, and an X-axis attached to the turning plate 5 The moving mechanism 6 and a detector 8 connected to the X-axis moving mechanism 6 are configured.
The detector 8 includes a detector main body 8A connected to the X-axis moving mechanism 6, a stylus 8B supported by the detector main body 8A so as to be rotatable about the Y axis, and a right angle to the tip of the stylus 8B. The stylus 8C is provided, and a detection unit (not shown) that detects the vertical displacement of the stylus 8C (the amount by which the stylus 8B swings).

Measurement of the workpiece W is performed in the following procedure.
(A) The Z slider 4 is moved above the Z axis column 3.
(B) Place the workpiece W on the base 1.
(C) The Z slider 4 is moved below the Z-axis column 3 to position the stylus 8C of the detector 8 in the vicinity of the measurement surface of the workpiece W (the stylus 8C is not brought into contact with the workpiece W). .
(D) Press the measurement start button.
(E) The Z slider 4 descends along the Z axis column 3.
(F) The stylus 8C of the detector 8 starts to contact the workpiece W.
(G) When the detection value of the detector 8 exceeds a predetermined value (for example, 0 point), the lowering of the Z slider 4 is stopped.
(H) The Z slider 4 is raised along the Z-axis column 3 at a slow speed, and when the detection value of the detector 8 reaches a predetermined value (for example, 0 point), the raising of the Z slider 4 is stopped. (This step may be omitted)
(I) The X axis moving mechanism 6 is driven, the detector 8 is scanned in the X axis direction, and measurement is started.

JP 2004-257958 A

Among the measurement procedures described above, steps (e) to (h) are called so-called auto-set operations, which are automatically performed based on the operation of the measurement start button.
However, since this auto-set operation only moves the Z slider 4 up and down along the Z-axis column 3, for example, as shown in FIG. 10, the X slider is parallel to the measurement surface W1 of the object W to be measured. When the shaft moving mechanism 6 is tilted, the Z slider 4 moves in a direction different from the axial direction of the stylus 8C. That is, as shown in FIG. 11, the Z slider 4 moves up and down along the Z-axis column 3 different from the axial direction of the stylus 8C. Since the amount of elevation of the Z slider 4 is not equal to that of the Z slider 4, there is a problem that the amount of error when stopped is large.

  In addition to the model that moves the detector 8 along the measurement surface of the object W to be measured and measures the surface properties of the measurement surface based on the detection value from the detector 8 at this time, the measurement range The Z slider 4 is moved so that the detection value from the detector 8 becomes a predetermined value (within a predetermined range set in advance) while moving the detector 8 along the measurement surface of the object W to be measured. Even in the case of a so-called measuring instrument follow-up type model that moves up and down along the Z-axis column 3 and measures the surface properties of the measurement surface based on the amount of movement of the Z-slider 4, the turning angle of the X-axis moving mechanism 6 is adjusted. Regardless, since the Z slider 4 only moves up and down along the Z-axis column 3, there is the above-described problem.

  In addition, as shown in FIG. 12, this type of measuring machine is known to be capable of rotating the direction of the stylus 8C with respect to the axis of the stylus 8B. Since the direction of the set operation is defined in the Z-axis and Y-axis directions, the direction of the stylus 8C is also limited every 90 °. As a result, there is a problem that the stylus 8C may not come into contact with the measurement surface of the workpiece W.

  An object of the present invention is to provide a surface texture measuring instrument that can be expected to perform highly accurate setting and measurement even in an auto-set operation and a measuring instrument tracking function.

  The surface texture measuring instrument of the present invention relatively moves the object to be measured and the detector along the measurement surface of the object to be measured, and measures the surface texture of the measurement surface based on the detection value from the detector at this time. The surface texture measuring device or the object to be measured and the detector are relatively moved along the measurement surface of the object to be measured, and the detector and the object to be measured are adjusted so that the detection value from the detector becomes a predetermined value. In a surface texture measuring instrument that changes the relative distance and measures the surface texture of the measurement surface based on the relative distance data, a first movement for relatively moving the object to be measured and the detector in two axial directions perpendicular to each other. A mechanism and a second moving mechanism; a tilting mechanism for tilting the second moving mechanism with respect to the first moving mechanism so that the relative moving direction is parallel to the measurement surface of the object to be measured; and Inclination angle storage means for storing the inclination angle and the inclination angle Based on the inclination angle stored in the memory means, the first moving mechanism and the first moving mechanism are arranged so that the relative distance between the object to be measured and the detector changes in a direction perpendicular to the measurement surface of the object to be measured. And a control means for controlling the driving of the two-movement mechanism.

