JPH06194139A - Shape measuring method - Google Patents

Abstract

PURPOSE:To provide the shape measuring method capable of measuring a shape unmeasurable in the past with high precision without requiring high-level machin ing. CONSTITUTION:A shape measuring datum corresponding to the shape of a measurement object set in a measurement space formed by a moving mechanism is formed in the measurement space (ST13, 14), the displacement quantity between a detector and the measurement object is measured while the detector and the measurement object are relatively moved according to the measuring datum (ST15), and the shape of the measurement object is calculated from the measured data against the measuring datum (ST16). The measuring datum is set in the measurement space, and the measuring datum having an optional shape can be set without requiring high-level machining.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shape measuring method using a shape measuring machine equipped with a moving mechanism for relatively moving a detector and an object to be measured. More specifically, the present invention relates to a shape measuring method for measuring a contour shape or the like of an object to be measured in a non-contact state or a contact state while relatively moving a detector such as a non-contact type detector or a contact type detector and the object to be measured.

[0002]

2. Description of the Related Art Conventionally, a structure shown in FIG. 13 is known as a shape measuring machine for measuring the contour shape of an object to be measured.
In the figure, a column 2 is erected on a base 1. An elevating member 3 is provided in the column 2 so as to be vertically movable (Z-axis direction) via a feed screw shaft (not shown), and a swing member 4 is orthogonal to the axis of the column 2 in the elevating member 3. It is attached so that the angle (θ) can be adjusted around an axis (an axis orthogonal to the paper surface). The swing member 4 is provided with a feed screw shaft 6 which is rotated by a motor 5A or an operation handle 5B.

A housing 8 is suspended and supported on the feed screw shaft 6 via a connecting member 7 such as a nut so as to be movable in the left-right direction (X-axis direction). A measurement arm 10 having a stylus 9 at its tip is swingably supported in the housing 8 in the vertical direction, and a displacement detection sensor such as a differential transformer that electrically detects the swing amount of the measurement arm 10. (Not shown) is provided. 2A is an operation handle for moving the elevating member 3 up and down (Z-axis direction).

Therefore, in the measurement, first, the object W to be measured is placed on the base 1, and the object W to be measured is placed.
Position the stylus 9 at the measurement start point of. Here, when the motor 5A is driven, the housing 8 is moved in the X-axis direction along with the rotation of the feed screw shaft 6. When the housing 8 moves in the X-axis direction, the stylus 9 is vertically displaced according to the unevenness of the surface contour shape of the object to be measured W, so that the measuring arm 10 is swung. As a result, the amount of swing of the measuring arm 10 is detected by a displacement detection sensor (not shown), so that the contour shape of the object to be measured W can be measured from the amount of swing.

[0005]

By the way, the conventional shape measuring machine uses the rectangular coordinate system composed of the base 1 and the column 2 as the measuring datum, as described above. The mechanical accuracy of the measuring machine in the system determines the measuring accuracy. That is, the flatness of the base 1,
The running accuracy of the housing 8 including the measurement arm 10 and the displacement detection sensor in the X-axis direction, the squareness of the column 2 with respect to the base 1, and the like determine the measurement accuracy. Therefore, in order to achieve high accuracy, high-level machining and adjustment are required, which is inevitably expensive, and it takes time and effort to adjust for aging.

In addition to the mechanical accuracy of the measuring instrument, in the case of the stylus type, the diameter of the stylus tip, the so-called stylus radius, also causes a large error, and the R correction means for the stylus is indispensable. This is because when the contact position of the tip of the stylus with the object to be measured changes, the displacement signal in the Z-axis direction changes and the detected position in the X-axis direction changes. Especially when high resolution is required, it will remain as a big problem,
It will determine the limit of high precision.

Further, in the measurement in the first quadrant of the Cartesian coordinate system composed of the X-axis and the Z-axis described above, the measurable length in the X-axis direction can be increased, but in the Z-axis direction. It is difficult to increase the detectable range of. for that reason,
The shape to be measured is mainly limited to a substantially flat shape, and there is a limitation in measuring the contour shape of a measured object having a right-angled shape, a circular shape, an elliptical shape, or a combination thereof.

