JP2003302218A - Roundness measuring device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a roundness measuring device, enabling automatic alignment of a detector and a probe corresponding to the shape of a material to be measured. <P>SOLUTION: This roundness measuring device has a detector holder 22, which supports a detector 24 in the vicinity of one end part and the other end of which is rotatably supported on the apparatus body. The shape information on the material to be measured and measurement classification can be input to a console panel 20, and according to the shape information on the material to be measured and the measurement classification input to the console panel, the attitude of the detector holder 22 is automatically controlled to the horizontal state or the vertical state. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a roundness measuring device, and more particularly, to a circularity measuring device which rotates a work table on which an object to be measured is placed and which is brought into contact with a probe of a detector. The present invention relates to a table rotation type roundness measuring device for measuring a degree.

[0002]

2. Description of the Related Art A roundness measuring device for measuring roundness of a disk-shaped object, a columnar object, a conical object or the like is widely used. As a device of this type that is especially often used, a table rotation type roundness that measures the roundness while rotating the work table on which the DUT is placed and contacting the probe of the detector with this DUT There is a measuring device. This measuring device performs measurement while bringing a probe of a detector, particularly a lever type probe, which is generally used, into contact with an object to be measured.

However, circularity is required to correspond to not only the circularity in a narrow sense but also various measurements such as coaxiality and cylindricity. The position of contact of the probe with the object to be measured is different, and the direction in which the probe is pressed against the object to be measured is also different. Therefore, proper detector and probe alignment is required.

[0004]

However, in the above-mentioned conventional roundness measuring device, the operation of aligning the detector and the probe is complicated, and there is a problem that the operation requires skill. Therefore, there has been a demand for a measuring device that enables even an inexperienced worker to easily perform the alignment of the detector and the probe corresponding to various measurements (coaxiality, cylindricity, etc.).

The present invention has been made in view of the above circumstances, and an object thereof is to provide a roundness measuring device capable of automatically aligning a detector and a probe corresponding to the shape of an object to be measured. And

[0006]

In order to achieve the above object, the present invention is to rotate a work table on which an object to be measured is placed and to bring the object to be measured into contact with a probe of a detector. In a roundness measuring device for measuring the roundness of an object to be measured, the device supports the detector in the vicinity of one end, and the other end is rotatably supported on the main body of the device. The operation panel has a holder, and the shape information and measurement type of the object to be measured can be input. According to the shape information and measurement type of the object to be measured input to the operation panel, the detector holder Provided is a roundness measuring device characterized in that its posture is automatically controlled in a horizontal state or a vertical state.

According to the present invention, in the roundness measuring device, the posture of the detector holder is automatically positioned in the horizontal state or the vertical state according to the inputted shape information of the object to be measured and the measurement type. Therefore, even an operator unskilled in the measurement work can easily align the position of the detector and the probe corresponding to various measurements (coaxiality, cylindricity, etc.), and improve the measurement work efficiency.

The roundness means not only the roundness in a narrow sense but also the roundness in a broad sense including various measurement types (measurement items) listed below. Roundness measuring devices (for example, manufactured by Tokyo Seimitsu Co., Ltd., trade name: Roncom) available in the market
The specifications list that it can be applied to such measurement items.

The above measurement items (measurement items) are, for example,
Roundness, flatness, parallelism, concentricity,
Coaxiality, cylindricity, diameter deviation, thickness deviation, squareness, runout, and diameter values are straightness, taper, cylindricity, in the linear motion direction (Z).
Squareness and parallelism are radial directions (R), and straightness can be mentioned.

The shape information of the object to be measured is the shape of the measuring section of the object to be measured, such as the conical portion, the outer surface of the cylinder, the upper surface of the flange portion, the lower surface of the flange portion, and the dimensions of the measuring object.
For example, a radial position, a height position, etc.

In the present invention, the detector is rotatably supported by the detector holder, and according to the shape information of the object to be measured and the measurement type input to the operation panel,
Preferably, the detector is automatically controlled to the optimum pivot position. As described above, if not only the detector holder but also the detector is automatically positioned at the optimum rotation position, the work becomes easier.

Further, in the present invention, it is preferable that the detector holder is made of a rod-shaped member, and the detector is rotated about an axis parallel to the longitudinal direction of the member. Thus, the detector holder is made of a rod-shaped member, for example, an L-shaped member, and the detector supported at the tip of the L-shaped short axis is parallel to the longitudinal direction of this member (L-shaped long axis direction). This is because if the structure is rotated around the axis, it can easily correspond to the measurement site of the object to be measured and the measurement posture of the detector.