According to this invention, the second moving mechanism is tilted with respect to the first moving mechanism by the tilting mechanism so that the relative movement direction of the measured object and the detector is parallel to the measurement surface of the measured object. Then, the tilt angle of the tilt mechanism is stored in the tilt angle storage means. Then, the control means causes the first distance so that the relative distance between the object to be measured and the detector changes in a direction perpendicular to the measurement surface of the object to be measured based on the inclination angle stored in the inclination angle storage means. Driving of the moving mechanism and the second moving mechanism is controlled.
Therefore, in the auto-set operation, the relative distance between the object to be measured and the detector is changed in the direction perpendicular to the measurement surface of the object to be measured due to the drive control of the first moving mechanism and the second moving mechanism. In addition, since the direction of the detector and the relative distance change direction between the object to be measured and the detector coincide with each other, the amount of error is small and a highly accurate autoset operation can be realized.
Even in detector-following models, the direction of the detector and the relative distance change direction between the object to be measured and the detector match, so there is little error and high-precision measurements are expected. it can.

  The surface texture measuring instrument of the present invention relatively moves the object to be measured and the detector along the measurement surface of the object to be measured, and measures the surface texture of the measurement surface based on the detection value from the detector at this time. The surface texture measuring device or the object to be measured and the detector are relatively moved along the measurement surface of the object to be measured, and the detector and the object to be measured are adjusted so that the detection value from the detector becomes a predetermined value. In a surface texture measuring machine that changes the relative distance and measures the surface texture of the measurement surface based on the relative distance data, a first movement that relatively moves the object to be measured and the detector in three axial directions orthogonal to each other. Mechanism, second moving mechanism and third moving mechanism, a rotating mechanism for rotating the direction of the detector around the moving direction axis of the third moving mechanism, and a rotation angle storage means for storing the rotation angle of the rotating mechanism And the rotation stored in the rotation angle storage means And controlling the driving of the first moving mechanism and the second moving mechanism so that the relative distance between the object to be measured and the detector changes in a direction perpendicular to the measurement surface of the object to be measured. Means.

According to the present invention, when the rotation mechanism is rotated about the movement direction axis of the third movement mechanism so that the direction of the detector is perpendicular to the measurement surface of the object to be measured, The rotation angle is stored in the rotation angle storage means. Then, the control means causes the first distance so that the relative distance between the object to be measured and the detector changes in the direction perpendicular to the measurement surface of the object to be measured based on the rotation angle stored in the rotation angle storage means. Driving of the moving mechanism and the second moving mechanism is controlled.
Therefore, in the auto-set operation, the relative distance between the object to be measured and the detector is changed in the direction perpendicular to the measurement surface of the object to be measured due to the drive control of the first moving mechanism and the second moving mechanism. In addition, since the direction of the detector (displacement amount) and the relative distance change direction between the object to be measured and the detector coincide with each other, the amount of error is small and a highly accurate autoset operation can be realized.
Even in detector-following models, the direction of the detector (displacement) matches the direction of relative distance change between the object to be measured and the detector, so there is little error and high accuracy. Can be expected.