When these contour shapes are intentionally measured, a method of inclining the object to be measured is generally adopted, but since it is limited to the detectable range of the detector, X
It has to be very small compared to the measurable length in the axial direction, and therefore, it has been intended only for a small part of the small measurement range.

Another method is to rotate an object to be measured and measure its shape, as used in measuring the circularity. In this case, it becomes necessary to exactly match the center of the object to be measured with the center of the rotating mechanism. This work is time-consuming and tedious and takes time as the operator gets used to it. In this case as well, it is natural that the detection range is limited to the direction of the central axis of rotation as in the method of inclining the object to be measured,
It can be used only for shape measurement within a narrow measuring range. That is, it is impossible to measure the contour shape of the entire object to be measured.

The object of the present invention is to solve all of the problems of the prior art, and to perform highly accurate shape measurement without the need for advanced machining and adjustment. An object of the present invention is to provide a shape measuring method capable of measuring a shape that cannot be measured.

[0011]

Therefore, the shape measuring method of the present invention is a shape measuring method using a shape measuring machine equipped with a moving mechanism for relatively moving the detector and the object to be measured,
A measurement datum setting step of setting a measurement datum having a shape corresponding to the measurement shape of the measured object set in the measurement space formed by the moving mechanism in the measurement space, and set by the measurement datum setting step A measuring step of measuring a displacement amount between the detector and the object to be measured while relatively moving the detector and the object to be measured according to the measured datum, and a measuring datum set in the measuring space. And a shape calculation step of calculating the shape of the object to be measured from the measurement data obtained in the measurement step.

In the above-mentioned shape measuring method, a reference body whose shape is grasped with high accuracy is set in a measurement space formed by the moving mechanism, and the reference body and the detector are moved relative to each other. While measuring the shape or position of the reference body, set the spatial coordinates from the relative positional relationship between the detector and the reference body obtained from this measurement data, and store the difference between the spatial coordinates and the machine coordinates as correction data. And a correction data creating step, wherein the measurement datum setting step or the shape calculating step corrects the measurement datum or the measurement data using the correction data stored in the correction data creating step. .

Further, in the above-mentioned shape measuring method, the measuring datum setting step includes moving the object to be measured and the detector set in a measuring space formed by the moving mechanism while relatively moving the object and the detector. Preliminary measurement step for measuring the amount of displacement between the object and the measurement space using the relative movement trajectory of the shape corresponding to the measured shape of the measured object as the measurement datum based on the measurement data obtained by this preliminary measurement step And a relative movement locus generating step set inside.

[0014]

In the measurement, first, a measuring datum having a shape corresponding to the measured shape of the object to be measured set in the measuring space formed by the moving mechanism is set in the measuring space (measuring datum setting step). . At this time, the shape of the measurement datum is not limited to the measurement shape itself of the measurement object, but may be any shape as long as the measurement shape of the measurement object falls within the detectable range of the detector. After that, the displacement amount between the detector and the object to be measured is measured while moving the detector and the object to be measured relative to each other according to the measuring datum (measurement step). Then, the shape of the measured object is calculated based on the measurement data obtained in the measurement step (shape calculation step).

Therefore, since the datum for measurement is set in the measurement space, the datum for measurement can be easily corrected using the correction data. For example, a reference body whose shape is grasped with high precision is set in advance in a measurement space formed by a moving mechanism, and the shape or position of the reference body is measured while relatively moving the reference body and the detector. If the spatial coordinates are set from the relative positional relationship between the detector and the reference body obtained from this measurement data and the difference between the spatial coordinates and the machine coordinates is stored as correction data, this correction data can be used. The datum for measurement can be easily corrected. Therefore, it is possible to perform highly accurate shape measurement by ensuring only the repeatability of the mechanical system without requiring the high-level machining and adjustment as in the past.
Further, since the measurement datum is set in the measurement space, an arbitrary shape can be used as the measurement datum, so that it is possible to measure a shape that cannot be measured in the related art.