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of the roundness measuring device according to the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is an overall configuration diagram of a roundness measuring device according to the present invention. The roundness measuring device 10 includes a device main body 12, a Z-direction moving unit 14 provided on the upper right side of the device main body 12,
X-direction moving means 16 supported by the Z-direction moving means 14,
While being supported by the left end of the X-direction moving means 16, X
A detector holder 22 that is rotatable about an axis, a detector 24 that is rotatably supported by the tip of the detector holder 22, a work table 18 that is provided on a substantially central upper surface of the apparatus body 12, and , And an operation panel 20 provided on the upper left side of the apparatus body 12. A probe P is provided at the tip of the detector 24.

FIG. 2 is a conceptual diagram for explaining measurement points of the object to be measured W, in which the probe P of the detector 24 is pressed against the inner peripheral portion and the outer peripheral portion of the upper left cylindrical object to be measured W. The state and the state in which the probe P of the detector 24 is pressed against the conical portion, the cylindrical outer surface, the flange upper surface and the flange lower surface of the measured object W at the lower right are respectively shown.

The detector 24 and the probe P are arranged so that they can be automatically positioned so as to support various measurements (coaxiality, cylindricity, etc.) in each state.

The outline of each component and the details of the detector holder 22 will be described below. The Z-direction moving means 14 is
The stand 32 is provided on the upper right side of the apparatus main body 12 and includes a Z-direction table, and a measurement stage 32 that moves up and down along the Z-direction table. Vertical movement (movement in the Z direction) of the measurement stage 32 can be performed manually (for example, button operation, joystick operation, etc.), and the shape, size, measurement type (coaxiality, cylindricity, etc.) of the object to be measured W, etc. It is also possible to adopt a system that can be automatically performed by inputting on the operation panel 20.

The X-direction moving means 16 is the Z-direction moving means 1.
The measurement stage 32 is supported by the measurement stage 32 and a horizontal arm 34 that penetrates the measurement stage 32 and is movable in the left-right direction (X direction) with respect to the measurement stage 32. Horizontal movement of the horizontal arm 34 (X direction movement)
Can be performed manually (for example, button operation, joystick operation, etc.), or automatically by inputting the shape, size, measurement type (coaxiality, cylindricity, etc.) of the object to be measured W on the operation panel 20. You can also use the method.

The work table 18 is provided on a substantially central upper surface of the apparatus main body 12, is formed in a disk shape, and can be rotationally driven. The number of rotations may be changed stepwise or may be variable steplessly. The centering adjustment and the tilting adjustment may be made possible, and an automatic eccentricity correction function and an automatic inclination correction function may be added.

The operation panel 20 is provided on the upper surface of the left side of the apparatus main body 12 so that measurement information (including shape information of the object to be measured W) can be input, various operations of the apparatus and output of measurement results and the like can be performed. It is configured. Illustrated operation panel 20
A personal computer is used in the computer, the input work is mainly performed by the keyboard, and the output is performed by the display (liquid crystal panel) and the printer. Various controls of the roundness measuring device 10 are performed by the CPU built in the operation panel 20. In the low-priced model, the operation panel 20 does not need to use a personal computer, but a panel dedicated to the device can be adopted.

As the detector 24, a lever-type probe type of a system in which a differential transformer is used for displacement detection and the probe P is pressed against the object to be measured W is adopted. It should be noted that the adoption of various types other than this is not excluded. The force that presses the probe P against the measured object W, so-called measuring force, is fixed to a single value (for example, 70 m).
N) may be used, or it may be variable (for example, 30 to 100 mN) according to the shape, size, measurement type (coaxiality, cylindricity, etc.) of the object to be measured W. May be.

The probe at the tip of the probe P is generally spherical (for example, a super steel ball having a diameter of 1.6 mm), but the shape, size, and type of measurement (coaxiality, cylindricity) of the object W to be measured. , Etc.) and other types may be used.

The detector holder 22 is a member having a substantially L shape, supports the detector 24 in the vicinity of one end thereof, and has the other end rotatably supported by the main body of the apparatus (in this case, X It is supported on the left end of the horizontal arm 34 of the direction moving means 16. FIG. 3 is an enlarged cross-sectional view of a main part of the roundness measuring device according to the present invention, showing the configuration of the detector holder 22. The orientation of the detector holder 22 in the same figure is left-right reversed from that in FIG. FIG. 4 is a side view of the same. Note that FIG.
In, the lower half of the detector 24 is not shown. 5 is a partial sectional view of FIG. 4, and FIG. 6 is a sectional view taken along the line AA of FIG.

As shown in FIG. 3, the detector holder 22
Has a substantially L shape (inverted L shape), and is composed of a vertical straight portion 22a and a curved portion 22b extending at a right angle from the upper end of the straight portion 22a. The lower end portion of the straight portion 22a is connected to the end portion of the horizontal arm 34 of the X-direction moving means 16 via the detector holder rotating means 40. A detector 24 is rotatably supported on the tip of the curved portion 22b.