The surface texture measuring instrument of the present invention relatively moves the object to be measured and the detector along the measurement surface of the object to be measured, and measures the surface texture of the measurement surface based on the detection value from the detector at this time. The surface texture measuring device or the object to be measured and the detector are relatively moved along the measurement surface of the object to be measured, and the detector and the object to be measured are adjusted so that the detection value from the detector becomes a predetermined value. In a surface texture measuring machine that changes the relative distance and measures the surface texture of the measurement surface based on the relative distance data, a first movement that relatively moves the object to be measured and the detector in three axial directions orthogonal to each other. A mechanism, a second moving mechanism, and a third moving mechanism, and an inclination mechanism for inclining the third moving mechanism with respect to the second moving mechanism so that the relative moving direction is parallel to the measurement surface of the object to be measured. Inclination angle storage means for storing the inclination angle of the inclination mechanism A rotation mechanism for rotating the direction of the detector around the movement direction axis of the third movement mechanism, a rotation angle storage means for storing the rotation angle of the rotation mechanism, and an inclination stored in the inclination angle storage means Based on the angle, the driving of the second moving mechanism and the third moving mechanism is controlled so that the relative distance between the object to be measured and the detector changes in a direction perpendicular to the measurement surface of the object to be measured. And, based on the rotation angle stored in the rotation angle storage means, the relative distance between the object to be measured and the detector changes in a direction perpendicular to the measurement surface of the object to be measured. And a control means for controlling driving of the first moving mechanism and the second moving mechanism.
According to the present invention, the above-described effects can be expected at the same time.

In the surface texture measuring instrument according to the present invention, the control means may move either so that the detector approaches from the vertical direction with respect to the measurement surface of the object under the condition that a start command is given. It is preferable to stop the driving of the moving mechanism when the mechanism is moved and the detection value from the detector exceeds a predetermined value set in advance.
According to the present invention, when a start command is given, one of the moving mechanisms is operated so that the detector approaches the measurement surface of the object to be measured from the vertical direction. Eventually, when the detection value from the detector exceeds a predetermined value set in advance, the driving of the moving mechanism is stopped, so that the auto-set operation can be executed simply by giving a start command.

In the surface texture measuring instrument according to the present invention, the control means stops the driving of the moving mechanism, and then drives the moving mechanism in the opposite direction and at a speed lower than the speed to detect from the detector. It is preferable to stop driving the moving mechanism when the value reaches a predetermined value.
According to the present invention, in the auto-set operation, after the driving of the moving mechanism is stopped, the moving mechanism is driven in the opposite direction and at a lower speed than the speed, and the detection value from the detector is set to a predetermined value. Since the driving of the moving mechanism is stopped when the value is reached, the detector can be positioned at a predetermined position with high accuracy.

In the surface texture measuring instrument of the present invention, the detector includes a detector main body moved by the moving mechanism, a stylus supported by the detector main body so as to be swingable, and a touch provided at the tip of the stylus. It is preferable that it is comprised from the needle | hook and the detection part which detects the rocking | fluctuation amount of the said stylus.
According to the present invention, highly accurate measurement can be ensured in a contact-type surface texture measuring machine.

<Description of overall configuration (FIG. 1)>
FIG. 1 is a front view of a surface roughness measuring machine showing an embodiment of the present invention. The surface roughness measuring machine includes a base 1 on which a workpiece W is placed, a Y slider 2 provided on the base 1 so as to be movable in the front-rear direction (Y-axis direction), and an upper surface of the Y slider 2. A Z-axis column 3 erected vertically, a Z-slider 4 provided on the Z-axis column 3 so as to be movable up and down (Z-axis direction), and the Z-slider 4 can be swiveled around the Y-axis. , The X-axis moving mechanism 6 attached to the rotating plate 5, and the X-axis moving mechanism 6 moves in a direction orthogonal to the Z-axis column 3 (X-axis direction). A detector rotating mechanism 7 serving as a rotating mechanism and a roughness detector 8 rotated about the X axis by the detector rotating mechanism 7 are configured.

  That is, in the surface roughness measuring machine of this embodiment, the workpiece W and the roughness detector 8 are the first moving mechanism for moving the Y slider 2 in the Y axis direction, and the Z slider 4 is moved in the Z axis direction. The second moving mechanism and the X moving mechanism 6 that is the third moving mechanism are configured to be relatively movable in the directions of three axes (Y, Z, X axes) orthogonal to each other. Further, the tilting mechanism that tilts the swivel plate 5 moves the X-axis that is the third moving mechanism so that the relative movement direction of the workpiece W and the roughness detector 8 is parallel to the measurement surface of the workpiece. The mechanism 6 is configured to be tiltable with respect to the moving direction of the Z slider 4, and the direction of the roughness detector 8 is centered on the moving direction axis (X axis) of the X axis moving mechanism 6 by the detector rotating mechanism 7. Is configured to be rotatable.