[0016]

Embodiments to which the shape measuring method of the present invention is applied will be described below in detail with reference to the accompanying drawings.
FIG. 1 shows a shape measuring system of this embodiment. The shape measuring system includes a measuring machine main body A for setting and measuring an object to be measured, an arithmetic and control unit B for taking measurement data while controlling the operation of the measuring main body A, and an arithmetic and control unit B. And a data analysis processing device (host computer) C for analyzing the measurement data and displaying the result. In addition, D is a work table.

As shown in FIGS. 2 and 3, the measuring machine main body A includes a base 11 and an X-axis table 13 provided on the base 11 via an X-axis drive system 12 so as to be movable in the X-axis direction. And the Y-axis drive system 14 on the X-axis table 13.
Via a Y-axis table 15 movably in the Y-axis direction, a column 16 erected at a rear position on the base 11, and a Z-axis drive system 17 attached to the column 16 to provide a Z-axis table.
A Z-axis slider 18 which is provided so as to be able to move up and down in the axial direction, a turning table 20 which is provided on the Z-axis slider 18 via a turning drive system 19 so as to be turnable about an axis parallel to the Y-axis. The non-contact detector 21 having a predetermined detectable range is fixed to the front of the turntable 20. Here, the above tables 13, 15, 2
0, Z-axis slider 18 and their drive systems 12, 1
A moving mechanism 10 configured to relatively move the non-contact detector 21 and the object to be measured is constituted by 4, 17, and 19.

A switch panel 23 having a plurality of switch groups 22 is provided at the front edge of the base 11. The X-axis drive system 12 and the Y-axis drive system 14 are composed of feed screw shafts 24X and 24Y and motors 25X and 25Y, and are housed in a cover 26 provided on the base 11. The Z-axis drive system 17 includes a feed screw shaft 27 supported by the column 16 in parallel with the Z-axis direction, and a motor 31 connected to the feed screw shaft 27 via a speed reducer 28, helical gears 29, 30 and the like. And the Z axis slider 18 screwed onto the feed screw shaft 27.
And a nut 32 fixed to the. The swivel drive system 19 is provided on the Z-axis slider 18 in parallel with the Y-axis through a frame 33, and has a swivel table 20 at the front end thereof, and the swivel shaft 34 has helical gears 35, 36. And a motor 37 connected via

The non-contact detector 21 has, for example, the structure shown in Japanese Patent Application No. 3-292477. In other words, the laser beam is applied to the measurement surface, and the specular reflection light from the measurement surface is used to detect the change in the amount of light on the optical axis in the vicinity of the in-focus point while controlling the drive of the objective lens in the optical axis direction. By detecting the amount of movement of the objective lens based on the focus state, the amount of change in the distance between the measurement surface and the detector, that is, the change in unevenness with the measurement surface, is measured. It is located on the center line of the pivot shaft 34. By the way, the one used here has a working distance of 10 mm, a measurement maximum range of 600 μm, and a resolution of 0.2 μm (minimum range of 6 μm.
m, resolution 0.002 μm). 38 is a balance weight, one end of which is connected to the other end of a wire 40 which is connected to the Z-axis slider 18 via a pulley 39 on the column 16. Further, 41 is a dust-proof bellows that closes the front side of the column 16 over the elevation range of the Z-axis slider 18,
42 is a cover.

FIG. 4 is a block diagram showing a circuit configuration centering on the measuring machine body A and the arithmetic and control unit B. The arithmetic and control unit B includes a CPU 51, a transmission unit 52, a memory unit 53, a preamplifier unit 59, a data sampling unit 54,
Switch group control unit 55, motor driver unit 5
6, a counter unit 57 and a bus 58 connecting them. The CPU 51 executes processing according to the processing program stored in the memory unit 53. Note that this processing will be described in the operation. The transmitter 52
The data analysis processing device C is connected to. In the memory unit 53, in addition to a program storage area for storing the processing program, a measurement map storage area for storing various measurement maps, a datum storage area for storing data of generated measurement datums, and input measurement data. A data storage area or the like for storing is provided.