The detector holder rotating means 40 comprises a horizontal arm 34.
Is fixed to the end portion of the horizontal arm 34 and moves integrally with the horizontal arm 34. The detector holder rotating means 40 is composed of a worm gear 46 that is integrated with the detector holder 22, a worm 48 that meshes with the worm gear 46, a motor 56 that drives the worm 48, and the like. Is rotated in the direction.

More specifically, as shown in FIGS. 3 and 5, the shaft 42 fitted and fixed in the through hole 22c provided in the lower end portion of the straight portion 22a of the detector holder 22 is a detector. Through hole 40 provided in the body of holder rotating means 40
It is fitted to a and is in a rotatable state. A retaining ring 42a is fixed to the tip (left end) of the shaft 42 to restrain the movement of the shaft 42 in the left-right direction.
Further, a worm gear 46 is fixed to a substantially central portion of the shaft 42 in the left-right direction (X direction) so that the shaft 42 can rotate integrally.

On the other hand, above the worm gear 46 (Z direction)
Is provided with a worm 48 facing the Y-axis direction, and the worm 48 is supported so as to mesh with the worm gear 46. Both ends of the shaft of the worm 48 are bearings 50 provided on the main body of the detector holder rotating means 40.
It is rotatably supported by 50. In addition, the tip of the right end of the shaft of the worm 48 in FIG.
2. It is connected to a motor 56 fixed to the main body of the detector holder rotating means 40 via a planetary gear head 54. The drive of the motor 56 is controlled by the CPU built in the operation panel 20.

Therefore, when the motor 56 is driven,
The worm 48 rotates, and this torque is applied to the worm gear 46.
As a result, the detector holder 22 is rotated about the shaft 42 in the arrow direction in FIG.

By the way, measurement types (coaxiality, cylindricity,
Etc.), the attitude of the detector holder 22 required depending on
There are only two states, a vertical state shown in FIGS. 3 and 4, and a horizontal state in which the state is rotated 90 degrees counterclockwise from the state of FIG. Therefore, in these two states, the detector holder 22
Must be configured so that the rotation of can be reliably stopped.

Therefore, as shown in FIG. 3, detection means for detecting the vertical state is provided. That is, the detector holder 22 is provided with the detection plate 60, and the detector holder rotating means 40 is provided with the sensor 62. By combining the both, the vertical state of the detector holder 22 can be detected. There is. The sensor 62
Is connected to a CPU built in the operation panel 20.

Further, as shown in FIG. 4, the detector holder rotating means 40 is provided with a mechanical stopper 64, and when the detector holder 22 is rotated, it overruns from the vertical state. You can prevent it.

Even when the detector holder 22 is horizontal,
As shown in FIG. 4, a sensor 66 is provided, and in combination with the detection plate 60, the horizontal state of the detector holder 22 can be detected. The sensor 6
Reference numeral 6 is connected to a CPU built in the operation panel 20. Further, the detector holder rotating means 40 is provided with a mechanical stopper pin 68, so that when the detector holder 22 is rotated, an overrun from a horizontal state can be prevented.

Next, the structure in which the detector 24 is rotated with respect to the detector holder 22 will be described. As shown in FIGS. 3 and 6, the shaft portion 24a of the detector 24 is the pulley shaft 7
The pulley shaft 70 is fitted in a bearing portion 72 formed at the tip (right end) of the curved portion 22b of the detector holder 22, and is in a freely rotatable state. A pulley 74 is fixed to the upper end of the pulley shaft 70, and the pulley shaft 70 and the pulley 74 are integrally rotated by being driven by a timing belt 76 described later.

A stopper ring 78 is fixed to the lower end portion of the pulley shaft 70, and a flange portion 80 is formed on the upper portion of the pulley shaft 70 so that the vertical movement of the pulley shaft 70 can be restricted. Has become. Also, the pulley shaft 70
The vicinity of the central portion in the up-and-down direction is biased in the X direction by the spring means 82, so that the play of the pulley shaft 70 is less likely to occur.

A drive means for rotating the detector 24 with respect to the detector holder 22 is provided at the base end (left end) of the curved portion 22b of the detector holder 22. That is, a stay 90, which is a combination of a hook-shaped member and a U-shaped member, is fixed to the base end of the curved portion 22b, and the pulley shaft 92, the pulley 94, the motor 102, the encoder 106, and the like are supported by the stay 90. The drive means is thus configured.