<Description of detector rotation mechanism (FIG. 2)>
FIG. 2 is a schematic view showing the detector rotating mechanism 7. The detector rotation mechanism 7 includes a housing 10 that is moved in the X-axis direction by the X-axis drive device 6, a motor 11 that is fixed in the housing 10, and a motor 11 that is provided in the housing 10 via a bearing 12. The rotary shaft 14 is rotatably supported on the same axis as the output shaft 11A and holds the roughness detector 8 at the tip thereof, and a shaft coupling 15 that connects the rotary shaft 14 and the output shaft 11A of the motor 11 to each other. ing.
The rotation angle detector 16 for detecting the rotation angle of the rotation shaft 14 (roughness detector 8) includes a rotation disk 17 having through holes at a constant pitch along the outer peripheral edge fixed to the rotation shaft 14, and the rotation disk. And a detection head 18 composed of a light emitting element and a light receiving element which are arranged to face each other with 17 interposed therebetween.
The roughness detector 8 includes a detector main body 8A that is moved by the X-axis moving mechanism 6, a stylus 8B that is swingably supported by the detector main body 8A, and a protrusion perpendicular to the tip of the stylus 8B. The stylus 8C is provided, and a detection unit 8D that detects the swing of the stylus 8B.

<Description of Control Device (FIG. 3)>
FIG. 3 is a block diagram of the control device. The control device 30 includes a Y-axis movement mechanism 32 and a Y-axis position detector 33, a Z-axis movement mechanism 34 and a Z-axis position detector 35, an inclination mechanism 36 and an inclination angle detector 37, and an X-axis movement mechanism 6. The X-axis position detector 38, the detector rotation mechanism 7 and the rotation angle detector 16, the roughness detector 8, the input device 39, the display device 41, and the storage device 42 are connected to each other.
The Y-axis moving mechanism 32 is a mechanism for moving the Y slider 2 in the Y-axis direction, and the Y-axis position detector 33 detects the Y-axis position of the Y slider 2. The Z-axis moving mechanism 34 moves the Z slider 4 in the Z-axis direction, and the Z-axis position detector 35 detects the Z-axis position of the Z slider 4. The tilt mechanism 36 is a mechanism for tilting the swivel plate 5 around the Y axis, and the tilt angle detector 37 detects the tilt angle of the swivel plate 5. The X-axis moving mechanism 6 is a mechanism for moving the roughness detector 8 in the X-axis direction, and the X-axis position detector 38 detects the X-axis position of the roughness detector 8.

From the input device 39, various command information is input in addition to measurement item selection, measurement start command, and the like.
The display device 41 displays measurement items, measurement results, and the like.
The storage device 42 stores an operation command program corresponding to a measurement item and a measurement result, and also stores a Y-axis memory 43 for storing the Y-axis position of the Y slider 2 and a Z-axis of the Z slider 4. Z-axis memory 44 for storing the position, tilt-angle memory 45 as tilt-angle storage means for storing the tilt angle θ of the swivel plate 5, X-axis memory 46 for storing the X-axis position of the roughness detector 8, and roughness detection A rotation angle memory 47 as a rotation angle storage means for storing the rotation angle γ of the device 8, a detection value memory 48 for storing the detection value δ of the roughness detector 8, and the like are provided.

  Based on the operation command program for various measurement items stored in the storage device 42, the control device 30 includes a Y-axis movement mechanism 32, a Z-axis movement mechanism 34, a tilt mechanism 36, an X-axis movement mechanism 6, a rotation mechanism 7, and the like. The driving is controlled, and the workpiece W and the roughness detector 8 are relatively moved along the measurement surface of the workpiece W, and the surface of the measurement surface is based on the detection value from the roughness detector 8 at this time. Measure properties. Alternatively, the object to be measured W and the roughness detector 8 are relatively moved along the measurement surface of the object to be measured W, and the roughness detector 8 is set so that the detection value from the roughness detector 8 becomes a predetermined value. The surface distance of the measurement surface is measured based on the relative distance data.