The preamplifier section 59 takes in the output from the non-contact detector 21 at a predetermined sampling interval in synchronization with the data sampling section 54. The data sampling unit 54 includes preamplifiers 49X, 49Y, 49
Outputs from Z and 49θ are selected and taken in at a predetermined sampling interval. The switch group control section 55 is
Data based on the operation of the switch group 22 is fetched.
The motor driver unit 56 includes the drive systems 12, 1
Motors 25X, 25Y, 3 constituting 4, 17, 19
1, 37 are connected. The counter unit 57 includes
The outputs from the encoders 45, 46, 47, 48 for detecting the amount of displacement in the drive systems 12, 14, 17, 19 are the preamplifiers 49X, 49Y, 49Z, 49θ, respectively.
Have been entered through.

The encoder 45 for detecting the amount of displacement in the X-axis direction includes an X-axis scale provided on the X-axis table 13 along the X-axis direction, and the base with a predetermined gap in the X-axis scale. It is composed of a detector arranged on the 11 side so as to face each other. The encoder 46, which detects the amount of displacement in the Y-axis direction, includes a Y-axis scale provided on the Y-axis table 15 along the Y-axis direction, and the X-axis table 13 with a predetermined gap from the Y-axis scale. It consists of a detector fixed on top. The encoder 47, which detects the amount of displacement in the Z-axis direction, faces the Z-axis scale provided on the column 16 along the Z-axis direction and the Z-axis slider 18 with a predetermined gap from the Z-axis scale. It is composed of a detector arranged. The encoder 48 for detecting the angle θ of the non-contact detector 21 includes a rotary disc fixed to the rotary shaft 34 and a detector arranged to face the frame 33 with a predetermined gap in the rotary disc. It consists of

Next, the operation of this embodiment will be described with reference to FIGS. For example, at the time of shipment from a factory, a reference body whose shape is grasped with high precision, here a reference piece, is set in the measurement space formed by the moving mechanism 10, and the reference piece and the non-contact detector 21 are set. The shape or position of the reference piece is measured while relatively moving, the spatial coordinates are set from the relative positional relationship between the non-contact detector 21 and the reference piece obtained from this measurement data, and the difference between the spatial coordinates and the machine coordinates is set. Is written in the memory unit 53 as correction data.

To this end, the processing is executed according to the flowchart of FIG. First, at step (hereinafter abbreviated as ST) 1, the origin is detected, and then at ST2, the reference piece is measured. For example, as shown in FIG. 6, after the reference piece 100 whose shape is grasped with high accuracy is set at a predetermined position in the measurement space and then the measurement is started, the movement locus (preliminary , Is set and stored in the data analysis processing device C corresponding to the right-angled shape of the reference piece 100 before measurement.) The non-contact detector 21 is moved. During this time, the measurement data from the non-contact detector 21, that is, the non-contact detector 21 to the reference piece 1
The displacement amount up to 00 is captured at a predetermined sampling interval.

After the measurement of the reference piece is completed, in ST3, from the relative positional relationship between the detector 21 and the reference piece 100 obtained from those sampling data, the orthogonal space coordinates composed of the X'axis and the Z'axis shown in FIG. (This is the datum of the measuring machine) is set in the measurement space, and the difference between the orthogonal space coordinate and the mechanical coordinate determined by the mechanical accuracy of the moving mechanism 10 (for example, the XZ coordinate in FIG. 7) is used as the correction data. create. Then, in ST4, the correction data is written in the memory unit 53.