That is, the pulley shaft 92 is fitted to the pulley 94 so as to be able to rotate integrally, and both ends of the pulley shaft 92 have through-holes 96 provided in the stay 90,
The planetary gear head 100 and the encoder 106 are respectively connected via 98. The lower end of the pulley shaft 92 is connected to the stay 9 via the planetary gear head 100.
It is driven by a motor 102 which is fixed at zero. Further, the upper end of the pulley shaft 92 is connected to the encoder 106 fixed to the stay 90 via the coupling 104, and the rotational position can be detected.

The optimum rotational position of the detector 24 can be various positions as shown in FIG. 2, unlike the two positions of the detector holder 22. Further, as described above, the encoder 106 is provided so that the turning position can be detected. Therefore, in the sense like the detector holder 22,
There is little need to provide detection means and mechanical stoppers.
However, since the attitude of the detector 24 shown in FIGS. 1 and 3 is the most used attitude, it is worth providing the detecting means even for this attitude only.

Therefore, as shown in FIG. 3, detection means for detecting the fixed position state is provided. That is, the pulley 94 is provided with the detection plate 108 and the detector holder 2
Sensors 110 are provided in the vicinity of the left ends of the two curved portions 22b, respectively, and the combination of the two allows the detector 24 to detect the fixed position state. The sensor 110 is connected to the CPU built in the operation panel 20.

Next, the operation of the roundness measuring device 10 according to the present invention will be described. First, the workpiece (work) W is set on the work table 18. Then, the shape, size, measurement type (coaxiality, cylindricity, etc.) of the object to be measured W is input to the operation panel 20. As a result, the operation panel 20
The built-in CPU determines whether the posture of the detector holder 22 is optimal in the horizontal state or the vertical state according to the shape information of the measured object W and the measurement type. Then, the motor 56 of the detector holder rotating means 40 is driven to drive the detector holder 2
2 is rotated to automatically position the detector holder 22 in the horizontal state or the vertical state.

At the same time, C built in the operation panel 20
PU, according to the shape information of the object to be measured W and the measurement type,
A rotation position where the attitude of the detector 24 is optimum is calculated. Then, the motor 102 of the drive means for rotating the detector 24 with respect to the detector holder 22 is driven to rotate the detector 24 and automatically position it at the optimum position.

After that, the Z-direction moving means 14, the X-direction moving means 16 and the like are driven manually or automatically to bring the probe P into contact with the detection position of the object to be measured W while the work table 18 is being operated.
The measurement is made by rotating.

Although the example of the embodiment of the roundness measuring device according to the present invention has been described above, the present invention is not limited to the example of the above embodiment, and various modes can be adopted.
For example, the type of the detector 24 is not limited to the differential transformer system, and a linear scale, a non-contact type position sensor (for example, a laser sensor) or the like can also be used.

Further, the Z-direction moving means 14, the X-direction moving means 16 and the like may have other configurations.

[0043]

As described above, according to the present invention,
In the roundness measuring device, the posture of the detector holder is automatically positioned in the horizontal state or the vertical state according to the input shape information of the measured object and the measurement type. Therefore,
Even a worker unskilled in the measurement work can easily align the position of the detector and the probe corresponding to various measurements (coaxiality, cylindricity, etc.), and improve the measurement work efficiency.

[Brief description of drawings]

FIG. 1 is an overall configuration diagram of a roundness measuring device according to the present invention.

FIG. 2 is a conceptual diagram for explaining measurement points of an object to be measured.

FIG. 3 is an enlarged cross-sectional view of a main part of a roundness measuring device according to the present invention.

FIG. 4 is a side view of the same.

5 is a partial cross-sectional view of FIG.

6 is a sectional view taken along line AA of FIG.

[Explanation of symbols]

10 ... Roundness measuring device, 12 ... Device main body, 14 ... Z direction moving means, 16 ... X direction moving means, 18 ... Work table, 20 ... Operation panel, 22 ... Detector holder, 24 ... Detector, P ... Probe, W ... DUT (workpiece)

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Takehiro Kugo             9-7 Shimorenjaku, Mitaka City, Tokyo Stocks             Company Tokyo Seimitsu F term (reference) 2F069 AA56 DD16 GG02 GG06 GG59                       HH02 HH11 JJ17 LL02 MM04                       QQ08 QQ13

Claims (2)

[Claims] 1. A circularity measuring device for rotating a work table on which an object to be measured is placed and measuring the circularity of the object to be measured while contacting a probe of a detector with the object to be measured, The apparatus has a detector holder that supports the detector near one end and has the other end rotatably supported on the apparatus main body side. The type can be input, and the posture of the detector holder can be automatically controlled to be in a horizontal state or a vertical state according to the shape information of the object to be measured and the measurement type input to the operation panel. Characteristic roundness measuring device. 2. The detector is rotatably supported by the detector holder, and the detector is optimally rotated according to the shape information of the object to be measured and the measurement type input to the operation panel. The roundness measuring device according to claim 1, wherein the position is automatically controlled.