Further, when the start command for the auto-set operation is given, the control device 30 moves each moving mechanism so that the roughness detector 8 approaches the measurement surface of the workpiece W from the vertical direction. Specifically, based on the tilt angle stored in the tilt angle memory 45, the relative distance between the workpiece W and the roughness detector 8 changes in a direction perpendicular to the measurement surface of the workpiece W. In addition, while controlling the driving of the Z-axis moving mechanism 34, which is the second moving mechanism, and the X-axis moving mechanism 6, which is the third moving mechanism, based on the rotation angle stored in the rotation angle memory 47, the workpiece W The Y-axis movement mechanism 32 that is the first movement mechanism and the Z-axis movement that is the second movement mechanism so that the relative distance between the roughness detector 8 and the roughness detector 8 changes in the direction perpendicular to the measurement surface of the workpiece W. The drive of the mechanism 34 is controlled.
At this time, after the detection value from the roughness detector 8 exceeds a predetermined value set in advance, the driving of each moving mechanism is stopped, and then each moving mechanism is moved in the opposite direction and at a lower speed than the above speed. When the detected value from the roughness detector 8 reaches a predetermined value set in advance, the driving of each moving mechanism is stopped.

<Description of Auto Set Operation (FIGS. 4 to 6)>
In measuring the surface property of the workpiece W, first, the workpiece W is placed on the base 1 using a table or the like, and the stylus 8C of the roughness detector 8 is placed on the measurement surface of the workpiece W. Abut. For this purpose, first, the posture of the roughness detector 8 is changed so that the stylus 8C of the roughness detector 8 is perpendicular to the measurement surface of the workpiece W.
For example, as shown in FIG. 4, when the measurement surface W1 of the workpiece W is inclined with respect to the X axis, the X axis moving mechanism 6 is inclined by the turning operation of the turning plate 5 to detect the roughness. The stylus 8C of the device 8 is adjusted to be perpendicular to the measurement surface W1 of the object W to be measured, and the scanning direction (the moving direction of the X-axis moving mechanism 6) is relative to the measurement surface W1 of the object W to be measured. Adjust so that they are parallel. Then, the inclination angle of the turning plate 5 is detected by the inclination angle detector 37 and then stored in the inclination angle memory 45 of the storage device 42.

Thereafter, a start command for auto-set operation is given from the input device 39. Then, based on the tilt angle stored in the tilt angle memory 45, the control device 30 causes the relative distance between the workpiece W and the roughness detector 8 to be perpendicular to the measurement surface W1 of the workpiece W. The driving of the Z-axis moving mechanism 34 and the X-axis moving mechanism 6 is controlled so as to change. That is, as shown in FIG. 5, the Z-slider 4 is lowered so that the roughness detector 8 moves in the axial direction of the stylus 8C, and at the same time, the X-axis moving mechanism 6 is driven rightward in FIG. .
Thereby, the roughness detector 8 is moved in the axial direction of the stylus 8C. Eventually, when the detected value from the roughness detector 8 exceeds a predetermined value set in advance, the driving of the Z-axis moving mechanism 34 and the X-axis moving mechanism 6 is stopped. Subsequently, each moving mechanism is driven in a direction opposite to the above and at a lower speed than the above speed, and when the detected value from the roughness detector 8 reaches a predetermined value set in advance, the driving of each moving mechanism is stopped. .
In this state, when the X-axis moving mechanism 6 is driven, the roughness detector 8 is moved along the measurement surface W1 of the workpiece W. Then, since the vertical displacement of the stylus 8C (stylus 8B) at that time is detected, the surface roughness or the like of the measurement surface W1 can be detected based on the detection value from the roughness detector 8. .