On the other hand, in the measurement, the process is executed according to the flowchart shown in FIG. First, in ST11,
After performing the initial setting (electrical unit) and detecting the origin, in ST12, the measurement map is downloaded from the data analysis processing device C. For example, in order to measure an object to be measured having a rectangular shape, a measurement map having a locus of movement in the X′-axis direction and a locus of movement in the Z′-axis direction of the orthogonal space coordinates (datum of the measuring machine) is downloaded. Here, for example, as shown in FIG. 10, the measurement conditions are set such that the movement loci of the respective axes have the relationship shown in the figure with respect to the DUT 101. The DUT 101 is, as shown in FIG.
Using a positioning piece 111 and a positioning piece 112 (which can be switched to the position indicated by the alternate long and short dash line when setting the object to be measured and to the position indicated by the solid line during measurement) at a predetermined position on the setting jig 110, inside the measurement space. Set it.

Next, in ST13, preliminary measurement (preliminary measurement of the object 101 to be measured) is performed. When the measurement is started,
As shown in FIG. 10, the non-contact detector 21 and the object to be measured 101 are relatively moved in accordance with the movement locus of the measurement map, and the measurement data from the non-contact detector 21 are taken in at a predetermined sampling interval. Further, the non-contact detector 21 and the object 101 to be measured are relatively moved according to the movement locus, and the measurement data from the non-contact detector 21 are taken in at a predetermined sampling interval.

Next, in ST14, a measuring datum is generated in the measuring space. First, the rotation center coordinates of the detector 21 are calculated based on each measurement data obtained on each movement locus. In other words, the rotation that can rotate while the normal direction of the surface of the object to be measured and the optical axis of the non-contact detector 21 match and the surface of the object to be measured is within the detectable range of the non-contact detector 21. The center coordinate P is calculated. Then, a relative movement locus (see FIG. 11) in which movement loci in the X′-axis and Z′-axis directions are continuously connected by an arc locus having a radius R with the rotation center coordinate P as the rotation center is generated, and the relative movement is generated. The locus data is corrected by the correction data and then written in the memory unit 53 as a measurement datum.

Next, in ST15, main measurement (main measurement of the object 101 to be measured) is performed. This includes the device under test 101
With setting, the detector 21 is automatically returned to the measurement starting point and the main measurement is started. Then, the non-contact detector 21 and the DUT 101 are relatively moved according to the measuring datum of the relative movement locus shown in FIG. First, when the non-contact detector 21 and the DUT 101 are relatively moved to the point P in the X'-axis direction, the non-contact detector is turned by the turning table 20 while being relatively moved in the X ', Z'-axis directions. 21 is turned along an arc locus. That is, the DUT 1
01 The surface 101 is rotated while the normal line direction of the surface and the optical axis of the non-contact detector 21 coincide with each other, and the surface of the object 101 to be measured is within the detectable range of the non-contact detector 21. . Eventually, the direction of the non-contact detector 21 is turned to a horizontal posture, and then it is moved downward by controlling the Z ′ axis.

During this movement, the measurement data from the non-contact detector 21 is taken in at a predetermined sampling interval,
These are stored in the memory unit 53 together with the data of the encoders 45, 46, 47 and 48. And ST1
6, the data stored in the memory unit 53 is calculated into shape data. Finally, in ST17, these measurement data are uploaded to the data analysis processing device C. In the data analysis processing device C, the measurement data can be output as shape figure data on the display, and by specifying points on the figure, the size, position, angle, radius of the arc, etc. of each point can be minimized. Various kinds of processing are possible, such as obtaining by the square method.

Therefore, according to this embodiment, the shape of the reference piece 100 is measured in advance while the non-contact detector 21 and the reference piece 100 are relatively moved, and the detector 21 and the reference piece obtained from this measurement data are measured. X'from the relative positional relationship with 100
An orthogonal space coordinate composed of the axis and the Z ′ axis is formed in the measurement space, and the difference between the space coordinate and the machine coordinate is stored as correction data. In the measurement, the measured object 101 is set in a predetermined place in the measurement space, and the measurement datum having a shape corresponding to the measured shape of the measured object on the basis of the orthogonal space coordinates and corrected by the correction data is used in the measurement space. After the setting, the detector 21 and the DUT 101 are moved relative to each other in accordance with the measuring datum.
The displacement of the object to be measured 101 is measured by 1, and the shape of the object to be measured is calculated based on the measured data.

Therefore, since the datum for measurement is set in the measurement space, the datum for measurement can be easily corrected by using the correction data obtained by the measurement of the reference piece 100. It is possible to perform highly accurate shape measurement by ensuring only the repeatability of the mechanical system without requiring adjustment. That is, X
The movement mechanism in the axial and Y-axis directions is only required to have the repetition accuracy of the movement for both the mechanism for turning the non-contact detector 21. In general, a mechanism assembled by machining can have a high repeat accuracy, and thus has an advantage of not requiring a particularly advanced processing technique. Therefore,
It is cheap.

Further, since the measurement datum is set in the space, any shape and function can be used as the measurement datum, so that it is possible to measure a shape that could not be measured in the past. For example, besides the right-angled shape,
In addition to prismatic and elliptical shapes, it is possible to measure the entire contour shape of a complicated object to be measured having a twist component such as a turbine blade.

Further, the turning table 2 is attached to the Z-axis slider 18.
0 is rotatably provided about a revolving shaft 34 parallel to the Y axis, and the non-contact detector 21 is attached so that the focal positions coincide with the rotational center axis of the revolving table 20. Even when measuring a rounded shape, the rotary table 2 is moved while moving to the X axis and Z axis.
By rotating 0 to orient the non-contact detector 21 toward the center P of the radius, the non-contact detector 21 can be moved in a posture perpendicular to the surface of the radius. Normally, it is desirable to make the optical axis of the detector 21 and the normal line direction of the surface of the object 101 to be measured coincide with each other as much as possible in order to achieve high-accuracy measurement. Can be controlled so that a measurement with less error can be achieved. In the case of the stylus type, the stylus R correction can be eliminated.

Further, the measurement data uploaded to the data analysis processing device C can be displayed as it is as a graphic, and it is also applied to a designated straight line, circle, ellipse, or other curved line, and the step size, between two points Distance, intersection angle, least square approximation circle Intersection center and radius, or ellipse major axis and minor axis, etc., can be calculated and displayed by mathematical data processing such as the least square method, which is the most suitable position and dimension relationship for the figure. . Furthermore, the figure can be freely processed by rotating, enlarging or reducing it.

The present invention has been described above with reference to the preferred embodiments, but the present invention is not limited to these embodiments, and various improvements and design changes can be made without departing from the gist of the present invention. It is possible. For example, the datum of the measuring machine is not limited to the orthogonal space coordinates described in the above embodiment, but may be any other line or shape, or a combination thereof. Further, in the above embodiment, the relative movement locus data corresponding to the measurement shape of the object to be measured is corrected with the correction data with reference to the orthogonal space coordinates, and it is set as the measurement datum in the measurement space. Memory part 5
The shape data may be calculated by correcting the data stored in 3 with the correction data.

Further, in the above embodiment, the non-contact detector 21
However, the detector for measuring the shape of the object 101 to be measured is not limited to this, and a stylus detector in which the stylus directly contacts the surface of the object 101 to be measured may be used. Further, in the above embodiment, the DUT 101 is moved in the X ′ and Y axis directions,
Although the non-contact detector 21 is configured to be moved in the Z′-axis direction, the present invention is not limited to this structure, and the object to be measured 101 and the non-contact detector 21 can be relatively moved in at least the X′- and Z′-axis directions. If so, the structure may be such that only one moves.

Further, the reference piece 100 may be measured once at the time of shipment from a factory or the like, but if it is regularly measured at regular intervals, it is possible to prevent the occurrence of errors due to aging. In addition, when measuring a plurality of DUTs having the same shape, if the positioning is done correctly,
From the second item onward, preliminary measurement can be omitted and only main measurement can be performed.