Also, as shown in FIG. 6, when the measurement surface W2 of the workpiece W is inclined with respect to the Y axis, the direction of the roughness detector 8 (the stylus 8C of the stylus 8C) The stylus 8C of the roughness detector 8 is adjusted to be perpendicular to the measurement surface W2 of the workpiece W, and the scanning direction (moving direction by the X-axis moving mechanism 6) is adjusted. Adjustment is made so as to be parallel to the measurement surface W2 of the workpiece W.
Specifically, when changing the direction of the stylus 8C of the stylus 8B, the input device 39 commands the direction of the stylus 8C. Then, the motor 11 of the detector rotating mechanism 7 is rotated. When the motor 11 is rotated, the rotation shaft 14 is also rotated. As a result, the roughness detector 8 is rotated. The rotation angle of the roughness detector 8 is detected by the rotation angle detector 16 and then stored in the rotation angle memory 47 of the storage device 42.

Thereafter, a start command for auto-set operation is given from the input device 39. Then, the control device 30 determines that the relative distance between the workpiece W and the roughness detector 8 is perpendicular to the measurement surface W2 of the workpiece W based on the rotation angle stored in the rotation angle memory 47. The driving of the Y-axis moving mechanism 32 that is the first moving mechanism and the Z-axis moving mechanism 34 that is the second moving mechanism is controlled so as to change. In other words, the Z slider 4 is lowered and the Y slider 2 is moved in the Y-axis direction so that the roughness detector 8 moves in the axial direction of the stylus 8C.
As a result, the roughness detector 8 moves in the axial direction of the stylus 8C, but the subsequent operation is the same as described above.

Accordingly, in the auto-set operation, the X-axis moving mechanism 6 that is the scanning axis is inclined so that the stylus 8C of the roughness detector 8 is perpendicular to the measurement surfaces W1 and W2 of the workpiece W. In this case, or even when the direction of the stylus 8C of the roughness detector 8 is rotated about the movement axis of the X-axis moving mechanism 6, the roughness detector 8 is displaced in the axial direction of the stylus 8C. Therefore, there are few problems of conventional errors, and a highly accurate auto-set operation can be realized.
In addition, since the orientation of the stylus 8C of the roughness detector 8 is not limited to 90 ° intervals as in the prior art, the stylus of the roughness detector 8 can be applied to the measurement surface at any angle of the object to be measured. 8C can be brought into contact. Therefore, the measurement site is rarely limited.

<Description of detector tracking function (FIGS. 4 to 6)>
In the detector tracking function, the object to be measured W and the roughness detector 8 are relatively moved along the measurement surface of the object to be measured W, and the detection value from the roughness detector 8 is a predetermined value (predetermined predetermined value). The relative distance between the roughness detector 8 and the workpiece W is changed so as to be within the range, and the surface properties of the measurement surface are measured based on the relative distance data.
Even in this case, as shown in FIG. 4, when the measurement surface W <b> 1 of the workpiece W is tilted with respect to the X axis, the control device 30 is based on the tilt angle stored in the tilt angle memory 45. Thus, the Z-axis moving mechanism 34 and the X-axis moving mechanism 6 are driven so that the relative distance between the object to be measured W and the roughness detector 8 changes in the direction perpendicular to the measurement surface W1 of the object to be measured W. Control. That is, as shown in FIG. 5, the Z-slider 4 is moved up and down and the X-axis moving mechanism 6 is driven so that the roughness detector 8 moves in the axial direction of the stylus 8C.

  Further, as shown in FIG. 6, when the measurement surface W2 of the workpiece W is inclined with respect to the Y axis, the control device 30 is based on the rotation angle stored in the rotation angle memory 47. The driving of the Y-axis moving mechanism 32 and the Z-axis moving mechanism 34 is controlled so that the relative distance between the measured object W and the roughness detector 8 changes in the direction perpendicular to the measurement surface W2 of the measured object W. . That is, the Z-slider 4 is moved up and down so that the roughness detector 8 moves in the axial direction of the stylus 8C, and at the same time, the Y-axis moving mechanism 32 is driven.

Therefore, in the detector tracking function, the X-axis moving mechanism 6 that is the scanning axis is inclined so that the stylus 8C of the roughness detector 8 is perpendicular to the measurement surfaces W1 and W2 of the workpiece W. Or when the direction of the stylus 8C of the roughness detector 8 is rotated about the movement axis of the X-axis movement mechanism, the roughness detector 8 follows the axial direction of the stylus 8C. Therefore, there are few problems of conventional errors, and highly accurate measurement can be realized.
In addition, since the orientation of the stylus 8C of the roughness detector 8 is not limited to 90 ° intervals as in the prior art, the stylus of the roughness detector 8 can be applied to the measurement surface at any angle of the object to be measured. 8C can be brought into contact. Therefore, the measurement site is rarely limited.

<Description of Modified Examples (FIGS. 7 to 8)>
The present invention is not limited to the above-described embodiment, and modifications and improvements within the scope that can achieve the object of the present invention are included in the present invention.
For example, in the above embodiment, the workpiece W is fixed on the base 1 and the roughness detector 8 is configured to be movable in the directions of three axes (Y, Z, and X axes) orthogonal to each other. Conversely, the object to be measured W may be configured to be movable in directions of three axes (Y, Z, and X axes) orthogonal to the roughness detector 8, or the object to be measured W and the roughness detection. The container 8 may be configured to be movable in the direction of any one of the three axes.

Further, the configuration of the detector rotation mechanism 7 is not limited to the configuration described in FIG.
The detector rotating mechanism 7 shown in FIG. 7 transmits the rotation from the motor 11 to the rotating shaft 14 via the two transmission gears 13A and 13B with respect to the detector rotating mechanism 7 shown in FIG. Only different.
The detector rotating mechanism 7 shown in FIG. 8 differs from the detector rotating mechanism 7 shown in FIG. 7 only in that a manual knob 19 is provided in place of the motor 11.

  In the above embodiment, the roughness detector 8 provided with the stylus 8C at the tip is used as the detector. However, the present invention is not limited to this, and for example, distance information to the measurement surface of the workpiece W by light or the like. You may use the non-contact type detector which can detect.

  The present invention can be applied to, for example, a shape measuring machine, a roundness measuring machine, an image measuring machine, a three-dimensional measuring machine in addition to a surface roughness measuring machine for measuring the surface roughness of an object to be measured. .

The front view which shows the surface roughness measuring machine which concerns on one Embodiment of this invention. The figure which shows the detector rotation mechanism of embodiment same as the above. The block diagram which shows the control apparatus of embodiment same as the above. The figure which shows the state which inclined the X-axis movement mechanism in embodiment same as the above. The elements on larger scale of FIG. The perspective view of the state which rotated the roughness detector in embodiment same as the above. Schematic which shows the modification of a detector rotation mechanism. Schematic which shows the other modification of a detector rotation mechanism. The figure which shows the conventional surface roughness measuring machine. The figure which shows the state which inclined the X-axis moving mechanism in the conventional surface roughness measuring machine. The elements on larger scale of FIG. The figure which shows the state which rotated the detector in the conventional surface roughness measuring machine.

Explanation of symbols

6 ... X-axis moving mechanism (third moving mechanism)
DESCRIPTION OF SYMBOLS 7 ... Detector rotation mechanism 8 ... Roughness detector 8A ... Detector main body 8B ... Stylus 8C ... Stylus 8D ... Detection part 30 ... Control apparatus (control means)
32 ... Y-axis moving mechanism (first moving mechanism)
34 ... Z-axis moving mechanism (second moving mechanism)
36: Inclination mechanism 45 ... Inclination angle memory (inclination angle storage means)
47 ... Rotation angle memory (rotation angle storage means)
W: measurement object W1, W2: measurement surface.