The measurable shape is not limited to the shape described in the above embodiment. For example, in the case of the sine curve shown in FIG. 12, a relative movement locus obtained by combining a linear movement locus and an arc movement locus is set in the measurement space as a measurement datum, and the object to be measured and the detector are relative to each other. It should be moved.

[0040]

As described above, according to the shape measuring method of the present invention, it is possible to perform highly accurate shape measurement without requiring high-level machining and adjustment, and it is not possible to perform conventional measurement. This has the effect that it is possible to measure the shape that suits you.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of the present invention.

FIG. 2 is a perspective view showing the outer appearance of the measuring machine body of the above embodiment.

FIG. 3 is a vertical cross-sectional view of the measuring machine body of the above embodiment.

FIG. 4 is a block diagram showing a circuit configuration of the embodiment.

FIG. 5 is a flow chart showing a flow of correction data creation processing in the embodiment.

FIG. 6 is a diagram showing how the reference piece is measured in the above-mentioned embodiment.

FIG. 7 is a diagram showing a state in which a measuring machine datum according to the embodiment is set in a measurement space.

FIG. 8 is a flowchart showing a flow of measurement processing in the above-mentioned embodiment.

FIG. 9 is a perspective view showing a setting jig for setting an object to be measured in the above embodiment.

FIG. 10 is a diagram for explaining a movement locus of a detector when preliminary measuring an object to be measured in the above-mentioned embodiment.

FIG. 11 is a diagram for explaining a movement locus of the detector when the object to be measured is actually measured in the above-mentioned embodiment.

FIG. 12 is a diagram showing another embodiment of the present invention.

FIG. 13 is a diagram showing a conventional shape measuring machine.

[Explanation of symbols]

 A measuring device main body B arithmetic control device C data analysis processing device 21 non-contact detector 101 object to be measured

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hiroyuki Tokihiro Mitsutoyo Co., Ltd. 1-20-1 Sakado, Takatsu-ku, Kawasaki City, Kanagawa Prefecture (72) Inventor Hiroyuki Hidaka 6-8 Hiroko Shinkai, Kure City, Hiroshima Prefecture 20 Mitutoyo Co., Ltd. (72) Inventor Takafumi Kano 6-8-20 Hiroko Shinkai, Kure City, Hiroshima Prefecture Mitutoyo Co., Ltd.

Claims (3)

[Claims] 1. A shape measuring method using a shape measuring machine having a moving mechanism for relatively moving a detector and a measured object, wherein the measured object is set in a measurement space formed by the moving mechanism. A measurement datum setting step of setting a measurement datum having a shape corresponding to the measurement shape in the measurement space, and the detector and the object to be measured are moved relative to each other according to the measurement datum setting step set by the measurement datum setting step. While measuring the displacement amount between the detector and the object to be measured, the shape of the object to be measured is calculated from the measurement data obtained in the measuring step for the measuring datum set in the measurement space. A shape measuring method comprising: 2. The shape measuring method according to claim 1, wherein a reference body whose shape is grasped with high accuracy is set in a measurement space formed by the moving mechanism, and the reference body and the detector are set. Measure the shape or position of the reference body while moving and, and set the spatial coordinates from the relative positional relationship between the detector and the reference body obtained from this measurement data, and calculate the difference between the spatial coordinates and the machine coordinates. Compensating the measurement datum or the measurement data by using the correction data stored in the correction data creation step in the measurement datum setting step or the shape calculation step, which has a correction data creation step of storing as correction data. A shape measuring method characterized by. 3. The shape measuring method according to claim 1, wherein in the measuring datum setting step, the object to be measured and the detector set in a measuring space formed by the moving mechanism are moved relative to each other. Preliminary measurement step for measuring the amount of displacement between the detector and the object to be measured, and for measuring the relative movement trajectory of the shape corresponding to the measured shape of the object to be measured based on the measurement data obtained by this preliminary measurement step And a relative movement locus generating step of setting the datum in the measurement space.