Claims (6)

A surface texture measuring machine that measures the surface texture of the measurement surface based on the detection value from the detector at this time, relative to the measurement object and the detector along the measurement surface of the measurement object, or the measurement object The relative distance between the detector and the object to be measured is changed so that the object and the detector are relatively moved along the measurement surface of the object to be measured, and the detected value from the detector becomes a predetermined value. In the surface texture measuring machine that measures the surface texture of the measurement surface based on the data,
A first movement mechanism and a second movement mechanism for relatively moving the object to be measured and the detector in two axial directions perpendicular to each other;
An inclination mechanism for inclining the second movement mechanism with respect to the first movement mechanism so that the relative movement direction is parallel to the measurement surface of the object to be measured;
Tilt angle storage means for storing the tilt angle of the tilt mechanism;
Based on the inclination angle stored in the inclination angle storage means, the first movement is performed so that the relative distance between the object to be measured and the detector changes in a direction perpendicular to the measurement surface of the object to be measured. A surface texture measuring machine comprising: a mechanism and a control means for controlling driving of the second moving mechanism. A surface texture measuring machine that measures the surface texture of the measurement surface based on the detection value from the detector at this time, relative to the measurement object and the detector along the measurement surface of the measurement object, or the measurement object The relative distance between the detector and the object to be measured is changed so that the object and the detector are relatively moved along the measurement surface of the object to be measured, and the detected value from the detector becomes a predetermined value. In the surface texture measuring machine that measures the surface texture of the measurement surface based on the data,
A first moving mechanism, a second moving mechanism, and a third moving mechanism for relatively moving the object to be measured and the detector in three axial directions orthogonal to each other;
A rotating mechanism for rotating the direction of the detector around the moving direction axis of the third moving mechanism;
Rotation angle storage means for storing the rotation angle of the rotation mechanism;
Based on the rotation angle stored in the rotation angle storage means, the first moving mechanism is arranged such that the relative distance between the object to be measured and the detector changes in a direction perpendicular to the measurement surface of the object to be measured. And a surface texture measuring machine comprising a control means for controlling driving of the second moving mechanism. A surface texture measuring machine that measures the surface texture of the measurement surface based on the detection value from the detector at this time, relative to the measurement object and the detector along the measurement surface of the measurement object, or the measurement object The relative distance between the detector and the object to be measured is changed so that the object and the detector are relatively moved along the measurement surface of the object to be measured, and the detected value from the detector becomes a predetermined value. In the surface texture measuring machine that measures the surface texture of the measurement surface based on the data,
A first moving mechanism, a second moving mechanism, and a third moving mechanism for relatively moving the object to be measured and the detector in three axial directions orthogonal to each other;
An inclination mechanism for inclining the third movement mechanism with respect to the second movement mechanism so that the relative movement direction is parallel to the measurement surface of the object to be measured;
Tilt angle storage means for storing the tilt angle of the tilt mechanism;
A rotating mechanism for rotating the direction of the detector around the moving direction axis of the third moving mechanism;
Rotation angle storage means for storing the rotation angle of the rotation mechanism;
Based on the inclination angle stored in the inclination angle storage means, the second movement is performed so that the relative distance between the object to be measured and the detector changes in a direction perpendicular to the measurement surface of the object to be measured. And controlling the driving of the mechanism and the third moving mechanism, and based on the rotation angle stored in the rotation angle storage means, the relative distance between the object to be measured and the detector is relative to the measurement surface of the object to be measured. A surface texture measuring machine comprising control means for controlling driving of the first moving mechanism and the second moving mechanism so as to change in the vertical direction. In the surface texture measuring instrument according to any one of claims 1 to 3,
The control means moves one of the moving mechanisms so that the detector approaches from the vertical direction with respect to the measurement surface of the object to be measured on the condition that a start command is given. A surface texture measuring machine which stops driving of the moving mechanism when the detected value exceeds a predetermined value set in advance. In the surface texture measuring machine according to claim 4,
The control means stops driving the moving mechanism, and then drives the moving mechanism in the opposite direction and at a lower speed than the speed, so that the detection value from the detector reaches a predetermined value set in advance. A surface texture measuring machine which stops driving of the moving mechanism when it is done. In the surface texture measuring instrument according to any one of claims 1 to 5,
The detector includes a detector main body that is moved by the moving mechanism, a stylus that is swingably supported by the detector main body, a stylus provided at the tip of the stylus, and a swing amount of the stylus. A surface texture measuring device comprising a detecting unit for detecting.

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